DOI: 10.1115/imece2000-1100. Mechanical Properties of Different Polysilicons

Mechanical Properties of Different Polysilicons

10.1115/imece2000-1100

Crossref proceedings-article

American Society of Mechanical Engineers

Micro-Electro-Mechanical Systems (MEMS) (33)

Abstract

Abstract Polysilicon materials from three different suppliers were tested in tension to determine their Young’s modulus and strength. The modulus of polysilicon from Cronos was 158 ± 8 GPa and its strength 1.56 ± 0.25 GPa, and the material from Sandia National Laboratories showed 157 ± 6.5 GPa and 3.09 ± 0.18 GPa. Two polysilicons from Standard MEMS Inc. showed 164 ± 11.2 GPa and 152 ± 10.0 GPa for modulus values and 2.08 ± 0.35 GPa and 2.00 ± 0.25 GPa for strengths. Polysilicon is therefore similar to most structural materials in that its modulus is essentially constant, but its strength can depend on processing.

Bibliography

Sharpe, W. N., Jackson, K., Coles, G., & LaVan, D. A. (2000). Mechanical Properties of Different Polysilicons. Micro-Electro-Mechanical Systems (MEMS), 255â259.

Authors 4

W. N. Sharpe (additional)
K. Jackson (additional)
G. Coles (additional)
D. A. LaVan (additional)

References 0 Referenced 7

None

Dates

Type	When
Created	3 years, 9 months ago (Nov. 9, 2021, 1:46 p.m.)
Deposited	3 years, 9 months ago (Nov. 9, 2021, 1:46 p.m.)
Indexed	2 months ago (June 24, 2025, 6:50 a.m.)
Issued	24 years, 9 months ago (Nov. 5, 2000)
Published	24 years, 9 months ago (Nov. 5, 2000)
Published Online	3 years, 9 months ago (Nov. 9, 2021)
Published Print	24 years, 9 months ago (Nov. 5, 2000)

Funders 0

None

BibTeX

@inproceedings{Sharpe_2000, series={IMECE2000}, title={Mechanical Properties of Different Polysilicons}, url={http://dx.doi.org/10.1115/imece2000-1100}, DOI={10.1115/imece2000-1100}, booktitle={Micro-Electro-Mechanical Systems (MEMS)}, publisher={American Society of Mechanical Engineers}, author={Sharpe, W. N. and Jackson, K. and Coles, G. and LaVan, D. A.}, year={2000}, month=nov, pages={255–259}, collection={IMECE2000} }

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  "abstract": "<jats:title>Abstract</jats:title>\n               <jats:p>Polysilicon materials from three different suppliers were tested in tension to determine their Young\u2019s modulus and strength. The modulus of polysilicon from Cronos was 158 \u00b1 8 GPa and its strength 1.56 \u00b1 0.25 GPa, and the material from Sandia National Laboratories showed 157 \u00b1 6.5 GPa and 3.09 \u00b1 0.18 GPa. Two polysilicons from Standard MEMS Inc. showed 164 \u00b1 11.2 GPa and 152 \u00b1 10.0 GPa for modulus values and 2.08 \u00b1 0.35 GPa and 2.00 \u00b1 0.25 GPa for strengths. Polysilicon is therefore similar to most structural materials in that its modulus is essentially constant, but its strength can depend on processing.</jats:p>",
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