DOI: 10.1109/jmems.2007.910235. A Low-Cost 128 $\times$ 128 Uncooled Infrared Detector Array in CMOS Process

A Low-Cost 128 $\times$ 128 Uncooled Infrared Detector Array in CMOS Process

10.1109/jmems.2007.910235

Crossref journal-article

Institute of Electrical and Electronics Engineers (IEEE)

Journal of Microelectromechanical Systems (263)

Bibliography

Eminoglu, S., Tanrikulu, M. Y., & Akin, T. (2008). A Low-Cost 128 $\times$ 128 Uncooled Infrared Detector Array in CMOS Process. Journal of Microelectromechanical Systems, 17(1), 20â30.

Authors 3

S. Eminoglu (first)
M.Y. Tanrikulu (additional)
T. Akin (additional)

References 41 Referenced 72

10.1117/12.409858
10.1016/S0924-4247(97)80100-8 / Sens Actuators A Phys / laminated high-aspect-ratio microstructures in a conventional cmos process by fedder (1996)
10.1016/j.sna.2003.08.013 / Sens Actuators A Phys / low cost uncooled infrared detectors in cmos process by eminoglu (2003)
10.1117/12.478839
10.1109/TED.2002.807453
10.1109/MEMSYS.2001.906604
10.1016/S0924-4247(98)00038-7
10.1016/S0924-4247(97)80223-3 / Sens Actuators A Phys / micromachined thermally isolated circuits by klaassen (1997)
10.1117/12.488185 / Proc SPIEInfrared Technology Applications XXIX / low-cost uncooled infrared detector arrays in standard cmos by eminoglu (2003)
10.1109/SENSOR.2003.1215316
10.1117/12.667762
10.1016/S0924-4247(98)00276-3 / Sens Actuators A Phys / a 1024-element bulk-micromachined thermopile infrared imaging array by oliver (1999)
10.1117/12.664020
10.1117/12.724345
10.1117/12.723474
{'key': 'ref14', 'first-page': '65421x-1', 'article-title': 'large format and high sensitivity -bolometer detectors at scd', 'volume': '6542', 'author': 'mizrahi', 'year': '2007', 'journal-title': 'Proc SPIEInfrared Technology Applications XXXIII'} / Proc SPIEInfrared Technology Applications XXXIII / large format and high sensitivity -bolometer detectors at scd by mizrahi (2007)
{'key': 'ref15', 'first-page': '654 21y-1', 'article-title': 'recent development of ultra small pixel uncooled focal plane arrays at drs', 'volume': '6542', 'author': 'li', 'year': '2007', 'journal-title': 'Proc SPIEInfrared Technology Applications XXXIII'} / Proc SPIEInfrared Technology Applications XXXIII / recent development of ultra small pixel uncooled focal plane arrays at drs by li (2007)
10.1117/12.667580
{'key': 'ref17', 'first-page': '654 21v-1', 'article-title': 'uncooled amorphous silicon 160 120 irfpa with 25 pixel-pitch for large volume applications', 'volume': '6542', 'author': 'trouilleau', 'year': '2007', 'journal-title': 'Proc SPIEInfrared Technology Applications XXXIII'} / Proc SPIEInfrared Technology Applications XXXIII / uncooled amorphous silicon 160 120 irfpa with 25 pixel-pitch for large volume applications by trouilleau (2007)
{'key': 'ref18', 'first-page': '1', 'article-title': 'performance of 320 240 uncooled irfpa with soi diode detectors', 'volume': '4130', 'author': 'ishikawa', 'year': '2000', 'journal-title': 'Proc SPIEInfrared Technology Applications XXVI'} / Proc SPIEInfrared Technology Applications XXVI / performance of 320 240 uncooled irfpa with soi diode detectors by ishikawa (2000)
10.1117/12.609665 / Proc SPIEInfrared Technology Applications XXXI / 640 480 pixel uncooled infrared fpa with soi diode detectors by ueno (2005)
10.1117/12.669353
10.1109/16.753700
10.1117/12.603905
10.1117/12.354529
10.1109/16.628839
10.1117/12.730274
10.1117/12.445342
10.1109/84.546409
10.1109/SENSOR.1995.721911
10.1117/12.250694
{'key': 'ref9', 'first-page': '620 61a-1', 'article-title': 'high sensitivity 640 512 (20 pitch) microbolometer fpas', 'volume': '6206', 'author': 'murphy', 'year': '2006', 'journal-title': 'Proc SPIEInfrared Technology Applications XXXII'} / Proc SPIEInfrared Technology Applications XXXII / high sensitivity 640 512 (20 pitch) microbolometer fpas by murphy (2006)
10.1117/12.160553 / Proc SPIEInfrared Technology XIX / uncooled thermal imaging with monolithic silicon focal arrays by wood (1993)
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10.1088/0960-1317/11/5/310
{'key': 'ref21', 'first-page': '65421l-1', 'article-title': 'low-cost far infrared bolometer camera for automotive use', 'volume': '6542', 'author': 'vieider', 'year': '2007', 'journal-title': 'Proc SPIEInfrared Technology Applications XXXIII'} / Proc SPIEInfrared Technology Applications XXXIII / low-cost far infrared bolometer camera for automotive use by vieider (2007)
10.1063/1.2168512
{'key': 'ref41', 'volume': '47', 'author': 'kruse', 'year': '1997', 'journal-title': 'Semiconductors and Semimetals'} / Semiconductors and Semimetals by kruse (1997)
10.1117/12.565894
10.1016/j.sna.2006.06.058
10.1109/84.967372

Dates

Type	When
Created	17 years, 6 months ago (Feb. 11, 2008, 3:22 p.m.)
Deposited	3 years, 7 months ago (Jan. 12, 2022, 10:58 a.m.)
Indexed	1 month, 3 weeks ago (June 28, 2025, 12:23 a.m.)
Issued	17 years, 6 months ago (Feb. 1, 2008)
Published	17 years, 6 months ago (Feb. 1, 2008)
Published Print	17 years, 6 months ago (Feb. 1, 2008)

Funders 0

None

BibTeX

@article{Eminoglu_2008, title={A Low-Cost 128 $\times$ 128 Uncooled Infrared Detector Array in CMOS Process}, volume={17}, ISSN={1941-0158}, url={http://dx.doi.org/10.1109/jmems.2007.910235}, DOI={10.1109/jmems.2007.910235}, number={1}, journal={Journal of Microelectromechanical Systems}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Eminoglu, S. and Tanrikulu, M.Y. and Akin, T.}, year={2008}, month=feb, pages={20–30} }

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