DOI: 10.1116/1.1409390. Reduced brightness of the ZrO/W Schottky electron emitter

Reduced brightness of the ZrO/W Schottky electron emitter

10.1116/1.1409390

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (20)

Abstract

The reduced brightness for a 〈100〉 ZrO/W Schottky electron emitter with a tip radius of 0.8 μm has been measured. The maximum reduced brightness measured was 2×108 A/(m2 sr V). The measurements of the reduced brightness are compared with the extended Schottky theory and the theory on stochastic Coulomb interactions. At high angular current densities the reduced brightness is limited by statistical Coulomb interactions in the gun lens region. The limits to the maximum reduced brightness in an ideal configuration are explored and found to be 2×109 A/(m2 sr V) for a 0.2 μm tip and a current limiting aperture in the extractor electrode.

Bibliography

van Veen, A. H. V., Hagen, C. W., Barth, J. E., & Kruit, P. (2001). Reduced brightness of the ZrO/W Schottky electron emitter. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 19(6), 2038â2044.

Authors 4

A. H. V. van Veen (first)
C. W. Hagen (additional)
J. E. Barth (additional)
P. Kruit (additional)

References 34 Referenced 46

{'key': '2023070922502692500_r1'}
{'key': '2023070922502692500_r2'}
{'key': '2023070922502692500_r3'}
{'key': '2023070922502692500_r4'}
10.1103/PhysRev.163.622 / Phys. Rev. (1967)
10.1063/1.321893 / J. Appl. Phys. (1975)
10.1016/0039-6028(79)90566-1 / Surf. Sci. (1979)
10.1016/0039-6028(95)00432-7 / Surf. Sci. (1995)
{'key': '2023070922502692500_r9', 'first-page': '173', 'volume': '49', 'year': '1977', 'journal-title': 'Optik (Stuttgart)'} / Optik (Stuttgart) (1977)
{'key': '2023070922502692500_r10'}
10.1116/1.590128 / J. Vac. Sci. Technol. B (1998)
10.1016/S0169-4332(99)00025-2 / Appl. Surf. Sci. (1999)
10.1016/S1076-5670(08)70217-9 / Adv. Imaging Electron Phys. (1999)
{'key': '2023070922502692500_r14'}
{'key': '2023070922502692500_r15', 'first-page': '339', 'volume': '111', 'year': '2000', 'journal-title': 'Optik (Stuttgart)'} / Optik (Stuttgart) (2000)
10.1016/S0304-3991(99)00193-X / Ultramicroscopy (2000)
10.1016/S0304-3991(99)00034-0 / Ultramicroscopy (1999)
10.1016/0304-3991(84)90045-7 / Ultramicroscopy (1984)
{'key': '2023070922502692500_r19'}
{'key': '2023070922502692500_r20'}
10.1116/1.583231 / J. Vac. Sci. Technol. B (1985)
10.1063/1.360455 / J. Appl. Phys. (1995)
10.1116/1.587460 / J. Vac. Sci. Technol. B (1994)
10.1016/S0304-3991(99)00027-3 / Ultramicroscopy (1999)
{'key': '2023070922502692500_r25'}
10.1116/1.588661 / J. Vac. Sci. Technol. B (1996)
10.1016/0039-6028(79)90566-1 / Surf. Sci. (1979)
10.1016/S0168-9002(98)01511-3 / Nucl. Instrum. Methods Phys. Res. A (1999)
{'key': '2023070922502692500_r29'}
{'key': '2023070922502692500_r30'}
{'key': '2023070922502692500_r31'}
10.1103/PhysRev.117.1452 / Phys. Rev. (1960)
10.1103/PhysRev.119.85 / Phys. Rev. (1960)
{'key': '2023070922502692500_r34'}

Dates

Type	When
Created	23 years ago (July 27, 2002, 5:12 a.m.)
Deposited	2 years, 1 month ago (July 9, 2023, 6:50 p.m.)
Indexed	2 months, 3 weeks ago (June 2, 2025, 7:47 a.m.)
Issued	23 years, 9 months ago (Nov. 1, 2001)
Published	23 years, 9 months ago (Nov. 1, 2001)
Published Print	23 years, 9 months ago (Nov. 1, 2001)

