Abstract
SUMMARYWe describe a technique for efficient, quantitative, standardless elemental mapping using a high‐angle annular detector in a scanning transmission electron microscope (STEM) to collect elastically scattered electrons. With a single crystal specimen, contrast due to thickness variations, diffraction, and channelling effects can be avoided, so that the resulting image contrast quantitatively reflects variations in impurity concentration. We compare a number of simple analytical approximations to the elastic scattering cross sections and show that a standardless analysis is possible over a wide range of atomic number and inner detector angle to an absolute accuracy of better than 20%.
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Dates
Type | When |
---|---|
Created | 14 years ago (Aug. 2, 2011, 11:37 a.m.) |
Deposited | 1 year, 10 months ago (Oct. 21, 2023, 6:44 p.m.) |
Indexed | 2 weeks, 2 days ago (Aug. 6, 2025, 7:58 a.m.) |
Issued | 38 years, 8 months ago (Dec. 1, 1986) |
Published | 38 years, 8 months ago (Dec. 1, 1986) |
Published Online | 14 years ago (Aug. 2, 2011) |
Published Print | 38 years, 8 months ago (Dec. 1, 1986) |
@article{Pennycook_1986, title={Elemental mapping with elastically scattered electrons}, volume={144}, ISSN={1365-2818}, url={http://dx.doi.org/10.1111/j.1365-2818.1986.tb02804.x}, DOI={10.1111/j.1365-2818.1986.tb02804.x}, number={3}, journal={Journal of Microscopy}, publisher={Wiley}, author={Pennycook, S. J. and Berger, S. D. and Culbertson, R. J.}, year={1986}, month=dec, pages={229–249} }