DOI: 10.1111/j.1151-2916.1994.tb04597.x. Development of Tantalum Pentoxide Coatings by Chemical Vapor Deposition

Development of Tantalum Pentoxide Coatings by Chemical Vapor Deposition

10.1111/j.1151-2916.1994.tb04597.x

Crossref journal-article

Wiley

Journal of the American Ceramic Society (311)

Abstract

Thermochemical considerations clearly indicate a need for the protection of SiC and Si3N4 materials from HC1‐ and Na2SO4‐induced corrosion. Ta2O5 has been identified as a material which may be suitable for such a protective coating. Thermodynamic calculations have indicated a range of temperatures, pressures, and reactant concentrations under which Ta2O5 coatings may be formed as a single phase by chemical vapor deposition. Ta2O5 coatings exhibiting a range of microstructures were obtained experimentally.

Bibliography

Graham, D. W., & Stinton, D. P. (1994). Development of Tantalum Pentoxide Coatings by Chemical Vapor Deposition. Journal of the American Ceramic Society, 77(9), 2298â2304. Portico.

Authors 2

David W. Graham (first)
David P. Stinton (additional)

References 42 Referenced 15

{'key': 'e_1_2_1_2_2', 'first-page': '65', 'volume-title': 'Proceedings of the 1992 Coatings for Advanced Heat Engines Workshop', 'author': 'Graham D. W.', 'year': '1992'} / Proceedings of the 1992 Coatings for Advanced Heat Engines Workshop by Graham D. W. (1992)
10.1016/0022-5088(74)90064-2
{'issue': '7', 'key': 'e_1_2_1_4_2', 'first-page': '443', 'article-title': 'Vapor Deposition of Thin Films of Ta2O5', 'volume': '4', 'author': 'Peacock D. J.', 'year': '1966', 'journal-title': 'Electrochem. Technol.'} / Electrochem. Technol. / Vapor Deposition of Thin Films of Ta2O5 by Peacock D. J. (1966)
10.1149/1.2403602
{'issue': '4', 'key': 'e_1_2_1_6_2', 'first-page': '728', 'article-title': 'Vapor Deposition and Char‐acterization of Metal Oxide Thin Films for Electronic Applications', 'volume': '31', 'author': 'Wang C. C.', 'year': '1970', 'journal-title': 'RCA Rev'} / RCA Rev / Vapor Deposition and Char‐acterization of Metal Oxide Thin Films for Electronic Applications by Wang C. C. (1970)
M.Tsubuyaet al. “Manufacturing Method of Tantalum Oxide Film ” Jpu. Kokai Pat. Application No. Hei 3[l991]‐284846 December 16 1991.
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SGTE Solution and Pure Substances Database was supplied by the developers of the CtemSnge program; GTT Gesellschuft fur Technische Thermochemie und physik mbH Kniserstrabe 100 5120 Herzogenrath 3.
Microtherm Thermodynamic Databank System for Inorganic Substances was supplied by the developers of the ChemSage program; GTT Gesellschaft fur Technische Thermochemie urd‐physik mbH Kaiserstrabe 100 5120 Herzog‐enrath 3.
J. Phys. Chem. Ref. Data. 1985 14
I.Barin Thermochemical Data of Pure Substanes Parts I and II. VCH mbH Weinheim Germany 1989.
10.1111/j.1151-2916.1993.tb03684.x
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{'key': 'e_1_2_1_17_2', 'first-page': '227', 'article-title': 'Hot Corrosion of Silicon Carbide and Silicon Nitride at 1000 °C', 'volume': '10', 'author': 'Fox D. S.', 'year': '1990', 'journal-title': 'Ceram. Trans.'} / Ceram. Trans. / Hot Corrosion of Silicon Carbide and Silicon Nitride at 1000 °C by Fox D. S. (1990)
