DOI: 10.1116/1.1321293. Lithographic patterning and confocal imaging with zone plates

Lithographic patterning and confocal imaging with zone plates

10.1116/1.1321293

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (20)

Abstract

Zone-plate-array lithography (ZPAL) uses an array of zone plates, combined with an array of micromechanical mirrors or shutters, to pattern features on a substrate without a mask. In this article, we investigate the patterning characteristics of individual zone plates. We show patterns printed with pixel-dose modulation (gray scaling) and subpixel beam stepping. Using a combination of these techniques for linewidth control, edge placement, and proximity-effect correction, ZPAL can produce arbitrary patterns with features as small as the focal spot of a zone plate. We also demonstrate the use of zone plates in a confocal-microscopy mode for placing the substrate at the focus of the zone plates, and for imaging. Zone-plate-array scanning-confocal microscopy (ZPAM) could be useful for gapping and alignment in ZPAL, and possibly for wafer or mask inspection at deep ultraviolet wavelengths.

Bibliography

Gil, D., Menon, R., Carter, D. J. D., & Smith, H. I. (2000). Lithographic patterning and confocal imaging with zone plates. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 18(6), 2881â2885.

Authors 4

Darı́o Gil (first)
Rajesh Menon (additional)
D. J. D. Carter (additional)
Henry I. Smith (additional)

References 15 Referenced 31

10.1116/1.589044 / J. Vac. Sci. Technol. B (1996)
10.1116/1.590472 / J. Vac. Sci. Technol. B (1998)
{'key': '2023080905505458700_r3', 'first-page': '3449', 'volume': '17', 'year': '1999', 'journal-title': 'J. Vac. Sci. Technol. B'} / J. Vac. Sci. Technol. B (1999)
{'key': '2023080905505458700_r4'}
{'key': '2023080905505458700_r5'}
{'key': '2023080905505458700_r6', 'first-page': '324', 'volume-title': 'Emerging Lithographic Technologies III', 'year': '1999'} / Emerging Lithographic Technologies III (1999)
10.1116/1.586992 / J. Vac. Sci. Technol. B (1993)
{'key': '2023080905505458700_r8', 'first-page': '116', 'volume-title': 'Photomask and X-ray Mask Technology IV', 'year': '1997'} / Photomask and X-ray Mask Technology IV (1997)
{'key': '2023080905505458700_r9', 'first-page': '166', 'volume-title': '15th European Conference on Mask Technology for Integrated Circuits and Microcomponents ’98', 'year': '1999'} / 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents ’98 (1999)
{'key': '2023080905505458700_r10', 'first-page': '55', 'volume-title': 'Laser Microlithography', 'year': '1988'} / Laser Microlithography (1988)
{'key': '2023080905505458700_r11', 'first-page': '50', 'volume-title': '14th Annual BACUS Symposium on Photomask Technology and Management', 'year': '1994'} / 14th Annual BACUS Symposium on Photomask Technology and Management (1994)
10.1364/AO.35.000120 / Appl. Opt. (1996)
10.1117/1.602332 / Opt. Eng. (Bellingham) (2000)
{'key': '2023080905505458700_r14'}
10.1364/JOSAA.11.001827 / J. Opt. Soc. Am. A (1994)

Dates

Type	When
Created	23 years, 1 month ago (July 27, 2002, 5:18 a.m.)
Deposited	2 years ago (Aug. 9, 2023, 2:13 a.m.)
Indexed	2 years ago (Aug. 9, 2023, 2:53 a.m.)
Issued	24 years, 9 months ago (Nov. 1, 2000)
Published	24 years, 9 months ago (Nov. 1, 2000)
Published Print	24 years, 9 months ago (Nov. 1, 2000)

