DOI: 10.1109/sensor.1995.717139. Thick Polycristalline Silicon For Surface Micromechanical Applications: Deposition, Structuring And Mechanical Characterization

Thick Polycristalline Silicon For Surface Micromechanical Applications: Deposition, Structuring And Mechanical Characterization

10.1109/sensor.1995.717139

Crossref proceedings-article

IEEE

Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 (263)

Bibliography

Lange, P., Kirsten, M., Riethmuller, W., Wenk, B., Zwicker, G., Morante, J. R., Ericson, F., & Schweitz, J. A. (n.d.). Thick Polycristalline Silicon For Surface Micromechanical Applications: Deposition, Structuring And Mechanical Characterization. Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS â95, 1, 202â203.

Authors 8

P. Lange (first)
M. Kirsten (additional)
W. Riethmuller (additional)
B. Wenk (additional)
G. Zwicker (additional)
J.R. Morante (additional)
F. Ericson (additional)
J.A. Schweitz (additional)

References 8 Referenced 6

{'journal-title': 'Thin Solid Films', 'year': '0', 'author': 'kirsten', 'key': 'ref4'} / Thin Solid Films by kirsten (0)
{'key': 'ref3', 'first-page': '15', 'author': 'bang', 'year': '1994', 'journal-title': 'Microlithography World'} / Microlithography World by bang (1994)
{'journal-title': 'Proc Tech Digest Transducers 95 and Eurosensors IX', 'year': '1995', 'author': 'greek', 'key': 'ref6'} / Proc Tech Digest Transducers 95 and Eurosensors IX by greek (1995)
{'journal-title': 'Proc Tech Digest Transducers 95 and Eurosensors IX', 'year': '1995', 'author': 'ericson', 'key': 'ref5'} / Proc Tech Digest Transducers 95 and Eurosensors IX by ericson (1995)
10.1149/1.2100239
10.1557/PROC-182-201 / Mat Res Soc Proc by huang (1990)
{'key': 'ref2', 'first-page': '39', 'author': 'core', 'year': '1993', 'journal-title': 'Solid State Technology'} / Solid State Technology by core (1993)
10.1016/0250-6874(83)85056-2

Dates

Type	When
Created	19 years, 11 months ago (Aug. 24, 2005, 6:35 p.m.)
Deposited	8 years, 2 months ago (June 16, 2017, 2:53 p.m.)
Indexed	10 months ago (Oct. 23, 2024, 12:52 a.m.)

Funders 0

None

BibTeX

@inproceedings{Lange, title={Thick Polycristalline Silicon For Surface Micromechanical Applications: Deposition, Structuring And Mechanical Characterization}, volume={1}, url={http://dx.doi.org/10.1109/sensor.1995.717139}, DOI={10.1109/sensor.1995.717139}, booktitle={Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS ’95}, publisher={IEEE}, author={Lange, P. and Kirsten, M. and Riethmuller, W. and Wenk, B. and Zwicker, G. and Morante, J.R. and Ericson, F. and Schweitz, J.A.}, pages={202–203} }

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