DOI: 10.1109/84.546409. Characterization and modeling of metal-film microbolometer

Characterization and modeling of metal-film microbolometer

10.1109/84.546409

Crossref journal-article

Institute of Electrical and Electronics Engineers (IEEE)

Journal of Microelectromechanical Systems (263)

Bibliography

Jin-Shown Shie, Yeong-Maw Chen, Mang Ou-Yang, & Chou, B. C. S. (1996). Characterization and modeling of metal-film microbolometer. Journal of Microelectromechanical Systems, 5(4), 298â306.

Authors 4

Jin-Shown Shie (first)
Yeong-Maw Chen (additional)
Mang Ou-Yang (additional)
B.C.S. Chou (additional)

References 38 Referenced 56

10.1016/0924-4247(93)80183-H
10.1007/978-3-540-35948-7 / Detection of Optical and Infrared Radiation by kingston (1978)
10.1109/16.293302
10.1109/SENSOR.1991.148914
{'key': 'ref30', 'author': 'chen', 'year': '0', 'journal-title': 'Parameter extraction of resistive thermal sensors'} / Parameter extraction of resistive thermal sensors by chen (0)
10.1109/MEMSYS.1994.555766
10.1063/1.1143614
10.1109/19.234501
10.1109/19.252535
10.1109/4.262001
10.1109/JSSC.1974.1050463
10.1109/STHERM.1993.225327
10.1016/0924-4247(92)80182-3
10.1109/SENSOR.1991.148789
{'key': 'ref15', 'author': 'mastrangelo', 'year': '1991', 'journal-title': 'Thermal applications of microbridges'} / Thermal applications of microbridges by mastrangelo (1991)
{'key': 'ref16', 'first-page': '183', 'article-title': 'design considerations of metal-film bolometer with micromachined floating membrane', 'volume': 'a33', 'author': 'shie', 'year': '1992', 'journal-title': 'Sens Actuators'} / Sens Actuators / design considerations of metal-film bolometer with micromachined floating membrane by shie (1992)
10.1109/4.104194
10.1109/TIM.1973.4314139
10.1063/1.1145163
{'key': 'ref28', 'first-page': '39', 'author': 'hudson', 'year': '1969', 'journal-title': 'Infrared System Engineering'} / Infrared System Engineering by hudson (1969)
10.1088/0957-0233/4/11/011
{'key': 'ref27', 'author': 'budde', 'year': '1983', 'journal-title': 'Optical Radiation Measurements Vol 4 Physical Detectors of Optical Radition'} / Optical Radiation Measurements Vol 4 Physical Detectors of Optical Radition by budde (1983)
10.1016/0924-4247(89)80018-4 / Sens Actuators / a thin-film bolometer for radiation thermometry at ambient temperature by lang (1990)
10.1109/SOLSEN.1992.228308
{'key': 'ref29', 'author': 'dushman', 'year': '1962', 'journal-title': 'Scientific Foundations of Vacuum Technique'} / Scientific Foundations of Vacuum Technique by dushman (1962)
10.1109/19.293409
10.1109/SENSOR.1995.721911
10.1117/12.137968
10.1063/1.333272
10.1109/JSSC.1971.1050152
10.1016/0020-0891(84)90048-4
{'key': 'ref20', 'first-page': '86', 'author': 'ricolfi', 'year': '1990', 'journal-title': 'Sensors A Comprehensive Survey Vol 4 Thermal Sensors'} / Sensors A Comprehensive Survey Vol 4 Thermal Sensors by ricolfi (1990)
{'key': 'ref22', 'author': 'd heurle', 'year': '1977', 'journal-title': 'Proc 7th Int Vacuum Congress and 3rd Int Conf Solid Surface'} / Proc 7th Int Vacuum Congress and 3rd Int Conf Solid Surface by d heurle (1977)
10.1016/0040-6090(75)90066-8
10.1016/0020-0891(86)90046-1
{'key': 'ref23', 'first-page': '286', 'author': 'mott', 'year': '1958', 'journal-title': 'The Theory of the Properties of Metals and Alloys'} / The Theory of the Properties of Metals and Alloys by mott (1958)
10.1016/0924-4247(93)80156-B
10.1109/SENSOR.1991.148958

Dates

Type	When
Created	22 years, 11 months ago (Aug. 24, 2002, 3:31 p.m.)
Deposited	3 years, 8 months ago (Nov. 29, 2021, 3:18 p.m.)
Indexed	1 month, 2 weeks ago (July 2, 2025, 3:27 p.m.)
Issued	29 years, 7 months ago (Jan. 1, 1996)
Published	29 years, 7 months ago (Jan. 1, 1996)
Published Print	29 years, 7 months ago (Jan. 1, 1996)

