DOI: 10.1116/1.1526694. Improvement in brightness of multicusp-plasma ion source

Improvement in brightness of multicusp-plasma ion source

10.1116/1.1526694

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (20)

Abstract

The beam brightness of a multicusp-plasma ion source has been substantially improved by optimizing the source configuration and extractor geometry. The current density of a 2 keV He+ beam extracted from a 7.5-cm-diameter source operating at 2.5 kW rf power is ∼100 mA/cm2, which is ∼10 times larger than that of a beam extracted from a 5-cm-diameter source operating at 1 kW rf power. A smaller focused beam spot size is achieved with a counter-bored extractor instead of a conventional (“through-hole”) extractor, resulting another order of magnitude improvement in beam current density. Measured beam brightness can be as high as 440 A/cm2Sr, which represents a 30 times improvement over prior work.

Bibliography

Ji, Q., Jiang, X., King, T.-J., Leung, K.-N., Standiford, K., & Wilde, S. B. (2002). Improvement in brightness of multicusp-plasma ion source. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 20(6), 2717â2720.

Authors 6

Q. Ji (first)
X. Jiang (additional)
T.-J. King (additional)
K.-N. Leung (additional)
K. Standiford (additional)
S. B. Wilde (additional)

References 13 Referenced 30

{'key': '2023080906415717900_r1'}
10.1116/1.571236 / J. Vac. Sci. Technol. (1981)
10.1116/1.1414019 / J. Vac. Sci. Technol. B (2001)
10.1117/12.370128 / Proc. SPIE (1999)
10.1063/1.1427351 / Rev. Sci. Instrum. (2002)
{'key': '2023080906415717900_r6', 'first-page': '180', 'volume': '20', 'year': '2002', 'journal-title': 'J. Vac. Sci. Technol. B'} / J. Vac. Sci. Technol. B (2002)
10.1116/1.591063 / J. Vac. Sci. Technol. B (1999)
10.1063/1.1148705 / Rev. Sci. Instrum. (1998)
10.1116/1.591065 / J. Vac. Sci. Technol. B (1999)
10.1116/1.1314384 / J. Vac. Sci. Technol. B (2000)
10.1016/S0168-9002(01)00864-6 / Nucl. Instrum. Methods Phys. Res. A (2001)
10.1116/1.1320797 / J. Vac. Sci. Technol. B (2000)
{'key': '2023080906415717900_r13'}

Dates

Type	When
Created	22 years, 8 months ago (Dec. 12, 2002, 11:39 a.m.)
Deposited	2 years ago (Aug. 9, 2023, 2:49 a.m.)
Indexed	1 month, 1 week ago (July 16, 2025, 8:53 a.m.)
Issued	22 years, 9 months ago (Nov. 1, 2002)
Published	22 years, 9 months ago (Nov. 1, 2002)
Published Online	22 years, 8 months ago (Dec. 9, 2002)
Published Print	22 years, 9 months ago (Nov. 1, 2002)

