DOI: 10.1109/58.726440. PZT thin film actuated elastic fin micromotor

PZT thin film actuated elastic fin micromotor

10.1109/58.726440

Crossref journal-article

Institute of Electrical and Electronics Engineers (IEEE)

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control (263)

Bibliography

Dubois, M.-A., & Muralt, P. (1998). PZT thin film actuated elastic fin micromotor. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 45(5), 1169â1177.

Authors 2

M.-A. Dubois (first)
P. Muralt (additional)

References 20 Referenced 83

{'key': 'ref10', 'article-title': 'Improved torque of PZT thin film actuated elastic fin micromotor', 'author': 'dubois', 'year': '1996', 'journal-title': 'Proc 5th Int Conf New Actuators'} / Proc 5th Int Conf New Actuators / Improved torque of PZT thin film actuated elastic fin micromotor by dubois (1996)
10.1557/JMR.1994.2540
10.1063/1.111185
{'key': 'ref13', 'year': '0'} (0)
10.1016/0924-4247(96)01139-9 / Sens Actuators A / Piezoelectric actuation of PZT thin film diaphragms at static and resonant conditions by muralt (1996)
{'key': 'ref15', 'author': 'szabo', 'year': '1956', 'journal-title': 'H�here Technische Mechanik'} / H�here Technische Mechanik by szabo (1956)
{'key': 'ref16', 'author': 'timoshenko', 'year': '1959', 'journal-title': 'Theory of Plates and Shells'} / Theory of Plates and Shells by timoshenko (1959)
{'key': 'ref17', 'first-page': '12', 'year': '1995', 'journal-title': 'Handbook of Chemistry and Physics'} / Handbook of Chemistry and Physics (1995)
{'key': 'ref18', 'volume': '3', 'author': 'mitsui', 'year': '1969', 'journal-title': 'Ferroelectric and Antiferroelectric Substances'} / Ferroelectric and Antiferroelectric Substances by mitsui (1969)
10.1088/0960-1317/3/1/006 / J Micromech Microeng / Similarities between piezoelectric, thermal and other internal means of excitation vibrations by s�derquist (1993)
10.1109/84.128055
10.1016/0924-4247(92)87005-2 / Sens Actuators A / Operational characteristics of microfabricated electric motors by tavrow (1992)
10.1143/JJAP.30.2289
10.1109/MEMSYS.1991.114779
10.1109/MEMSYS.1993.296966
10.1109/ULTSYM.1992.275843
10.1016/0924-4247(90)85033-Z / Sens Actuators / A study of three microfabricated variable-capacitance motors by mehregany (1990)
10.1016/0250-6874(89)87100-8
10.1016/0924-4247(95)00994-9 / Sens Actuators A / Fabrication and characterization of PZT thin-film vibrators for micromotors by muralt (1995)
10.1080/10584589708013004

Dates

Type	When
Created	22 years, 11 months ago (Aug. 24, 2002, 2:46 p.m.)
Deposited	3 years, 8 months ago (Nov. 29, 2021, 3:12 p.m.)
Indexed	2 weeks, 2 days ago (Aug. 5, 2025, 8:41 a.m.)
Issued	26 years, 11 months ago (Sept. 1, 1998)
Published	26 years, 11 months ago (Sept. 1, 1998)
Published Print	26 years, 11 months ago (Sept. 1, 1998)

