DOI: 10.1109/84.485213. Development of the micromilling process for high-aspect-ratio microstructures

Development of the micromilling process for high-aspect-ratio microstructures

10.1109/84.485213

Crossref journal-article

Institute of Electrical and Electronics Engineers (IEEE)

Journal of Microelectromechanical Systems (263)

Bibliography

Friedrich, C. R., & Vasile, M. J. (1996). Development of the micromilling process for high-aspect-ratio microstructures. Journal of Microelectromechanical Systems, 5(1), 33â38.

Authors 2

C.R. Friedrich (first)
M.J. Vasile (additional)

References 10 Referenced 123

{'key': 'ref4', 'first-page': '30', 'article-title': 'micron-size milling tools: fabrication and use', 'author': 'vasile', 'year': '1995', 'journal-title': 'Proc 1995 ASPE Spring Topical Meet'} / Proc 1995 ASPE Spring Topical Meet / micron-size milling tools: fabrication and use by vasile (1995)
10.1116/1.587769
{'key': 'ref6', 'author': 'nagarajan', 'year': '1995', 'journal-title': 'Adhesion of polymethyl methacrylate or aluminum on high speed steel micromilling cutters'} / Adhesion of polymethyl methacrylate or aluminum on high speed steel micromilling cutters by nagarajan (1995)
{'key': 'ref10', 'author': 'qiu', 'year': '1995', 'journal-title': 'Numerical analysis of peripheral micro end milling cutters'} / Numerical analysis of peripheral micro end milling cutters by qiu (1995)
{'key': 'ref5', 'author': 'kikkeri', 'year': '1995', 'journal-title': 'Characterization of micromilling in polymethyl methacrylate'} / Characterization of micromilling in polymethyl methacrylate by kikkeri (1995)
{'key': 'ref8', 'article-title': 'the technique of micro-drilling', 'author': 'cupler', 'year': '1950', 'journal-title': 'The Tool Engineer'} / The Tool Engineer / the technique of micro-drilling by cupler (1950)
10.1016/S0007-8506(07)61936-2
10.1063/1.1144104
{'key': 'ref1', 'author': 'masuzawa', 'year': '1990', 'journal-title': 'A process for manufacturing very fine pin tools'} / A process for manufacturing very fine pin tools by masuzawa (1990)
{'key': 'ref9', 'first-page': '117', 'article-title': 'machinability of pmma in the near-cryogenic region', 'author': 'friedrich', 'year': '1994', 'journal-title': 'Proc 1994 ASPE Ann Conf'} / Proc 1994 ASPE Ann Conf / machinability of pmma in the near-cryogenic region by friedrich (1994)

Dates

Type	When
Created	22 years, 11 months ago (Aug. 24, 2002, 3:31 p.m.)
Deposited	3 years, 8 months ago (Nov. 29, 2021, 3:18 p.m.)
Indexed	1 hour, 10 minutes ago (Aug. 21, 2025, 6:01 a.m.)
Issued	29 years, 5 months ago (March 1, 1996)
Published	29 years, 5 months ago (March 1, 1996)
Published Print	29 years, 5 months ago (March 1, 1996)

Funders 0

None

BibTeX

@article{Friedrich_1996, title={Development of the micromilling process for high-aspect-ratio microstructures}, volume={5}, ISSN={1057-7157}, url={http://dx.doi.org/10.1109/84.485213}, DOI={10.1109/84.485213}, number={1}, journal={Journal of Microelectromechanical Systems}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Friedrich, C.R. and Vasile, M.J.}, year={1996}, month=mar, pages={33–38} }

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