DOI: 10.1116/1.1649343. Thickness dependence of the properties of highly<i>c</i>-axis textured AlN thin films

Thickness dependence of the properties of highlyc-axis textured AlN thin films

10.1116/1.1649343

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (20)

Abstract

The influence of film thickness on the material properties of aluminum nitride (AlN) thin films deposited on Pt(111) electrodes has been investigated experimentally by means of x-ray diffraction, dielectric response, atomic force microscopy, interferometry measurement of effective d33, and residual stress measurement. The thickness was varied between 35 nm and 2 μm. Full width at mid-height of the rocking curve decreased from 2.60 to 1.14°, rms roughness increased from 3.8 to 18.6 Å, the effective d33, namely d33,f, from 2.75 to 5.15 pm/V. The permittivity εAlN was stable at 10.2, whereas the dielectric losses decreased from 1% to 0.1%. The breakdown electric field under dc voltages varied between 4.0 and 5.5 MV/cm.

Bibliography

Martin, F., Muralt, P., Dubois, M.-A., & Pezous, A. (2004). Thickness dependence of the properties of highlyc-axis textured AlN thin films. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 22(2), 361â365.

Authors 4

F. Martin (first)
P. Muralt (additional)
M.-A. Dubois (additional)
A. Pezous (additional)

References 28 Referenced 275

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Dates

Type	When
Created	21 years, 5 months ago (Feb. 26, 2004, 1:31 p.m.)
Deposited	1 year, 7 months ago (Jan. 12, 2024, 9:55 a.m.)
Indexed	1 day, 22 hours ago (Aug. 22, 2025, 12:46 a.m.)
Issued	21 years, 6 months ago (Feb. 12, 2004)
Published	21 years, 6 months ago (Feb. 12, 2004)
Published Online	21 years, 6 months ago (Feb. 12, 2004)
Published Print	21 years, 5 months ago (March 1, 2004)

Funders 0

None

BibTeX

@article{Martin_2004, title={Thickness dependence of the properties of highlyc-axis textured AlN thin films}, volume={22}, ISSN={1520-8559}, url={http://dx.doi.org/10.1116/1.1649343}, DOI={10.1116/1.1649343}, number={2}, journal={Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films}, publisher={American Vacuum Society}, author={Martin, F. and Muralt, P. and Dubois, M.-A. and Pezous, A.}, year={2004}, month=feb, pages={361–365} }

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