DOI: 10.1116/1.1318069. Plasma cleaning of metal surfaces

10.1116/1.1318069

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science and Technology (20)

Abstract

Mild plasma cleaning of metal surfaces was shown to be effective in removing organic contaminants. Auger electron spectroscopy and surface wettability measurements were used to evaluate the plasma cleaning procedure and to provide a comparison with conventional solvent cleaning methods.

Bibliography

OâKane, D. F., & Mittal, K. L. (1974). Plasma cleaning of metal surfaces. Journal of Vacuum Science and Technology, 11(3), 567â569.

Authors 2

D. F. O'Kane (first)
K. L. Mittal (additional)

References 0 Referenced 107

None

Dates

Type	When
Created	23 years ago (July 27, 2002, 5:32 a.m.)
Deposited	2 years, 1 month ago (June 28, 2023, 6:05 p.m.)
Indexed	3 months, 2 weeks ago (May 3, 2025, 3:42 p.m.)
Issued	51 years, 3 months ago (May 1, 1974)
Published	51 years, 3 months ago (May 1, 1974)
Published Print	51 years, 3 months ago (May 1, 1974)

Funders 0

None

BibTeX

@article{O_Kane_1974, title={Plasma cleaning of metal surfaces}, volume={11}, ISSN={0022-5355}, url={http://dx.doi.org/10.1116/1.1318069}, DOI={10.1116/1.1318069}, number={3}, journal={Journal of Vacuum Science and Technology}, publisher={American Vacuum Society}, author={O’Kane, D. F. and Mittal, K. L.}, year={1974}, month=may, pages={567–569} }

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