Funders 0

None

BibTeX

@article{Dubois_1998, title={PZT thin film actuated elastic fin micromotor}, volume={45}, ISSN={0885-3010}, url={http://dx.doi.org/10.1109/58.726440}, DOI={10.1109/58.726440}, number={5}, journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Dubois, M.-A. and Muralt, P.}, year={1998}, month=sep, pages={1169–1177} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        5
      ]
    ],
    "date-time": "2025-08-05T12:41:22Z",
    "timestamp": 1754397682968
  },
  "reference-count": 20,
  "publisher": "Institute of Electrical and Electronics Engineers (IEEE)",
  "issue": "5",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1998,
            9,
            1
          ]
        ],
        "date-time": "1998-09-01T00:00:00Z",
        "timestamp": 904608000000
      },
      "content-version": "vor",
      "delay-in-days": 0,
      "URL": "https://ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.html"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1998,
        9
      ]
    ]
  },
  "DOI": "10.1109/58.726440",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        8,
        24
      ]
    ],
    "date-time": "2002-08-24T18:46:34Z",
    "timestamp": 1030214794000
  },
  "page": "1169-1177",
  "source": "Crossref",
  "is-referenced-by-count": 83,
  "title": "PZT thin film actuated elastic fin micromotor",
  "prefix": "10.1109",
  "volume": "45",
  "author": [
    {
      "given": "M.-A.",
      "family": "Dubois",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "P.",
      "family": "Muralt",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "263",
  "reference": [
    {
      "key": "ref10",
      "article-title": "Improved torque of PZT thin film actuated elastic fin micromotor",
      "author": "dubois",
      "year": "1996",
      "journal-title": "Proc 5th Int Conf New Actuators"
    },
    {
      "key": "ref11",
      "doi-asserted-by": "publisher",
      "DOI": "10.1557/JMR.1994.2540"
    },
    {
      "key": "ref12",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.111185"
    },
    {
      "key": "ref13",
      "year": "0"
    },
    {
      "key": "ref14",
      "doi-asserted-by": "crossref",
      "first-page": "397",
      "DOI": "10.1016/0924-4247(96)01139-9",
      "article-title": "Piezoelectric actuation of PZT thin film diaphragms at static and resonant conditions",
      "volume": "53",
      "author": "muralt",
      "year": "1996",
      "journal-title": "Sens Actuators A"
    },
    {
      "key": "ref15",
      "author": "szabo",
      "year": "1956",
      "journal-title": "H\ufffdhere Technische Mechanik"
    },
    {
      "key": "ref16",
      "author": "timoshenko",
      "year": "1959",
      "journal-title": "Theory of Plates and Shells"
    },
    {
      "key": "ref17",
      "first-page": "12",
      "year": "1995",
      "journal-title": "Handbook of Chemistry and Physics"
    },
    {
      "key": "ref18",
      "volume": "3",
      "author": "mitsui",
      "year": "1969",
      "journal-title": "Ferroelectric and Antiferroelectric Substances"
    },
    {
      "key": "ref19",
      "doi-asserted-by": "crossref",
      "first-page": "24",
      "DOI": "10.1088/0960-1317/3/1/006",
      "article-title": "Similarities between piezoelectric, thermal and other internal means of excitation vibrations",
      "volume": "3",
      "author": "s\ufffdderquist",
      "year": "1993",
      "journal-title": "J Micromech Microeng"
    },
    {
      "key": "ref4",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/84.128055"
    },
    {
      "key": "ref3",
      "doi-asserted-by": "crossref",
      "first-page": "33",
      "DOI": "10.1016/0924-4247(92)87005-2",
      "article-title": "Operational characteristics of microfabricated electric motors",
      "volume": "35",
      "author": "tavrow",
      "year": "1992",
      "journal-title": "Sens Actuators A"
    },
    {
      "key": "ref6",
      "doi-asserted-by": "publisher",
      "DOI": "10.1143/JJAP.30.2289"
    },
    {
      "key": "ref5",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/MEMSYS.1991.114779"
    },
    {
      "key": "ref8",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/MEMSYS.1993.296966"
    },
    {
      "key": "ref7",
      "doi-asserted-by": "publisher",
      "DOI": "10.1109/ULTSYM.1992.275843"
    },
    {
      "key": "ref2",
      "doi-asserted-by": "crossref",
      "first-page": "173",
      "DOI": "10.1016/0924-4247(90)85033-Z",
      "article-title": "A study of three microfabricated variable-capacitance motors",
      "volume": "a21 a23",
      "author": "mehregany",
      "year": "1990",
      "journal-title": "Sens Actuators"
    },
    {
      "key": "ref1",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0250-6874(89)87100-8"
    },
    {
      "key": "ref9",
      "doi-asserted-by": "crossref",
      "first-page": "157",
      "DOI": "10.1016/0924-4247(95)00994-9",
      "article-title": "Fabrication and characterization of PZT thin-film vibrators for micromotors",
      "volume": "48",
      "author": "muralt",
      "year": "1995",
      "journal-title": "Sens Actuators A"
    },
    {
      "key": "ref20",
      "doi-asserted-by": "publisher",
      "DOI": "10.1080/10584589708013004"
    }
  ],
  "container-title": "IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control",
  "original-title": [],
  "link": [
    {
      "URL": "http://xplorestaging.ieee.org/ielx4/58/15673/00726440.pdf?arnumber=726440",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2021,
        11,
        29
      ]
    ],
    "date-time": "2021-11-29T20:12:01Z",
    "timestamp": 1638216721000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "http://ieeexplore.ieee.org/document/726440/"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1998,
        9
      ]
    ]
  },
  "references-count": 20,
  "journal-issue": {
    "issue": "5"
  },
  "URL": "http://dx.doi.org/10.1109/58.726440",
  "relation": {},
  "ISSN": [
    "0885-3010"
  ],
  "subject": [],
  "container-title-short": "IEEE Trans. Ultrason., Ferroelect., Freq. Contr.",
  "published": {
    "date-parts": [
      [
        1998,
        9
      ]
    ]
  }
}