DOI: 10.1109/77.257236. Intrinsic stress in DC sputtered niobium

Intrinsic stress in DC sputtered niobium

10.1109/77.257236

Crossref journal-article

Institute of Electrical and Electronics Engineers (IEEE)

IEEE Transactions on Appiled Superconductivity (263)

Bibliography

Booi, P. A. A., Livingston, C. A., & Benz, S. P. (1993). Intrinsic stress in DC sputtered niobium. IEEE Transactions on Appiled Superconductivity, 3(2), 3029â3031.

Authors 3

P.A.A. Booi (first)
C.A. Livingston (additional)
S.P. Benz (additional)

References 6 Referenced 13

10.1116/1.571462 / J Vac Sci Technol / Modification of niobium stress by low-energy ion bombardment during deposition by cuomo (1982)
10.1016/0040-6090(79)90549-2
{'key': 'ref6', 'first-page': '12', 'author': 'maissel', 'year': '1970', 'journal-title': 'Handbook of Thin Film Technology'} / Handbook of Thin Film Technology by maissel (1970)
10.1109/77.124922
10.1063/1.341051
10.1016/0040-6090(77)90276-0

Dates

Type	When
Created	22 years, 11 months ago (Aug. 24, 2002, 3:31 p.m.)
Deposited	3 years, 8 months ago (Nov. 29, 2021, 3:14 p.m.)
Indexed	3 weeks, 1 day ago (July 30, 2025, 8:22 p.m.)
Issued	32 years, 2 months ago (June 1, 1993)
Published	32 years, 2 months ago (June 1, 1993)
Published Print	32 years, 2 months ago (June 1, 1993)

Funders 0

None

BibTeX

@article{Booi_1993, title={Intrinsic stress in DC sputtered niobium}, volume={3}, ISSN={1051-8223}, url={http://dx.doi.org/10.1109/77.257236}, DOI={10.1109/77.257236}, number={2}, journal={IEEE Transactions on Appiled Superconductivity}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Booi, P.A.A. and Livingston, C.A. and Benz, S.P.}, year={1993}, month=jun, pages={3029–3031} }

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