DOI: 10.1111/jace.13576. Solution Chemistry, Substrate, and Processing Effects on Chemical Homogeneity in Lead Zirconate Titanate Thin Films

Solution Chemistry, Substrate, and Processing Effects on Chemical Homogeneity in Lead Zirconate Titanate Thin Films

10.1111/jace.13576

Crossref journal-article

Wiley

Journal of the American Ceramic Society (311)

Abstract

The effects of chemistry, substrate, and processing conditions on through‐thickness cation distributions are explored in solution‐derived morphotropic composition lead zirconate titanate (PZT) films. Films prepared from chelate‐based and conventional sol–gel chemistries were spin cast onto Pt/ZnO/SiO2/Si and Pt/Ti/SiO2/Si substrates and pyrolyzed at 300°C, 350°C, and 400°C prior to crystallization at 700°C either in a preheated furnace or via rapid thermal processing. For films crystallized within a conventional furnace on Pt/ZnO/SiO2/Si substrates no chemical gradients were observed. All films prepared on Pt/Ti/SiO2/Si substrates had increased titanium concentrations near the PZT/Pt interfaces, and the source is shown to be titanium diffusing from the substrate metallization stack. The effect of heating method and rate was explored in films prepared on Pt/ZnO/SiO2/Si substrates with 15°C, 50°C, and 100°C/s heating rates within a rapid thermal annealer. Only one solution chemistry‐heating rate combination resulted in the formation of a chemical gradient: a conventional sol–gel chemistry and a 50°C/s heating rate. Infrared spectroscopy of pyrolyzed gel films showed absorption spectra differences in the bonding structure between the two chemistries with the conventional sol–gel‐derived films exhibiting a signature more similar to that of a PbTiO3 gel, suggestive of a gel‐structure source of gradient formation during crystallization.

Bibliography

Ihlefeld, J. F., Kotula, P. G., Gauntt, B. D., Gough, D. V., Brennecka, G. L., Lu, P., & Spoerke, E. D. (2015). Solution Chemistry, Substrate, and Processing Effects on Chemical Homogeneity in Lead Zirconate Titanate Thin Films. Journal of the American Ceramic Society, 98(7), 2028â2038. Portico.

Authors 7

Jon F. Ihlefeld (first)
Paul G. Kotula (additional)
Bryan D. Gauntt (additional)
Dara V. Gough (additional)
Geoff L. Brennecka (additional)
Ping Lu (additional)
Erik D. Spoerke (additional)

References 44 Referenced 11

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{'key': 'e_1_2_6_29_1', 'first-page': '107', 'article-title': 'Sol–Gel Processing of PbTiO3, PbZrO3, PZT, and PLZT Thin Films', 'volume': '36', 'author': 'Budd K. D.', 'year': '1985', 'journal-title': 'Br. Ceram. Proc.'} / Br. Ceram. Proc. / Sol–Gel Processing of PbTiO3, PbZrO3, PZT, and PLZT Thin Films by Budd K. D. (1985)
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{'key': 'e_1_2_6_37_1', 'first-page': '377', 'article-title': 'Effects of Acetylacetone Additions on PZT Thin Film Processing', 'volume': '361', 'author': 'Schwartz R. W.', 'year': '1995', 'journal-title': 'Ferroelectric Thin Films IV'} / Ferroelectric Thin Films IV / Effects of Acetylacetone Additions on PZT Thin Film Processing by Schwartz R. W. (1995)
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10.1557/PROC-271-249

Dates

Type	When
Created	10 years, 4 months ago (March 30, 2015, 9:53 a.m.)
Deposited	1 year, 11 months ago (Sept. 16, 2023, 6:41 p.m.)
Indexed	1 year ago (Aug. 7, 2024, 5:12 a.m.)
Issued	10 years, 4 months ago (March 30, 2015)
Published	10 years, 4 months ago (March 30, 2015)
Published Online	10 years, 4 months ago (March 30, 2015)
Published Print	10 years, 1 month ago (July 1, 2015)

Funders 2

Sandia National Laboratories, National Nuclear Security Administration 10.13039/100006234 Sandia National Laboratories
Region: Americas
gov (Research institutes and centers)
Labels4
1. Sandia
2. Sandia National Labs
3. Sandia National Lab
4. SNL
Sandia National Laboratories, National Nuclear Security Administration 10.13039/100006234 Sandia National Laboratories
Region: Americas
gov (Research institutes and centers)
Labels4
1. Sandia
2. Sandia National Labs
3. Sandia National Lab
4. SNL

BibTeX

@article{Ihlefeld_2015, title={Solution Chemistry, Substrate, and Processing Effects on Chemical Homogeneity in Lead Zirconate Titanate Thin Films}, volume={98}, ISSN={1551-2916}, url={http://dx.doi.org/10.1111/jace.13576}, DOI={10.1111/jace.13576}, number={7}, journal={Journal of the American Ceramic Society}, publisher={Wiley}, author={Ihlefeld, Jon F. and Kotula, Paul G. and Gauntt, Bryan D. and Gough, Dara V. and Brennecka, Geoff L. and Lu, Ping and Spoerke, Erik D.}, editor={Alford, N.}, year={2015}, month=mar, pages={2028–2038} }

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  "journal-issue": {
    "issue": "7",
    "published-print": {
      "date-parts": [
        [
          2015,
          7
        ]
      ]
    }
  },
  "alternative-id": [
    "10.1111/jace.13576"
  ],
  "URL": "http://dx.doi.org/10.1111/jace.13576",
  "relation": {},
  "ISSN": [
    "0002-7820",
    "1551-2916"
  ],
  "subject": [],
  "container-title-short": "J. Am. Ceram. Soc.",
  "published": {
    "date-parts": [
      [
        2015,
        3,
        30
      ]
    ]
  }
}