DOI: 10.1116/1.1691080. Resolution enhancement in probing of high-speed integrated circuits using dynamic electrostatic force-gradient microscopy

Resolution enhancement in probing of high-speed integrated circuits using dynamic electrostatic force-gradient microscopy

10.1116/1.1691080

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (20)

Abstract

Dynamic mode electrostatic force microscopy is a technique capable of measuring the internal voltage signals of high-speed integrated circuits. Circuit signals are extracted by utilizing the localized nonlinear Coulomb force acting on a microfabricated probe that is closely positioned above the circuit test point. Equivalent time sampling of repetitive high-frequency signals, that can have a bandwidth much greater than the mechanical response of the probe, is achieved by driving the probe with amplitude-modulated high-speed pulses. Currently, dynamic mode electrostatic force microscopes (DEFMs) extract circuit voltage signals through direct sensing of the electrostatic interaction which results in a poor spatial resolution and is susceptible to interference due to significant coupling to the tip sidewall and the cantilever support of the probe. This is especially true for large tip-to-sample distances such as when passivated circuits are measured. This article describes a force-gradient method to improve the spatial resolution of DEFM. The force-gradient method is implemented numerically and is based on sensing the force as the tip-sample distance is modulated. The method is shown to reduce the contribution from the tip sidewall and the cantilever. Measurements of high-speed signals up to 500 Mb/s demonstrate a significant reduction of interference signals.

Bibliography

Weng, Z., Kaminski, T., Bridges, G. E., & Thomson, D. J. (2004). Resolution enhancement in probing of high-speed integrated circuits using dynamic electrostatic force-gradient microscopy. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 22(3), 948â953.

Authors 4

Z. Weng (first)
T. Kaminski (additional)
G. E. Bridges (additional)
D. J. Thomson (additional)

References 23 Referenced 2

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Dates

Type	When
Created	21 years, 3 months ago (May 18, 2004, 6:05 p.m.)
Deposited	2 years ago (Aug. 8, 2023, 5:13 p.m.)
Indexed	2 years ago (Aug. 8, 2023, 5:40 p.m.)
Issued	21 years, 4 months ago (May 1, 2004)
Published	21 years, 4 months ago (May 1, 2004)
Published Online	21 years, 3 months ago (May 18, 2004)
Published Print	21 years, 4 months ago (May 1, 2004)

Funders 0

None

BibTeX

@article{Weng_2004, title={Resolution enhancement in probing of high-speed integrated circuits using dynamic electrostatic force-gradient microscopy}, volume={22}, ISSN={1520-8559}, url={http://dx.doi.org/10.1116/1.1691080}, DOI={10.1116/1.1691080}, number={3}, journal={Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films}, publisher={American Vacuum Society}, author={Weng, Z. and Kaminski, T. and Bridges, G. E. and Thomson, D. J.}, year={2004}, month=may, pages={948–953} }

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