DOI: 10.1109/77.233940. Josephson junction integrated circuit process with planarized PECVD SiO/sub 2/ dielectric

Josephson junction integrated circuit process with planarized PECVD SiO/sub 2/ dielectric

10.1109/77.233940

Crossref journal-article

Institute of Electrical and Electronics Engineers (IEEE)

IEEE Transactions on Applied Superconductivity (263)

Bibliography

Barfknecht, A. T., Ruby, R. C., Ko, H. L., & Lee, G. S. (1993). Josephson junction integrated circuit process with planarized PECVD SiO/sub 2/ dielectric. IEEE Transactions on Applied Superconductivity, 3(1), 2201â2203.

Authors 4

A.T. Barfknecht (first)
R.C. Ruby (additional)
H.L. Ko (additional)
G.S. Lee (additional)

References 12 Referenced 3

10.1109/20.133873
10.1116/1.569519
10.1109/66.17987
10.1063/1.106405
10.1063/1.341792
10.1109/55.762
{'key': 'ref12', 'author': 'hayakawa', 'year': '0', 'journal-title': 'private communication'} / private communication by hayakawa (0)
10.1063/1.107929
10.1007/978-3-642-77457-7_50
10.1063/1.339308
{'key': 'ref9', 'first-page': '178', 'article-title': 'Plasma Planarization', 'volume': '24', 'author': 'adams', 'year': '1981', 'journal-title': 'Solid State Technology'} / Solid State Technology / Plasma Planarization by adams (1981)
10.1109/TMAG.1985.1063744

Dates

Type	When
Created	22 years, 11 months ago (Aug. 24, 2002, 3:31 p.m.)
Deposited	3 years, 8 months ago (Nov. 29, 2021, 3:14 p.m.)
Indexed	4 months ago (April 21, 2025, 12:43 a.m.)
Issued	32 years, 5 months ago (March 1, 1993)
Published	32 years, 5 months ago (March 1, 1993)
Published Print	32 years, 5 months ago (March 1, 1993)

Funders 0

None

BibTeX

@article{Barfknecht_1993, title={Josephson junction integrated circuit process with planarized PECVD SiO/sub 2/ dielectric}, volume={3}, ISSN={1558-2515}, url={http://dx.doi.org/10.1109/77.233940}, DOI={10.1109/77.233940}, number={1}, journal={IEEE Transactions on Applied Superconductivity}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Barfknecht, A.T. and Ruby, R.C. and Ko, H.L. and Lee, G.S.}, year={1993}, month=mar, pages={2201–2203} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        4,
        21
      ]
    ],
    "date-time": "2025-04-21T04:43:19Z",
    "timestamp": 1745210599297
  },
  "reference-count": 12,
  "publisher": "Institute of Electrical and Electronics Engineers (IEEE)",
  "issue": "1",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1993,
            3,
            1
          ]
        ],
        "date-time": "1993-03-01T00:00:00Z",
        "timestamp": 730944000000
      },
      "content-version": "vor",
      "delay-in-days": 0,
      "URL": "https://ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.html"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1993,
        3
      ]
    ]
  },
  "DOI": "10.1109/77.233940",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        8,
        24
      ]
    ],
    "date-time": "2002-08-24T19:31:03Z",
    "timestamp": 1030217463000
  },
  "page": "2201-2203",
  "source": "Crossref",
  "is-referenced-by-count": 3,
  "title": "Josephson junction integrated circuit process with planarized PECVD SiO/sub 2/ dielectric",
  "prefix": "10.1109",
  "volume": "3",
  "author": [
    {
      "given": "A.T.",
      "family": "Barfknecht",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "R.C.",
      "family": "Ruby",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "H.L.",
      "family": "Ko",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "G.S.",
      "family": "Lee",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "263",
  "reference": [
    {
      "key": "ref4",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/20.133873"
    },
    {
      "key": "ref3",
      "doi-asserted-by": "publisher",
      "DOI": "10.1116/1.569519"
    },
    {
      "key": "ref10",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/66.17987"
    },
    {
      "key": "ref6",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.106405"
    },
    {
      "key": "ref11",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.341792"
    },
    {
      "key": "ref5",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/55.762"
    },
    {
      "key": "ref12",
      "author": "hayakawa",
      "year": "0",
      "journal-title": "private communication"
    },
    {
      "key": "ref8",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.107929"
    },
    {
      "key": "ref7",
      "doi-asserted-by": "publisher",
      "DOI": "10.1007/978-3-642-77457-7_50"
    },
    {
      "key": "ref2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.339308"
    },
    {
      "key": "ref9",
      "first-page": "178",
      "article-title": "Plasma Planarization",
      "volume": "24",
      "author": "adams",
      "year": "1981",
      "journal-title": "Solid State Technology"
    },
    {
      "key": "ref1",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/TMAG.1985.1063744"
    }
  ],
  "container-title": "IEEE Transactions on Applied Superconductivity",
  "original-title": [],
  "link": [
    {
      "URL": "http://xplorestaging.ieee.org/ielx4/77/6032/00233940.pdf?arnumber=233940",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2021,
        11,
        29
      ]
    ],
    "date-time": "2021-11-29T20:14:39Z",
    "timestamp": 1638216879000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "http://ieeexplore.ieee.org/document/233940/"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1993,
        3
      ]
    ]
  },
  "references-count": 12,
  "journal-issue": {
    "issue": "1"
  },
  "URL": "http://dx.doi.org/10.1109/77.233940",
  "relation": {},
  "ISSN": [
    "1051-8223",
    "1558-2515"
  ],
  "subject": [],
  "container-title-short": "IEEE Trans. Appl. Supercond.",
  "published": {
    "date-parts": [
      [
        1993,
        3
      ]
    ]
  }
}