DOI: 10.1116/1.1319684. Novel multibridge-structured piezoelectric microdevice for scanning force microscopy

Novel multibridge-structured piezoelectric microdevice for scanning force microscopy

10.1116/1.1319684

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (20)

Abstract

In this article we report the structure and the microfabrication method of a novel micro-scanning force microscopy (SFM) device. It is a lead zirconate titanite (PZT) bimorph structure in the shape of a cantilever supported by bridges. Electric fields applied to the separated sections of the electrodes on the levers can induce lever deflection and actuate the tip in x, y, and z directions. The cantilever can vibrate and sense its own vibration amplitude to detect the surface topography in the cyclic contact SFM mode. In the fabrication process, the sol–gel method is modified for constructing high quality PZT films 3 μm thick. The single bridge device has shown microscopy sensitivity of 0.32 nA/nm in a vertical direction, with actuation sensitivities of 70–80 nm/V in a lateral direction. The multibridged structure has been proven to be effective in elevating the eigenfrequency, which is very important for improving the SPM data rate.

Bibliography

Chu, J., Wang, Z., Maeda, R., Kataoka, K., Itoh, T., & Suga, T. (2000). Novel multibridge-structured piezoelectric microdevice for scanning force microscopy. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 18(6), 3604â3607.

Authors 6

J. Chu (first)
Z. Wang (additional)
R. Maeda (additional)
K. Kataoka (additional)
T. Itoh (additional)
T. Suga (additional)

References 11 Referenced 35

10.1063/1.118085 / Appl. Phys. Lett. (1996)
{'key': '2023080905520774600_r2', 'first-page': '1464', 'volume': '42–44', 'year': '1992', 'journal-title': 'Ultramicroscopy'} / Ultramicroscopy (1992)
10.1088/0957-4484/4/4/007 / Nanotechnology (1993)
10.1063/1.115317 / Appl. Phys. Lett. (1995)
{'key': '2023080905520774600_r5', 'first-page': '964', 'volume': '21–23', 'year': '1990', 'journal-title': 'Sens. Actuators A'} / Sens. Actuators A (1990)
{'key': '2023080905520774600_r6'}
10.1093/oxfordjournals.jmicro.a023503 / J. Electron Microsc. (1997)
{'key': '2023080905520774600_r8'}
{'key': '2023080905520774600_r9'}
10.1116/1.589398 / J. Vac. Sci. Technol. B (1997)
{'key': '2023080905520774600_r11', 'first-page': 'L1483', 'volume': '38', 'year': '1999', 'journal-title': 'Jpn. J. Appl. Phys., Part 2'} / Jpn. J. Appl. Phys., Part 2 (1999)

Dates

Type	When
Created	23 years, 1 month ago (July 27, 2002, 5:18 a.m.)
Deposited	2 years ago (Aug. 9, 2023, 2:18 a.m.)
Indexed	1 year, 6 months ago (Feb. 3, 2024, 10:05 p.m.)
Issued	24 years, 10 months ago (Nov. 1, 2000)
Published	24 years, 10 months ago (Nov. 1, 2000)
Published Print	24 years, 10 months ago (Nov. 1, 2000)

Funders 0

None

BibTeX

@article{Chu_2000, title={Novel multibridge-structured piezoelectric microdevice for scanning force microscopy}, volume={18}, ISSN={1520-8567}, url={http://dx.doi.org/10.1116/1.1319684}, DOI={10.1116/1.1319684}, number={6}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena}, publisher={American Vacuum Society}, author={Chu, J. and Wang, Z. and Maeda, R. and Kataoka, K. and Itoh, T. and Suga, T.}, year={2000}, month=nov, pages={3604–3607} }

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