Funders 0

None

BibTeX

@article{Gil_2000, title={Lithographic patterning and confocal imaging with zone plates}, volume={18}, ISSN={1520-8567}, url={http://dx.doi.org/10.1116/1.1321293}, DOI={10.1116/1.1321293}, number={6}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena}, publisher={American Vacuum Society}, author={Gil, Darı́o and Menon, Rajesh and Carter, D. J. D. and Smith, Henry I.}, year={2000}, month=nov, pages={2881–2885} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2023,
        8,
        9
      ]
    ],
    "date-time": "2023-08-09T06:53:43Z",
    "timestamp": 1691564023427
  },
  "reference-count": 15,
  "publisher": "American Vacuum Society",
  "issue": "6",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2000,
        11,
        1
      ]
    ]
  },
  "abstract": "<jats:p>Zone-plate-array lithography (ZPAL) uses an array of zone plates, combined with an array of micromechanical mirrors or shutters, to pattern features on a substrate without a mask. In this article, we investigate the patterning characteristics of individual zone plates. We show patterns printed with pixel-dose modulation (gray scaling) and subpixel beam stepping. Using a combination of these techniques for linewidth control, edge placement, and proximity-effect correction, ZPAL can produce arbitrary patterns with features as small as the focal spot of a zone plate. We also demonstrate the use of zone plates in a confocal-microscopy mode for placing the substrate at the focus of the zone plates, and for imaging. Zone-plate-array scanning-confocal microscopy (ZPAM) could be useful for gapping and alignment in ZPAL, and possibly for wafer or mask inspection at deep ultraviolet wavelengths.</jats:p>",
  "DOI": "10.1116/1.1321293",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        27
      ]
    ],
    "date-time": "2002-07-27T09:18:39Z",
    "timestamp": 1027761519000
  },
  "page": "2881-2885",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 31,
  "title": "Lithographic patterning and confocal imaging with zone plates",
  "prefix": "10.1116",
  "volume": "18",
  "author": [
    {
      "given": "Dar\u0131\u0301o",
      "family": "Gil",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, Massachusetts\u200902139"
        }
      ]
    },
    {
      "given": "Rajesh",
      "family": "Menon",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, Massachusetts\u200902139"
        }
      ]
    },
    {
      "given": "D. J. D.",
      "family": "Carter",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, Massachusetts\u200902139"
        }
      ]
    },
    {
      "given": "Henry I.",
      "family": "Smith",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, Massachusetts\u200902139"
        }
      ]
    }
  ],
  "member": "20",
  "reference": [
    {
      "key": "2023080905505458700_r1",
      "doi-asserted-by": "crossref",
      "first-page": "4318",
      "DOI": "10.1116/1.589044",
      "volume": "14",
      "year": "1996",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2023080905505458700_r2",
      "doi-asserted-by": "crossref",
      "first-page": "3426",
      "DOI": "10.1116/1.590472",
      "volume": "16",
      "year": "1998",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2023080905505458700_r3",
      "first-page": "3449",
      "volume": "17",
      "year": "1999",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2023080905505458700_r4"
    },
    {
      "key": "2023080905505458700_r5"
    },
    {
      "key": "2023080905505458700_r6",
      "first-page": "324",
      "volume-title": "Emerging Lithographic Technologies III",
      "year": "1999"
    },
    {
      "key": "2023080905505458700_r7",
      "doi-asserted-by": "crossref",
      "first-page": "2390",
      "DOI": "10.1116/1.586992",
      "volume": "11",
      "year": "1993",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2023080905505458700_r8",
      "first-page": "116",
      "volume-title": "Photomask and X-ray Mask Technology IV",
      "year": "1997"
    },
    {
      "key": "2023080905505458700_r9",
      "first-page": "166",
      "volume-title": "15th European Conference on Mask Technology for Integrated Circuits and Microcomponents \u201998",
      "year": "1999"
    },
    {
      "key": "2023080905505458700_r10",
      "first-page": "55",
      "volume-title": "Laser Microlithography",
      "year": "1988"
    },
    {
      "key": "2023080905505458700_r11",
      "first-page": "50",
      "volume-title": "14th Annual BACUS Symposium on Photomask Technology and Management",
      "year": "1994"
    },
    {
      "key": "2023080905505458700_r12",
      "doi-asserted-by": "crossref",
      "first-page": "120",
      "DOI": "10.1364/AO.35.000120",
      "volume": "35",
      "year": "1996",
      "journal-title": "Appl. Opt."
    },
    {
      "key": "2023080905505458700_r13",
      "doi-asserted-by": "crossref",
      "first-page": "32",
      "DOI": "10.1117/1.602332",
      "volume": "39",
      "year": "2000",
      "journal-title": "Opt. Eng. (Bellingham)"
    },
    {
      "key": "2023080905505458700_r14"
    },
    {
      "key": "2023080905505458700_r15",
      "doi-asserted-by": "crossref",
      "first-page": "1827",
      "DOI": "10.1364/JOSAA.11.001827",
      "volume": "11",
      "year": "1994",
      "journal-title": "J. Opt. Soc. Am. A"
    }
  ],
  "container-title": "Journal of Vacuum Science &amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/avs/jvb/article-pdf/18/6/2881/8205129/2881_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/avs/jvb/article-pdf/18/6/2881/8205129/2881_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        8,
        9
      ]
    ],
    "date-time": "2023-08-09T06:13:12Z",
    "timestamp": 1691561592000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jvb/article/18/6/2881/1074237/Lithographic-patterning-and-confocal-imaging-with"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2000,
        11,
        1
      ]
    ]
  },
  "references-count": 15,
  "journal-issue": {
    "issue": "6",
    "published-print": {
      "date-parts": [
        [
          2000,
          11,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1116/1.1321293",
  "relation": {},
  "ISSN": [
    "1071-1023",
    "1520-8567"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2000,
        11
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2000,
        11,
        1
      ]
    ]
  }
}