DOI: 10.1109/84.661392. Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films

Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films

10.1109/84.661392

Crossref journal-article

Institute of Electrical and Electronics Engineers (IEEE)

Journal of Microelectromechanical Systems (263)

Bibliography

Tsuchiya, T., Tabata, O., Sakata, J., & Taga, Y. (1998). Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films. Journal of Microelectromechanical Systems, 7(1), 106â113.

Authors 4

T. Tsuchiya (first)
O. Tabata (additional)
J. Sakata (additional)
Y. Taga (additional)

References 12 Referenced 320

10.1557/JMR.1988.0931
10.1063/1.340471
10.1557/PROC-130-77
10.1016/0250-6874(89)87111-2
{'key': 'ref11', 'author': 'kelly', 'year': '1966', 'journal-title': 'Strong Solids'} / Strong Solids by kelly (1966)
10.1088/0960-1317/3/1/004
10.1117/12.250969 / Proc SPIE / new test structure and techniques for measurement of mechanical properties of mems materials by sharpe jr (1996)
{'key': 'ref12', 'first-page': '797', 'author': 'kingery', 'year': '1976', 'journal-title': 'Introduction to Creamics'} / Introduction to Creamics by kingery (1976)
10.1109/SENSOR.1995.721743
10.1016/0040-6090(87)90095-2
{'key': 'ref1', 'first-page': '183', 'author': 'beams', 'year': '1959', 'journal-title': 'The Structure and Properties of Thin Films'} / The Structure and Properties of Thin Films by beams (1959)
10.1541/ieejsmas.116.441

Dates

Type	When
Created	22 years, 11 months ago (Aug. 24, 2002, 3:31 p.m.)
Deposited	3 years, 8 months ago (Nov. 29, 2021, 3:18 p.m.)
Indexed	1 day, 8 hours ago (Aug. 21, 2025, 12:52 p.m.)
Issued	27 years, 5 months ago (March 1, 1998)
Published	27 years, 5 months ago (March 1, 1998)
Published Print	27 years, 5 months ago (March 1, 1998)

Funders 0

None

BibTeX

@article{Tsuchiya_1998, title={Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films}, volume={7}, ISSN={1057-7157}, url={http://dx.doi.org/10.1109/84.661392}, DOI={10.1109/84.661392}, number={1}, journal={Journal of Microelectromechanical Systems}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Tsuchiya, T. and Tabata, O. and Sakata, J. and Taga, Y.}, year={1998}, month=mar, pages={106–113} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        21
      ]
    ],
    "date-time": "2025-08-21T16:52:54Z",
    "timestamp": 1755795174984
  },
  "reference-count": 12,
  "publisher": "Institute of Electrical and Electronics Engineers (IEEE)",
  "issue": "1",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1998,
            3,
            1
          ]
        ],
        "date-time": "1998-03-01T00:00:00Z",
        "timestamp": 888710400000
      },
      "content-version": "vor",
      "delay-in-days": 0,
      "URL": "https://ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.html"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1998,
        3
      ]
    ]
  },
  "DOI": "10.1109/84.661392",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        8,
        24
      ]
    ],
    "date-time": "2002-08-24T19:31:03Z",
    "timestamp": 1030217463000
  },
  "page": "106-113",
  "source": "Crossref",
  "is-referenced-by-count": 320,
  "title": "Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films",
  "prefix": "10.1109",
  "volume": "7",
  "author": [
    {
      "given": "T.",
      "family": "Tsuchiya",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "O.",
      "family": "Tabata",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "J.",
      "family": "Sakata",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Y.",
      "family": "Taga",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "263",
  "reference": [
    {
      "key": "ref4",
      "doi-asserted-by": "publisher",
      "DOI": "10.1557/JMR.1988.0931"
    },
    {
      "key": "ref3",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.340471"
    },
    {
      "key": "ref6",
      "doi-asserted-by": "publisher",
      "DOI": "10.1557/PROC-130-77"
    },
    {
      "key": "ref10",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0250-6874(89)87111-2"
    },
    {
      "key": "ref11",
      "author": "kelly",
      "year": "1966",
      "journal-title": "Strong Solids"
    },
    {
      "key": "ref5",
      "doi-asserted-by": "publisher",
      "DOI": "10.1088/0960-1317/3/1/004"
    },
    {
      "key": "ref8",
      "doi-asserted-by": "crossref",
      "first-page": "78",
      "DOI": "10.1117/12.250969",
      "article-title": "new test structure and techniques for measurement of mechanical properties of mems materials",
      "volume": "2880",
      "author": "sharpe jr",
      "year": "1996",
      "journal-title": "Proc SPIE"
    },
    {
      "key": "ref12",
      "first-page": "797",
      "author": "kingery",
      "year": "1976",
      "journal-title": "Introduction to Creamics"
    },
    {
      "key": "ref7",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/SENSOR.1995.721743"
    },
    {
      "key": "ref2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0040-6090(87)90095-2"
    },
    {
      "key": "ref1",
      "first-page": "183",
      "author": "beams",
      "year": "1959",
      "journal-title": "The Structure and Properties of Thin Films"
    },
    {
      "key": "ref9",
      "doi-asserted-by": "publisher",
      "DOI": "10.1541/ieejsmas.116.441"
    }
  ],
  "container-title": "Journal of Microelectromechanical Systems",
  "original-title": [],
  "link": [
    {
      "URL": "http://xplorestaging.ieee.org/ielx4/84/14428/00661392.pdf?arnumber=661392",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2021,
        11,
        29
      ]
    ],
    "date-time": "2021-11-29T20:18:13Z",
    "timestamp": 1638217093000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "http://ieeexplore.ieee.org/document/661392/"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1998,
        3
      ]
    ]
  },
  "references-count": 12,
  "journal-issue": {
    "issue": "1"
  },
  "URL": "http://dx.doi.org/10.1109/84.661392",
  "relation": {},
  "ISSN": [
    "1057-7157"
  ],
  "subject": [],
  "container-title-short": "J. Microelectromech. Syst.",
  "published": {
    "date-parts": [
      [
        1998,
        3
      ]
    ]
  }
}