Funders 0

None

BibTeX

@article{van_Veen_2001, title={Reduced brightness of the ZrO/W Schottky electron emitter}, volume={19}, ISSN={1520-8567}, url={http://dx.doi.org/10.1116/1.1409390}, DOI={10.1116/1.1409390}, number={6}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena}, publisher={American Vacuum Society}, author={van Veen, A. H. V. and Hagen, C. W. and Barth, J. E. and Kruit, P.}, year={2001}, month=nov, pages={2038–2044} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        6,
        2
      ]
    ],
    "date-time": "2025-06-02T11:47:02Z",
    "timestamp": 1748864822728
  },
  "reference-count": 34,
  "publisher": "American Vacuum Society",
  "issue": "6",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2001,
        11,
        1
      ]
    ]
  },
  "abstract": "<jats:p>The reduced brightness for a \u3008100\u3009 ZrO/W Schottky electron emitter with a tip radius of 0.8 \u03bcm has been measured. The maximum reduced brightness measured was 2\u00d7108\u2008A/(m2\u200asr\u200aV). The measurements of the reduced brightness are compared with the extended Schottky theory and the theory on stochastic Coulomb interactions. At high angular current densities the reduced brightness is limited by statistical Coulomb interactions in the gun lens region. The limits to the maximum reduced brightness in an ideal configuration are explored and found to be 2\u00d7109\u2008A/(m2\u200asr\u200aV) for a 0.2 \u03bcm tip and a current limiting aperture in the extractor electrode.</jats:p>",
  "DOI": "10.1116/1.1409390",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        27
      ]
    ],
    "date-time": "2002-07-27T09:12:43Z",
    "timestamp": 1027761163000
  },
  "page": "2038-2044",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 46,
  "title": "Reduced brightness of the ZrO/W Schottky electron emitter",
  "prefix": "10.1116",
  "volume": "19",
  "author": [
    {
      "given": "A. H. V.",
      "family": "van Veen",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Department of Applied Physics, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands"
        }
      ]
    },
    {
      "given": "C. W.",
      "family": "Hagen",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Applied Physics, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands"
        }
      ]
    },
    {
      "given": "J. E.",
      "family": "Barth",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Applied Physics, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands"
        }
      ]
    },
    {
      "given": "P.",
      "family": "Kruit",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Applied Physics, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands"
        }
      ]
    }
  ],
  "member": "20",
  "reference": [
    {
      "key": "2023070922502692500_r1"
    },
    {
      "key": "2023070922502692500_r2"
    },
    {
      "key": "2023070922502692500_r3"
    },
    {
      "key": "2023070922502692500_r4"
    },
    {
      "key": "2023070922502692500_r5",
      "doi-asserted-by": "crossref",
      "first-page": "622",
      "DOI": "10.1103/PhysRev.163.622",
      "volume": "163",
      "year": "1967",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "2023070922502692500_r6",
      "doi-asserted-by": "crossref",
      "first-page": "2029",
      "DOI": "10.1063/1.321893",
      "volume": "46",
      "year": "1975",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2023070922502692500_r7",
      "doi-asserted-by": "crossref",
      "first-page": "14",
      "DOI": "10.1016/0039-6028(79)90566-1",
      "volume": "88",
      "year": "1979",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "2023070922502692500_r8",
      "doi-asserted-by": "crossref",
      "first-page": "289",
      "DOI": "10.1016/0039-6028(95)00432-7",
      "volume": "330",
      "year": "1995",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "2023070922502692500_r9",
      "first-page": "173",
      "volume": "49",
      "year": "1977",
      "journal-title": "Optik (Stuttgart)"
    },
    {
      "key": "2023070922502692500_r10"
    },
    {
      "key": "2023070922502692500_r11",
      "doi-asserted-by": "crossref",
      "first-page": "2063",
      "DOI": "10.1116/1.590128",
      "volume": "16",
      "year": "1998",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2023070922502692500_r12",
      "doi-asserted-by": "crossref",
      "first-page": "357",
      "DOI": "10.1016/S0169-4332(99)00025-2",
      "volume": "146",
      "year": "1999",
      "journal-title": "Appl. Surf. Sci."
    },
    {
      "key": "2023070922502692500_r13",