Funders 0

None

BibTeX

@article{Ji_2002, title={Improvement in brightness of multicusp-plasma ion source}, volume={20}, ISSN={1520-8567}, url={http://dx.doi.org/10.1116/1.1526694}, DOI={10.1116/1.1526694}, number={6}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena}, publisher={American Vacuum Society}, author={Ji, Q. and Jiang, X. and King, T.-J. and Leung, K.-N. and Standiford, K. and Wilde, S. B.}, year={2002}, month=nov, pages={2717–2720} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        16
      ]
    ],
    "date-time": "2025-07-16T12:53:28Z",
    "timestamp": 1752670408969
  },
  "reference-count": 13,
  "publisher": "American Vacuum Society",
  "issue": "6",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2002,
        11,
        1
      ]
    ]
  },
  "abstract": "<jats:p>The beam brightness of a multicusp-plasma ion source has been substantially improved by optimizing the source configuration and extractor geometry. The current density of a 2 keV He+ beam extracted from a 7.5-cm-diameter source operating at 2.5 kW rf power is \u223c100\u2009mA/cm2, which is \u223c10 times larger than that of a beam extracted from a 5-cm-diameter source operating at 1 kW rf power. A smaller focused beam spot size is achieved with a counter-bored extractor instead of a conventional (\u201cthrough-hole\u201d) extractor, resulting another order of magnitude improvement in beam current density. Measured beam brightness can be as high as 440\u2009A/cm2Sr, which represents a 30 times improvement over prior work.</jats:p>",
  "DOI": "10.1116/1.1526694",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        12,
        12
      ]
    ],
    "date-time": "2002-12-12T16:39:09Z",
    "timestamp": 1039711149000
  },
  "page": "2717-2720",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 30,
  "title": "Improvement in brightness of multicusp-plasma ion source",
  "prefix": "10.1116",
  "volume": "20",
  "author": [
    {
      "given": "Q.",
      "family": "Ji",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Lawrence Berkeley National Laboratory, University of California, Berkeley, California\u200994720"
        }
      ]
    },
    {
      "given": "X.",
      "family": "Jiang",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Lawrence Berkeley National Laboratory, University of California, Berkeley, California\u200994720"
        }
      ]
    },
    {
      "given": "T.-J.",
      "family": "King",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Lawrence Berkeley National Laboratory, University of California, Berkeley, California\u200994720"
        }
      ]
    },
    {
      "given": "K.-N.",
      "family": "Leung",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Lawrence Berkeley National Laboratory, University of California, Berkeley, California\u200994720"
        }
      ]
    },
    {
      "given": "K.",
      "family": "Standiford",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Lawrence Berkeley National Laboratory, University of California, Berkeley, California\u200994720"
        }
      ]
    },
    {
      "given": "S. B.",
      "family": "Wilde",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Lawrence Berkeley National Laboratory, University of California, Berkeley, California\u200994720"
        }
      ]
    }
  ],
  "member": "20",
  "published-online": {
    "date-parts": [
      [
        2002,
        12,
        9
      ]
    ]
  },
  "reference": [
    {
      "key": "2023080906415717900_r1"
    },
    {
      "key": "2023080906415717900_r2",
      "doi-asserted-by": "crossref",
      "first-page": "1166",
      "DOI": "10.1116/1.571236",
      "volume": "19",
      "year": "1981",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "2023080906415717900_r3",
      "doi-asserted-by": "crossref",
      "first-page": "2602",
      "DOI": "10.1116/1.1414019",
      "volume": "19",
      "year": "2001",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2023080906415717900_r4",
      "doi-asserted-by": "crossref",
      "first-page": "175",
      "DOI": "10.1117/12.370128",
      "volume": "3777",
      "year": "1999",
      "journal-title": "Proc. SPIE"
    },
    {
      "key": "2023080906415717900_r5",
      "doi-asserted-by": "crossref",
      "first-page": "822",
      "DOI": "10.1063/1.1427351",
      "volume": "73",
      "year": "2002",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "2023080906415717900_r6",
      "first-page": "180",
      "volume": "20",
      "year": "2002",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2023080906415717900_r7",
      "doi-asserted-by": "crossref",
      "first-page": "2776",
      "DOI": "10.1116/1.591063",
      "volume": "17",
      "year": "1999",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2023080906415717900_r8",
      "doi-asserted-by": "crossref",
      "first-page": "998",
      "DOI": "10.1063/1.1148705",
      "volume": "69",
      "year": "1998",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "2023080906415717900_r9",
      "doi-asserted-by": "crossref",
      "first-page": "2783",
      "DOI": "10.1116/1.591065",
      "volume": "17",
      "year": "1999",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2023080906415717900_r10",
      "doi-asserted-by": "crossref",
      "first-page": "3172",
      "DOI": "10.1116/1.1314384",
      "volume": "18",
      "year": "2000",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2023080906415717900_r11",
      "doi-asserted-by": "crossref",
      "first-page": "86",
      "DOI": "10.1016/S0168-9002(01)00864-6",
      "volume": "474",
      "year": "2001",
      "journal-title": "Nucl. Instrum. Methods Phys. Res. A"
    },
    {
      "key": "2023080906415717900_r12",
      "doi-asserted-by": "crossref",
      "first-page": "3194",
      "DOI": "10.1116/1.1320797",
      "volume": "18",
      "year": "2000",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2023080906415717900_r13"
    }
  ],
  "container-title": "Journal of Vacuum Science &amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/avs/jvb/article-pdf/20/6/2717/10997728/2717_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/avs/jvb/article-pdf/20/6/2717/10997728/2717_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        8,
        9
      ]
    ],
    "date-time": "2023-08-09T06:49:25Z",
    "timestamp": 1691563765000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jvb/article/20/6/2717/1074449/Improvement-in-brightness-of-multicusp-plasma-ion"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2002,
        11,
        1
      ]
    ]
  },
  "references-count": 13,
  "journal-issue": {
    "issue": "6",
    "published-print": {
      "date-parts": [
        [
          2002,
          11,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1116/1.1526694",
  "relation": {},
  "ISSN": [
    "1071-1023",
    "1520-8567"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2002,
        11
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2002,
        11,
        1
      ]
    ]
  }
}