DOI: 10.1109/memsys.1996.493837. Micro mechanical single crystal silicon fracture studies torsion and bending

Micro mechanical single crystal silicon fracture studies torsion and bending

10.1109/memsys.1996.493837

Crossref proceedings-article

IEEE

Proceedings of Ninth International Workshop on Micro Electromechanical Systems (263)

Bibliography

Saif, M. T. A., & MacDonald, N. C. (n.d.). Micro mechanical single crystal silicon fracture studies torsion and bending. Proceedings of Ninth International Workshop on Micro Electromechanical Systems, 105â109.

Authors 2

M.T.A. Saif (first)
N.C. MacDonald (additional)

References 6 Referenced 11

10.1063/1.1661935
10.1016/0924-4247(94)85031-3 / Sensors and Actuators A / SCREAM I: A Single Mask, Single-Crystal Silicon, Reactive Etching Process for MicroElectroMechan ical Structures by shaw (1994)
10.1016/0250-6874(89)87110-0
{'journal-title': 'Theory of Elasticity of an Anisotropic Body', 'year': '1981', 'author': 'lekhnitskii', 'key': 'ref5'} / Theory of Elasticity of an Anisotropic Body by lekhnitskii (1981)
10.1088/0960-1317/2/1/007
10.1109/SENSOR.1995.721744

Dates

Type	When
Created	22 years, 7 months ago (Dec. 23, 2002, 12:28 p.m.)
Deposited	8 years, 2 months ago (June 15, 2017, 8:33 a.m.)
Indexed	4 months ago (April 16, 2025, 2:13 a.m.)

Funders 0

None

BibTeX

@inproceedings{Saif, series={MEMSYS-96}, title={Micro mechanical single crystal silicon fracture studies torsion and bending}, url={http://dx.doi.org/10.1109/memsys.1996.493837}, DOI={10.1109/memsys.1996.493837}, booktitle={Proceedings of Ninth International Workshop on Micro Electromechanical Systems}, publisher={IEEE}, author={Saif, M.T.A. and MacDonald, N.C.}, pages={105–109}, collection={MEMSYS-96} }

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