DOI: 10.1109/iedm.2006.346806. Polymer self assembly in semiconductor microelectronics

Polymer self assembly in semiconductor microelectronics

10.1109/iedm.2006.346806

Crossref proceedings-article

IEEE

2006 International Electron Devices Meeting (263)

Bibliography

Black, C. T., Guarini, K. W., Ruiz, R., Sikorski, E. M., Babich, I. V., Sandstrom, R. L., & Zhang, Y. (2006). Polymer self assembly in semiconductor microelectronics. 2006 International Electron Devices Meeting, 1â4.

Authors 7

C. T. Black (first)
K. W. Guarini (additional)
R. Ruiz (additional)
E. M. Sikorski (additional)
I. V. Babich (additional)
R. L. Sandstrom (additional)
Y. Zhang (additional)

References 12 Referenced 4

10.1063/1.2112191
10.1109/IEDM.2003.1269340
10.1109/TNANO.2004.834160
10.1109/IEDM.2005.1609349
10.1021/nl035005j
10.1002/(SICI)1521-4095(200006)12:11<787::AID-ADMA787>3.0.CO;2-1 / Advanced Materials / Nanoscopic Templates from Oriented Block Copolymer Films by thurn-albrecht (2000)
10.1117/12.659252
10.1063/1.882522
10.1038/nmat1211
{'key': 'ref2', 'article-title': 'High-Capacity, Self-Assembled Metal-Oxide-Semiconductor Decoupling Capacitors', 'volume': '26', 'author': 'black', 'year': '2004', 'journal-title': 'IEEE EDL'} / IEEE EDL / High-Capacity, Self-Assembled Metal-Oxide-Semiconductor Decoupling Capacitors by black (2004)
10.1109/IEDM.1995.499252
10.1109/CICC.2005.1568615

Dates

Type	When
Created	18 years, 3 months ago (April 24, 2007, 4:05 p.m.)
Deposited	8 years, 2 months ago (June 17, 2017, 12:41 p.m.)
Indexed	9 months, 4 weeks ago (Oct. 22, 2024, 9:28 p.m.)
Issued	19 years, 7 months ago (Jan. 1, 2006)
Published	19 years, 7 months ago (Jan. 1, 2006)
Published Print	19 years, 7 months ago (Jan. 1, 2006)

Funders 0

None

BibTeX

@inproceedings{Black_2006, title={Polymer self assembly in semiconductor microelectronics}, url={http://dx.doi.org/10.1109/iedm.2006.346806}, DOI={10.1109/iedm.2006.346806}, booktitle={2006 International Electron Devices Meeting}, publisher={IEEE}, author={Black, C. T. and Guarini, K. W. and Ruiz, R. and Sikorski, E. M. and Babich, I. V. and Sandstrom, R. L. and Zhang, Y.}, year={2006}, pages={1–4} }

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