DOI: 10.1116/1.1430240. Template-directed vapor–liquid

Template-directed vapor–liquid–solid growth of silicon nanowires

10.1116/1.1430240

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (20)

Abstract

The synthesis of Si nanowires in nanoporous anodic alumina membranes was demonstrated using a combination of Au electrodeposition and vapor–liquid–solid growth at 500 °C using SiH4 as the Si source. The average diameter of the nanowires was 200±54 nm which was close to the pore size distribution of the membranes. High-resolution transmission electron microscopy revealed that the nanowires consist of a crystalline Si core, oriented in the 〈100〉 or 〈211〉 growth direction, with a thin (&lt;3 nm) native oxide coating. In this process, Au terminates both ends of the growing wires, resulting in the formation of Au–Si–Au nanowires.

Bibliography

Lew, K.-K., Reuther, C., Carim, A. H., Redwing, J. M., & Martin, B. R. (2002). Template-directed vaporâliquidâsolid growth of silicon nanowires. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 20(1), 389â392.

Authors 5

Kok-Keong Lew (first)
Cordula Reuther (additional)
Altaf H. Carim (additional)
Joan M. Redwing (additional)
Benjamin R. Martin (additional)

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Dates

Type	When
Created	23 years, 1 month ago (July 27, 2002, 5:12 a.m.)
Deposited	2 years, 1 month ago (July 6, 2023, 9:05 p.m.)
Indexed	4 months, 1 week ago (April 20, 2025, 12:42 a.m.)
Issued	23 years, 7 months ago (Jan. 1, 2002)
Published	23 years, 7 months ago (Jan. 1, 2002)
Published Print	23 years, 7 months ago (Jan. 1, 2002)

Funders 0

None

BibTeX

@article{Lew_2002, title={Template-directed vapor–liquid–solid growth of silicon nanowires}, volume={20}, ISSN={1520-8567}, url={http://dx.doi.org/10.1116/1.1430240}, DOI={10.1116/1.1430240}, number={1}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena}, publisher={American Vacuum Society}, author={Lew, Kok-Keong and Reuther, Cordula and Carim, Altaf H. and Redwing, Joan M. and Martin, Benjamin R.}, year={2002}, month=jan, pages={389–392} }

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