      "doi-asserted-by": "crossref",
      "first-page": "91",
      "DOI": "10.1016/S1076-5670(08)70217-9",
      "volume": "111",
      "year": "1999",
      "journal-title": "Adv. Imaging Electron Phys."
    },
    {
      "key": "2023070922502692500_r14"
    },
    {
      "key": "2023070922502692500_r15",
      "first-page": "339",
      "volume": "111",
      "year": "2000",
      "journal-title": "Optik (Stuttgart)"
    },
    {
      "key": "2023070922502692500_r16",
      "doi-asserted-by": "crossref",
      "first-page": "129",
      "DOI": "10.1016/S0304-3991(99)00193-X",
      "volume": "81",
      "year": "2000",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2023070922502692500_r17",
      "doi-asserted-by": "crossref",
      "first-page": "43",
      "DOI": "10.1016/S0304-3991(99)00034-0",
      "volume": "78",
      "year": "1999",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2023070922502692500_r18",
      "doi-asserted-by": "crossref",
      "first-page": "239",
      "DOI": "10.1016/0304-3991(84)90045-7",
      "volume": "15",
      "year": "1984",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2023070922502692500_r19"
    },
    {
      "key": "2023070922502692500_r20"
    },
    {
      "key": "2023070922502692500_r21",
      "doi-asserted-by": "crossref",
      "first-page": "220",
      "DOI": "10.1116/1.583231",
      "volume": "3",
      "year": "1985",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2023070922502692500_r22",
      "doi-asserted-by": "crossref",
      "first-page": "6888",
      "DOI": "10.1063/1.360455",
      "volume": "78",
      "year": "1995",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2023070922502692500_r23",
      "doi-asserted-by": "crossref",
      "first-page": "3508",
      "DOI": "10.1116/1.587460",
      "volume": "12",
      "year": "1994",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2023070922502692500_r24",
      "doi-asserted-by": "crossref",
      "first-page": "53",
      "DOI": "10.1016/S0304-3991(99)00027-3",
      "volume": "78",
      "year": "1999",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2023070922502692500_r25"
    },
    {
      "key": "2023070922502692500_r26",
      "doi-asserted-by": "crossref",
      "first-page": "3747",
      "DOI": "10.1116/1.588661",
      "volume": "14",
      "year": "1996",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2023070922502692500_r27",
      "doi-asserted-by": "crossref",
      "first-page": "14",
      "DOI": "10.1016/0039-6028(79)90566-1",
      "volume": "88",
      "year": "1979",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "2023070922502692500_r28",
      "doi-asserted-by": "crossref",
      "first-page": "109",
      "DOI": "10.1016/S0168-9002(98)01511-3",
      "volume": "427",
      "year": "1999",
      "journal-title": "Nucl. Instrum. Methods Phys. Res. A"
    },
    {
      "key": "2023070922502692500_r29"
    },
    {
      "key": "2023070922502692500_r30"
    },
    {
      "key": "2023070922502692500_r31"
    },
    {
      "key": "2023070922502692500_r32",
      "doi-asserted-by": "crossref",
      "first-page": "1452",
      "DOI": "10.1103/PhysRev.117.1452",
      "volume": "117",
      "year": "1960",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "2023070922502692500_r33",
      "doi-asserted-by": "crossref",
      "first-page": "85",
      "DOI": "10.1103/PhysRev.119.85",
      "volume": "119",
      "year": "1960",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "2023070922502692500_r34"
    }
  ],
  "container-title": "Journal of Vacuum Science &amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/avs/jvb/article-pdf/19/6/2038/10993576/2038_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/avs/jvb/article-pdf/19/6/2038/10993576/2038_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        7,
        9
      ]
    ],
    "date-time": "2023-07-09T22:50:40Z",
    "timestamp": 1688943040000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jvb/article/19/6/2038/468898/Reduced-brightness-of-the-ZrO-W-Schottky-electron"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2001,
        11,
        1
      ]
    ]
  },
  "references-count": 34,
  "journal-issue": {
    "issue": "6",
    "published-print": {
      "date-parts": [
        [
          2001,
          11,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1116/1.1409390",
  "relation": {},
  "ISSN": [
    "1071-1023",
    "1520-8567"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2001,
        11
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2001,
        11,
        1
      ]
    ]
  }
}