DOI: 10.1111/j.1151-2916.1995.tb07955.x. Quantitative Characterization of the Fracture Surface of Si Single Crystals by Confocal Microscopy

Quantitative Characterization of the Fracture Surface of Si Single Crystals by Confocal Microscopy

10.1111/j.1151-2916.1995.tb07955.x

Crossref journal-article

Wiley

Journal of the American Ceramic Society (311)

Abstract

Experiments are conducted to study the dislocation nucleation conditions at the crack tip in {110}〈110〉 oriented Si single crystals. Specimens with surface cracks are first statically loaded at elevated temperatures for a prolonged period of time to initiate and move dislocations away from the crack tip, then cooled down to room temperature and loaded to fracture to measure the fracture toughness. Fractographic analysis of the fracture surfaces is performed. Distinct wavy patterns on the fracture surface at the initial cleavage crack front are observed, which is attributed to the existence of local mixed mode I/mode III stresses resulting from the inhomogeneous dislocation activity. Confocal microscopy is employed to quantify the fracture surface roughness. The results show that the increase of fracture toughness is directly associated with the increased area of the rough surface, which is characterized by the roughness number or the fractal dimension increment. Our results also demonstrate that dislocation nucleation can occur only at discrete sites. The spacing between these dislocation nucleation sources is of the order of 1 μm. A simple model is developed for the relationship between the fracture toughness and the surface roughness parameters, which is in good agreement with the experimental results.

Bibliography

Xin, Y., Hsia, K. J., & Lange, D. A. (1995). Quantitative Characterization of the Fracture Surface of Si Single Crystals by Confocal Microscopy. Journal of the American Ceramic Society, 78(12), 3201â3208. Portico.

Authors 3

Yun‐Biao Xin (first)
K. Jimmy Hsia (additional)
David A. Lange (additional)

References 33 Referenced 23

{'key': 'e_1_2_1_2_2', 'volume-title': 'The Fractal Geometry of Nature', 'author': 'Mandelbrot B. B.', 'year': '1982'} / The Fractal Geometry of Nature by Mandelbrot B. B. (1982)
10.1038/308721a0
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10.1111/j.1151-2916.1993.tb03646.x
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{'key': 'e_1_2_1_8_2', 'first-page': '469', 'article-title': 'Fracture Toughness of Silicon', 'volume': '59', 'author': 'Chen C. P.', 'year': '1980', 'journal-title': 'Am. Ceram. Soc. Bull.'} / Am. Ceram. Soc. Bull. / Fracture Toughness of Silicon by Chen C. P. (1980)
10.1520/STP37106S
{'key': 'e_1_2_1_10_2', 'article-title': 'A Technique to Generate Straight through Thickness Surface Cracks and Its Applications in a Study of Dislocation Nucleation in Si', 'author': 'Xin Y.‐B.', 'journal-title': 'Acta Metall. Mater'} / Acta Metall. Mater / A Technique to Generate Straight through Thickness Surface Cracks and Its Applications in a Study of Dislocation Nucleation in Si by Xin Y.‐B.
10.1007/BF00547968
10.1088/0034-4885/12/1/309
{'key': 'e_1_2_1_13_2', 'first-page': '55', 'article-title': 'Fundamentals of Silicon Fracture', 'volume': '17', 'author': 'Michot G.', 'year': '1988', 'journal-title': 'Cryst. Prop. Prep.'} / Cryst. Prop. Prep. / Fundamentals of Silicon Fracture by Michot G. (1988)
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10.1111/j.1151-2916.1976.tb09468.x
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{'key': 'e_1_2_1_19_2', 'first-page': '1307', 'article-title': 'Ceramic Surface Analysis Using Optical Sections', 'volume': '69', 'author': 'Yatchmenoff B.', 'year': '1990', 'journal-title': 'Am. Ceram. Soc. Bull'} / Am. Ceram. Soc. Bull / Ceramic Surface Analysis Using Optical Sections by Yatchmenoff B. (1990)
10.1007/BF00353195
{'key': 'e_1_2_1_21_2', 'first-page': '449', 'article-title': 'Fractal Characteristics of Scanning Tunneling Microscopic Images of Brittle Fracture Surfaces on Molybdenum', 'volume': '35', 'author': 'Sumiyoshi H.', 'year': '1992', 'journal-title': 'JSME Int. J., Ser. I'} / JSME Int. J., Ser. I / Fractal Characteristics of Scanning Tunneling Microscopic Images of Brittle Fracture Surfaces on Molybdenum by Sumiyoshi H. (1992)
{'key': 'e_1_2_1_22_2', 'first-page': '127', 'volume-title': 'Fractography of Glasses and Ceramics', 'author': 'Mecholsky J. J.', 'year': '1988'} / Fractography of Glasses and Ceramics by Mecholsky J. J. (1988)
Y.‐B.XinandK. J.Hsia unpublished results 1994.
{'key': 'e_1_2_1_24_2', 'first-page': '55', 'volume-title': 'Fractography of Glasses and Ceramics II', 'author': 'Freiman S. W.', 'year': '1988'} / Fractography of Glasses and Ceramics II by Freiman S. W. (1988)
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10.1115/1.2899525

Dates

Type	When
Created	20 years, 4 months ago (April 18, 2005, 1:37 p.m.)
Deposited	1 year, 8 months ago (Nov. 23, 2023, 10:08 a.m.)
Indexed	2 weeks, 3 days ago (Aug. 5, 2025, 8:30 a.m.)
Issued	29 years, 8 months ago (Dec. 1, 1995)
Published	29 years, 8 months ago (Dec. 1, 1995)
Published Online	20 years, 4 months ago (April 18, 2005)
Published Print	29 years, 8 months ago (Dec. 1, 1995)

Funders 0

None

BibTeX

@article{Xin_1995, title={Quantitative Characterization of the Fracture Surface of Si Single Crystals by Confocal Microscopy}, volume={78}, ISSN={1551-2916}, url={http://dx.doi.org/10.1111/j.1151-2916.1995.tb07955.x}, DOI={10.1111/j.1151-2916.1995.tb07955.x}, number={12}, journal={Journal of the American Ceramic Society}, publisher={Wiley}, author={Xin, Yun‐Biao and Hsia, K. Jimmy and Lange, David A.}, year={1995}, month=dec, pages={3201–3208} }

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