DOI: 10.1116/1.1318510. Glow Discharge Optical Spectroscopy for Monitoring Sputter Deposited Film Thickness

Glow Discharge Optical Spectroscopy for Monitoring Sputter Deposited Film Thickness

10.1116/1.1318510

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science and Technology (20)

Abstract

Glow discharge optical spectroscopy was used as a technique for monitoring the rate of sputtering and the rate of film deposition. It was determined that within the pressure and voltage range of these experiments the product of the electroluminescent emission intensity of a given sputtered target species in the discharge and the time of sputtering is linearly proportional to both the change in mass of the target and the final thickness of the deposited film. In the case of compound targets, the emission intensity from either constituent can be monitored. The emission signal was shown to be generated primarily in a narrow region directly in front of the target.

Bibliography

Greene, J. E., & Sequeda-Osorio, F. (1973). Glow Discharge Optical Spectroscopy for Monitoring Sputter Deposited Film Thickness. Journal of Vacuum Science and Technology, 10(6), 1144â1149.

Authors 2

J. E. Greene (first)
F. Sequeda-Osorio (additional)

References 0 Referenced 40

None

Dates

Type	When
Created	23 years, 1 month ago (July 27, 2002, 5:29 a.m.)
Deposited	2 years, 2 months ago (June 23, 2023, 12:20 p.m.)
Indexed	4 months, 2 weeks ago (April 18, 2025, 11:04 a.m.)
Issued	51 years, 10 months ago (Nov. 1, 1973)
Published	51 years, 10 months ago (Nov. 1, 1973)
Published Print	51 years, 10 months ago (Nov. 1, 1973)

Funders 0

None

BibTeX

@article{Greene_1973, title={Glow Discharge Optical Spectroscopy for Monitoring Sputter Deposited Film Thickness}, volume={10}, ISSN={0022-5355}, url={http://dx.doi.org/10.1116/1.1318510}, DOI={10.1116/1.1318510}, number={6}, journal={Journal of Vacuum Science and Technology}, publisher={American Vacuum Society}, author={Greene, J. E. and Sequeda-Osorio, F.}, year={1973}, month=nov, pages={1144–1149} }

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