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{'key': 'e_1_2_1_21_2', 'first-page': '197', 'article-title': 'Molten Salt Corrosion of Hot‐Pressed Si3N4/SiC‐Reinforced Composites and Effects of Molten Salt Exposure of Slow Crack Growth of Hot‐Pressed Si3N4', 'volume': '10', 'author': 'Henager C. H.', 'year': '1990', 'journal-title': 'Ceram. Trans.'} / Ceram. Trans. / Molten Salt Corrosion of Hot‐Pressed Si3N4/SiC‐Reinforced Composites and Effects of Molten Salt Exposure of Slow Crack Growth of Hot‐Pressed Si3N4 by Henager C. H. (1990)
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{'key': 'e_1_2_1_33_2', 'first-page': '381', 'volume-title': 'High Temperature Science', 'author': 'Jacobson N. S.', 'year': '1990'} / High Temperature Science by Jacobson N. S. (1990)
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{'key': 'e_1_2_1_35_2', 'first-page': '309', 'article-title': 'Corrosion of Silicon‐Based Ceramics in Mixed Oxygen–Chlorine Environments', 'volume': '10', 'author': 'McNallan M. J.', 'year': '1990', 'journal-title': 'Ceram. Trans.'} / Ceram. Trans. / Corrosion of Silicon‐Based Ceramics in Mixed Oxygen–Chlorine Environments by McNallan M. J. (1990)
10.1111/j.1151-2916.1988.tb05794.x
{'key': 'e_1_2_1_37_2', 'first-page': '355', 'article-title': 'Corrosion of Silicon Nitride Ceramics in HF and HC1 Solutions', 'volume': '10', 'author': 'Shimada M.', 'year': '1990', 'journal-title': 'Ceram. Trans.'} / Ceram. Trans. / Corrosion of Silicon Nitride Ceramics in HF and HC1 Solutions by Shimada M. (1990)
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{'key': 'e_1_2_1_39_2', 'first-page': '167', 'volume-title': 'Phase Diagrams for Ceramists 1975 Supplement', 'author': 'Levin E. M.', 'year': '1975'} / Phase Diagrams for Ceramists 1975 Supplement by Levin E. M. (1975)
{'key': 'e_1_2_1_40_2', 'first-page': '92', 'volume-title': 'Phase Diagrams for Ceramists, 1975 Supplement', 'author': 'Levin E. M.', 'year': '1975'} / Phase Diagrams for Ceramists, 1975 Supplement by Levin E. M. (1975)
10.1111/j.1151-2916.1992.tb04484.x
{'key': 'e_1_2_1_42_2', 'first-page': '1', 'volume-title': 'Proceedings of the 7th International Conference on Chemical Vapor Deposition', 'author': 'Spear K. E.', 'year': '1979'} / Proceedings of the 7th International Conference on Chemical Vapor Deposition by Spear K. E. (1979)
{'key': 'e_1_2_1_43_2', 'first-page': '311', 'volume-title': 'Proceedings of the 1st International Conference on Surface Modification Technology', 'author': 'Besmann T. M.', 'year': '1988'} / Proceedings of the 1st International Conference on Surface Modification Technology by Besmann T. M. (1988)

Dates

Type	When
Created	20 years, 5 months ago (March 8, 2005, 11 a.m.)
Deposited	1 year, 9 months ago (Nov. 22, 2023, 11:40 p.m.)
Indexed	2 months ago (June 24, 2025, 6:25 a.m.)
Issued	30 years, 11 months ago (Sept. 1, 1994)
Published	30 years, 11 months ago (Sept. 1, 1994)
Published Online	20 years, 5 months ago (March 8, 2005)
Published Print	30 years, 11 months ago (Sept. 1, 1994)

Funders 0

None

BibTeX

@article{Graham_1994, title={Development of Tantalum Pentoxide Coatings by Chemical Vapor Deposition}, volume={77}, ISSN={1551-2916}, url={http://dx.doi.org/10.1111/j.1151-2916.1994.tb04597.x}, DOI={10.1111/j.1151-2916.1994.tb04597.x}, number={9}, journal={Journal of the American Ceramic Society}, publisher={Wiley}, author={Graham, David W. and Stinton, David P.}, year={1994}, month=sep, pages={2298–2304} }

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