DOI: 10.1109/jmems.2009.2016284. Application of Diamond-Like Nanocomposite Tribological Coatings on LIGA Microsystem Parts

Application of Diamond-Like Nanocomposite Tribological Coatings on LIGA Microsystem Parts

10.1109/jmems.2009.2016284

Crossref journal-article

Institute of Electrical and Electronics Engineers (IEEE)

Journal of Microelectromechanical Systems (263)

Bibliography

Prasad, S. V., Scharf, T. W., Kotula, P. G., Michael, J. R., & Christenson, T. R. (2009). Application of Diamond-Like Nanocomposite Tribological Coatings on LIGA Microsystem Parts. Journal of Microelectromechanical Systems, 18(3), 695â704.

Authors 5

S.V. Prasad (first)
T.W. Scharf (additional)
P.G. Kotula (additional)
J.R. Michael (additional)
T.R. Christenson (additional)

References 25 Referenced 8

10.1016/0040-6090(92)90532-G
{'key': 'ref11', 'author': 'venkatraman', 'year': '1996', 'journal-title': 'Surface Modifications Technologies IX'} / Surface Modifications Technologies IX by venkatraman (1996)
10.1109/JMEMS.2004.839125
10.1016/S1359-6462(02)00376-7
10.1007/s11661-002-0116-3
10.1007/s00542-004-0381-8
{'key': 'ref16', 'year': '2003', 'journal-title': 'Apparatus and system for multivariate spectral analysis'} / Apparatus and system for multivariate spectral analysis (2003)
10.1017/S1431927603030058
10.1016/S0257-8972(99)00003-1
10.1063/1.2711147
{'key': 'ref4', 'first-page': '1004', 'author': 'scharf', 'year': '2005', 'journal-title': 'Diamond-like nanocomposite coatings for LIGA nickel alloy parts'} / Diamond-like nanocomposite coatings for LIGA nickel alloy parts by scharf (2005)
10.1016/S1526-6125(04)70064-X
10.1115/1.1924428
{'key': 'ref5', 'author': 'meng', 'year': '2003', 'journal-title': 'Nano-Tribology Critical Assessment and Research Needs'} / Nano-Tribology Critical Assessment and Research Needs by meng (2003)
10.1063/1.1615677
10.1016/S0040-6090(03)00275-X
10.1557/mrs2001.76
{'key': 'ref9', 'first-page': '66', 'author': 'bunshah', 'year': '2001', 'journal-title': 'Handbook of Hard Coatings Deposition Technologies Properties and Applications'} / Handbook of Hard Coatings Deposition Technologies Properties and Applications by bunshah (2001)
{'key': 'ref1', 'author': 'christenson', 'year': '2001', 'journal-title': 'MEMS Handbook'} / MEMS Handbook by christenson (2001)
10.1080/10402000208982561
10.1007/978-94-011-2811-7_13
10.1023/A:1021942830132
10.1016/j.actamat.2007.12.048
10.1109/ISSCC.1988.663672
10.1016/S1359-6454(03)00440-3

Dates

Type	When
Created	16 years, 4 months ago (April 3, 2009, 2:52 p.m.)
Deposited	3 years, 10 months ago (Oct. 10, 2021, 8:01 p.m.)
Indexed	1 year, 11 months ago (Sept. 13, 2023, 4 p.m.)
Issued	16 years, 2 months ago (June 1, 2009)
Published	16 years, 2 months ago (June 1, 2009)
Published Print	16 years, 2 months ago (June 1, 2009)

Funders 0

None

BibTeX

@article{Prasad_2009, title={Application of Diamond-Like Nanocomposite Tribological Coatings on LIGA Microsystem Parts}, volume={18}, ISSN={1941-0158}, url={http://dx.doi.org/10.1109/jmems.2009.2016284}, DOI={10.1109/jmems.2009.2016284}, number={3}, journal={Journal of Microelectromechanical Systems}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Prasad, S.V. and Scharf, T.W. and Kotula, P.G. and Michael, J.R. and Christenson, T.R.}, year={2009}, month=jun, pages={695–704} }

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