DOI: 10.1109/memsys.1996.494005. Mechanical properties of thick, surface micromachined polysilicon films

Mechanical properties of thick, surface micromachined polysilicon films

10.1109/memsys.1996.494005

Crossref proceedings-article

IEEE

Proceedings of Ninth International Workshop on Micro Electromechanical Systems (263)

Bibliography

Kahn, H., Stemmer, S., Nandakumar, K., Heuer, A. H., Mullen, R. L., Ballarini, R., & Huff, M. A. (n.d.). Mechanical properties of thick, surface micromachined polysilicon films. Proceedings of Ninth International Workshop on Micro Electromechanical Systems, 343â348.

Authors 7

H. Kahn (first)
S. Stemmer (additional)
K. Nandakumar (additional)
A.H. Heuer (additional)
R.L. Mullen (additional)
R. Ballarini (additional)
M.A. Huff (additional)

References 23 Referenced 24

10.1109/SENSOR.1991.148838
10.1557/PROC-276-233
10.1063/1.356614
10.1016/0924-4247(90)87047-M
10.1063/1.1663459
10.1063/1.93200
10.1063/1.333142
10.1149/1.2129903
{'key': 'ref18', 'first-page': '147', 'author': 'nussbaum', 'year': '1976', 'journal-title': 'Contemporary Optics for Scientists and Engineers'} / Contemporary Optics for Scientists and Engineers by nussbaum (1976)
{'key': 'ref19', 'first-page': '74', 'author': 'fairman', 'year': '1953', 'journal-title': 'Mechanics of Materials'} / Mechanics of Materials by fairman (1953)
10.1016/0250-6874(89)87098-2
10.1109/16.2534
10.1109/SENSOR.1995.721750
10.1109/MEMSYS.1993.296922
{'journal-title': 'unpublished results', 'year': '0', 'author': 'yasseen', 'key': 'ref8'} / unpublished results by yasseen (0)
{'key': 'ref7', 'first-page': '95', 'author': 'ristic', 'year': '1994', 'journal-title': 'Sensor Technology and Devices'} / Sensor Technology and Devices by ristic (1994)
10.1557/PROC-239-169
10.1109/SENSOR.1995.717139 / IEEE TRANSDUCERS 95 / Thick Polycrystalline silicon for surface micromechanical applications: deposition, structuring and mechnical characterization by lange (1995)
{'journal-title': 'private communication', 'year': '1994', 'author': 'bernstein', 'key': 'ref9'} / private communication by bernstein (1994)
10.1016/j.msea.2006.08.113
10.1109/MEMSYS.1993.296960
10.1063/1.342585
10.1111/j.1151-2916.1982.tb10413.x

Dates

Type	When
Created	22 years, 7 months ago (Dec. 23, 2002, 12:28 p.m.)
Deposited	7 years, 6 months ago (Jan. 22, 2018, 5:01 p.m.)
Indexed	1 month, 4 weeks ago (June 24, 2025, 6:48 a.m.)

Funders 0

None

BibTeX

@inproceedings{Kahn, series={MEMSYS-96}, title={Mechanical properties of thick, surface micromachined polysilicon films}, url={http://dx.doi.org/10.1109/memsys.1996.494005}, DOI={10.1109/memsys.1996.494005}, booktitle={Proceedings of Ninth International Workshop on Micro Electromechanical Systems}, publisher={IEEE}, author={Kahn, H. and Stemmer, S. and Nandakumar, K. and Heuer, A.H. and Mullen, R.L. and Ballarini, R. and Huff, M.A.}, pages={343–348}, collection={MEMSYS-96} }

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