DOI: 10.1109/memsys.1997.581881. Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysilicon

Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysilicon

10.1109/memsys.1997.581881

Crossref proceedings-article

IEEE

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (263)

Bibliography

Sharpe, W. N., Bin Yuan, Vaidyanathan, R., & Edwards, R. L. (1997). Measurements of Youngâs modulus, Poissonâs ratio, and tensile strength of polysilicon. Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, 424â429.

Authors 4

W.N. Sharpe (first)
Bin Yuan (additional)
R. Vaidyanathan (additional)
R.L. Edwards (additional)

References 19 Referenced 153

{'key': 'ref10', 'first-page': '214', 'article-title': 'Advanced Modeling of Micromirror Devices', 'author': 'michalicek', 'year': '1995', 'journal-title': 'Proc Int Conf Integrated Micro/Nanotechnol Space Applicat'} / Proc Int Conf Integrated Micro/Nanotechnol Space Applicat / Advanced Modeling of Micromirror Devices by michalicek (1995)
10.1109/SENSOR.1995.721747
10.1109/SENSOR.1995.721749
10.1016/0924-4247(94)00969-O
10.1117/12.250967 / SPIE Microlithography and Metrology in Micromachining II by read (1996)
10.1109/MEMSYS.1996.494005
10.1117/12.250952 / SPIE Microlithography and Metrology in Micromachining II by gupta (1996)
{'key': 'ref17', 'first-page': '325', 'article-title': 'Micromechanical Structures for Fracture Testing of Brittle Thin Films', 'volume': '59', 'author': 'jones', 'year': '1996', 'journal-title': 'J Micro Electro Mechanical Systems'} / J Micro Electro Mechanical Systems / Micromechanical Structures for Fracture Testing of Brittle Thin Films by jones (1996)
{'journal-title': 'Single Crystal Elastic Constants and Calculated Aggregate Properties A Handbook', 'year': '1971', 'key': 'ref18'} / Single Crystal Elastic Constants and Calculated Aggregate Properties A Handbook (1971)
{'journal-title': 'Handbook of Tables for Applied Engineering Science', 'first-page': '124', 'year': '1970', 'key': 'ref19'} / Handbook of Tables for Applied Engineering Science (1970)
{'journal-title': 'An Interferometric Strain Displacement Measurement System', 'year': '1989', 'author': 'sharpe', 'key': 'ref4'} / An Interferometric Strain Displacement Measurement System by sharpe (1989)
{'key': 'ref3', 'first-page': '219', 'author': 'sharpe', 'year': '1993', 'journal-title': 'Experimental Techniques in Fracture'} / Experimental Techniques in Fracture by sharpe (1993)
10.1109/MEMSYS.1990.110267
10.1016/0250-6874(89)87111-2
10.1088/0960-1317/3/1/004
10.1007/BF02654536
10.1520/STP11889S
{'key': 'ref1', 'first-page': '78', 'article-title': 'New Test Structures and Techniques for Measurement of Mechanical Properties of MEMS Materials', 'volume': '2880', 'author': 'sharpe', 'year': '1996', 'journal-title': 'Proc SPIE Micromach Microfabrication'} / Proc SPIE Micromach Microfabrication / New Test Structures and Techniques for Measurement of Mechanical Properties of MEMS Materials by sharpe (1996)
10.1088/0960-1317/5/2/016

Dates

Type	When
Created	22 years, 8 months ago (Nov. 22, 2002, 10:21 a.m.)
Deposited	5 years, 6 months ago (Feb. 5, 2020, 10:28 a.m.)
Indexed	1 month, 3 weeks ago (June 28, 2025, 12:23 a.m.)
Issued	28 years, 7 months ago (Jan. 1, 1997)
Published	28 years, 7 months ago (Jan. 1, 1997)
Published Print	28 years, 7 months ago (Jan. 1, 1997)

Funders 0

None

BibTeX

@inproceedings{Sharpe_1997, title={Measurements of Young’s modulus, Poisson’s ratio, and tensile strength of polysilicon}, url={http://dx.doi.org/10.1109/memsys.1997.581881}, DOI={10.1109/memsys.1997.581881}, booktitle={Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots}, publisher={IEEE}, author={Sharpe, W.N. and Bin Yuan and Vaidyanathan, R. and Edwards, R.L.}, year={1997}, pages={424–429} }

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