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proceedings-article
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IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. (263)
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Referenced
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{'key': 'ref2', 'first-page': '567', 'article-title': 'A Miniature 6-axis Force Sensor of Multi-layer Parallel Plate Structure', 'author': 'hatamura', 'year': '1988', 'journal-title': 'Proc of XI IMEKO Conference'}
/ Proc of XI IMEKO Conference / A Miniature 6-axis Force Sensor of Multi-layer Parallel Plate Structure by hatamura (1988)10.2465/minerj.13.195
@inproceedings{Hatamura, title={Direct coupling system between nanometer world and human world}, url={http://dx.doi.org/10.1109/memsys.1990.110277}, DOI={10.1109/memsys.1990.110277}, booktitle={IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.}, publisher={IEEE}, author={Hatamura, Y. and Morishita, H.} }