Funders 0

None

BibTeX

@article{Jin_Shown_Shie_1996, title={Characterization and modeling of metal-film microbolometer}, volume={5}, ISSN={1057-7157}, url={http://dx.doi.org/10.1109/84.546409}, DOI={10.1109/84.546409}, number={4}, journal={Journal of Microelectromechanical Systems}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Jin-Shown Shie and Yeong-Maw Chen and Mang Ou-Yang and Chou, B.C.S.}, year={1996}, pages={298–306} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        2
      ]
    ],
    "date-time": "2025-07-02T19:27:29Z",
    "timestamp": 1751484449460
  },
  "reference-count": 38,
  "publisher": "Institute of Electrical and Electronics Engineers (IEEE)",
  "issue": "4",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1996,
            1,
            1
          ]
        ],
        "date-time": "1996-01-01T00:00:00Z",
        "timestamp": 820454400000
      },
      "content-version": "vor",
      "delay-in-days": 0,
      "URL": "https://ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.html"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1996
      ]
    ]
  },
  "DOI": "10.1109/84.546409",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        8,
        24
      ]
    ],
    "date-time": "2002-08-24T19:31:03Z",
    "timestamp": 1030217463000
  },
  "page": "298-306",
  "source": "Crossref",
  "is-referenced-by-count": 56,
  "title": "Characterization and modeling of metal-film microbolometer",
  "prefix": "10.1109",
  "volume": "5",
  "author": [
    {
      "family": "Jin-Shown Shie",
      "sequence": "first",
      "affiliation": []
    },
    {
      "family": "Yeong-Maw Chen",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "family": "Mang Ou-Yang",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "B.C.S.",
      "family": "Chou",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "263",
  "reference": [
    {
      "key": "ref38",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0924-4247(93)80183-H"
    },
    {
      "key": "ref33",
      "doi-asserted-by": "crossref",
      "DOI": "10.1007/978-3-540-35948-7",
      "author": "kingston",
      "year": "1978",
      "journal-title": "Detection of Optical and Infrared Radiation"
    },
    {
      "key": "ref32",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/16.293302"
    },
    {
      "key": "ref31",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/SENSOR.1991.148914"
    },
    {
      "key": "ref30",
      "author": "chen",
      "year": "0",
      "journal-title": "Parameter extraction of resistive thermal sensors"
    },
    {
      "key": "ref37",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/MEMSYS.1994.555766"
    },
    {
      "key": "ref36",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.1143614"
    },
    {
      "key": "ref35",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/19.234501"
    },
    {
      "key": "ref34",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/19.252535"
    },
    {
      "key": "ref10",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/4.262001"
    },
    {
      "key": "ref11",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/JSSC.1974.1050463"
    },
    {
      "key": "ref12",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/STHERM.1993.225327"
    },
    {
      "key": "ref13",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0924-4247(92)80182-3"
    },
    {
      "key": "ref14",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/SENSOR.1991.148789"
    },
    {
      "key": "ref15",
      "author": "mastrangelo",
      "year": "1991",
      "journal-title": "Thermal applications of microbridges"
    },
    {
      "key": "ref16",
      "first-page": "183",
      "article-title": "design considerations of metal-film bolometer with micromachined floating membrane",
      "volume": "a33",
      "author": "shie",
      "year": "1992",
      "journal-title": "Sens Actuators"
    },
    {
      "key": "ref17",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/4.104194"
    },
    {
      "key": "ref18",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/TIM.1973.4314139"
    },
    {
      "key": "ref19",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.1145163"
    },
    {
      "key": "ref28",
      "first-page": "39",
      "author": "hudson",
      "year": "1969",
      "journal-title": "Infrared System Engineering"
    },
    {
      "key": "ref4",
      "doi-asserted-by": "publisher",
      "DOI": "10.1088/0957-0233/4/11/011"
    },
    {
      "key": "ref27",
      "author": "budde",
      "year": "1983",
      "journal-title": "Optical Radiation Measurements Vol 4 Physical Detectors of Optical Radition"
    },
    {
      "key": "ref3",
      "doi-asserted-by": "crossref",
      "first-page": "473",
      "DOI": "10.1016/0924-4247(89)80018-4",
      "article-title": "a thin-film bolometer for radiation thermometry at ambient temperature",
      "volume": "a21\u2013a23",
      "author": "lang",
      "year": "1990",
      "journal-title": "Sens Actuators"
    },
    {
      "key": "ref6",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/SOLSEN.1992.228308"
    },
    {
      "key": "ref29",
      "author": "dushman",
      "year": "1962",
      "journal-title": "Scientific Foundations of Vacuum Technique"
    },
    {
      "key": "ref5",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/19.293409"
    },
    {
      "key": "ref8",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/SENSOR.1995.721911"
    },
    {
      "key": "ref7",
      "doi-asserted-by": "publisher",
      "DOI": "10.1117/12.137968"
    },
    {
      "key": "ref2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.333272"
    },
    {
      "key": "ref9",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/JSSC.1971.1050152"
    },
    {
      "key": "ref1",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0020-0891(84)90048-4"
    },
    {
      "key": "ref20",
      "first-page": "86",
      "author": "ricolfi",
      "year": "1990",
      "journal-title": "Sensors A Comprehensive Survey Vol 4 Thermal Sensors"
    },
    {
      "key": "ref22",
      "author": "d heurle",
      "year": "1977",
      "journal-title": "Proc 7th Int Vacuum Congress and 3rd Int Conf Solid Surface"
    },
    {
      "key": "ref21",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0040-6090(75)90066-8"
    },
    {
      "key": "ref24",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0020-0891(86)90046-1"
    },
    {
      "key": "ref23",
      "first-page": "286",
      "author": "mott",
      "year": "1958",
      "journal-title": "The Theory of the Properties of Metals and Alloys"
    },
    {
      "key": "ref26",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0924-4247(93)80156-B"
    },
    {
      "key": "ref25",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/SENSOR.1991.148958"
    }
  ],
  "container-title": "Journal of Microelectromechanical Systems",
  "original-title": [],
  "link": [
    {
      "URL": "http://xplorestaging.ieee.org/ielx4/84/11954/00546409.pdf?arnumber=546409",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2021,
        11,
        29
      ]
    ],
    "date-time": "2021-11-29T20:18:09Z",
    "timestamp": 1638217089000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "http://ieeexplore.ieee.org/document/546409/"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1996
      ]
    ]
  },
  "references-count": 38,
  "journal-issue": {
    "issue": "4"
  },
  "URL": "http://dx.doi.org/10.1109/84.546409",
  "relation": {},
  "ISSN": [
    "1057-7157"
  ],
  "subject": [],
  "container-title-short": "J. Microelectromech. Syst.",
  "published": {
    "date-parts": [
      [
        1996
      ]
    ]
  }
}