DOI: 10.1109/41.464604. The LIGA technique and its potential for microsystems-a survey

The LIGA technique and its potential for microsystems-a survey

10.1109/41.464604

Crossref journal-article

Institute of Electrical and Electronics Engineers (IEEE)

IEEE Transactions on Industrial Electronics (263)

Bibliography

Bacher, W., Menz, W., & Mohr, J. (1995). The LIGA technique and its potential for microsystems-a survey. IEEE Transactions on Industrial Electronics, 42(5), 431â441.

Authors 3

W. Bacher (first)
W. Menz (additional)
J. Mohr (additional)

References 25 Referenced 85

{'key': 'ref10', 'author': 'michel', 'year': '1993', 'journal-title': 'Abformung von Mikrostrukturen auf prozessierten Wafern'} / Abformung von Mikrostrukturen auf prozessierten Wafern by michel (1993)
{'key': 'ref11', 'article-title': 'Microactuators in LIGA technique', 'author': 'menz', 'year': '1991', 'journal-title': 'Proc 3rd Int ISEM Symp Applicat Electromagn Forces'} / Proc 3rd Int ISEM Symp Applicat Electromagn Forces / Microactuators in LIGA technique by menz (1991)
10.1109/MEMSYS.1992.187718
{'key': 'ref13', 'author': 'g�tten', 'year': '1993', 'journal-title': 'Grundlagen und Anwendungsm�glichkeiten der LIGA-Technik in der Mikrooptik'} / Grundlagen und Anwendungsm�glichkeiten der LIGA-Technik in der Mikrooptik by g�tten (1993)
{'key': 'ref14', 'author': 'g�ttert', 'year': '1992', 'journal-title': 'Teubner Taschenb�cher der Physik'} / Teubner Taschenb�cher der Physik by g�ttert (1992)
10.1364/OL.6.000639
10.1179/030801893789766771
10.1179/030801893789766834
{'key': 'ref18', 'first-page': '75', 'article-title': 'Fabrication of electrostatic microdevices by the LIGA technique', 'volume': '3', 'author': 'burbaum', 'year': '1991', 'journal-title': 'Sensors and Materials'} / Sensors and Materials / Fabrication of electrostatic microdevices by the LIGA technique by burbaum (1991)
10.1016/0924-4247(94)80026-X
{'key': 'ref4', 'first-page': '76', 'article-title': 'Herstellung von Rontgenmasken f�r das LIGA-Verfahren', 'volume': '23', 'author': 'bacher', 'year': '1991', 'journal-title': 'Nachrichtentechnik'} / Nachrichtentechnik / Herstellung von Rontgenmasken f�r das LIGA-Verfahren by bacher (1991)
{'key': 'ref3', 'first-page': '133', 'article-title': 'Masken f�r die R�ntgentiefenlithographie', 'volume': '870', 'author': 'schomburg', 'year': '1990', 'journal-title': 'VDI Berichte'} / VDI Berichte / Masken f�r die R�ntgentiefenlithographie by schomburg (1990)
10.1016/0167-9317(93)90071-C
10.1016/0167-9317(91)90103-K
{'key': 'ref8', 'author': 'harsch', 'year': '1988', 'journal-title': 'Untersuchungen zur Herstellung von Mikrostrukturen groBer Strukturhohe durch Galvanoformung in Nickelsulfamatelektrolyten'} / Untersuchungen zur Herstellung von Mikrostrukturen groBer Strukturhohe durch Galvanoformung in Nickelsulfamatelektrolyten by harsch (1988)
10.1116/1.584039
{'key': 'ref2', 'author': 'harmening', 'year': '1990', 'journal-title': 'Untersuchung zur Abforraung von galvanisierbaren Mikrostrukturen mit groBer Strukturh�he aus elektrisch leitf�higen und isolierenden Kunststoffen'} / Untersuchung zur Abforraung von galvanisierbaren Mikrostrukturen mit groBer Strukturh�he aus elektrisch leitf�higen und isolierenden Kunststoffen by harmening (1990)
{'key': 'ref9', 'first-page': '89', 'article-title': 'LIGA microstructures from a NiFe alloy: Preparation by electroforming and their magnetic properties', 'volume': '94?6', 'author': 'thommes', 'year': '1993', 'journal-title': 'Proc 1985 Meeting Amer Electrochem Soc'} / Proc 1985 Meeting Amer Electrochem Soc / LIGA microstructures from a NiFe alloy: Preparation by electroforming and their magnetic properties by thommes (1993)
10.1016/0167-9317(86)90004-3
10.1007/978-3-642-45678-7_74
{'key': 'ref22', 'first-page': '71', 'author': 'mohr', 'year': '1993', 'journal-title': 'Mikrooptischer Schalter als bypass-element in optischen Datennetzwerken'} / Mikrooptischer Schalter als bypass-element in optischen Datennetzwerken by mohr (1993)
{'key': 'ref21', 'first-page': '83', 'article-title': 'Electrostatically driven linear stepping motor in LIGA technique', 'author': 'kalb', 'year': '1994', 'journal-title': "Proc Actuator '94"} / Proc Actuator '94 / Electrostatically driven linear stepping motor in LIGA technique by kalb (1994)
{'key': 'ref24', 'first-page': '86', 'article-title': 'Micromembrane pump manufactured by molding', 'author': 'b�stgens', 'year': '1994', 'journal-title': "Proc Actuator'94"} / Proc Actuator'94 / Micromembrane pump manufactured by molding by b�stgens (1994)
10.1109/MEMSYS.1993.296964
{'key': 'ref25', 'first-page': '41', 'article-title': 'Mikrostrukturprodukte aus Metallen, Kunststoffen und Keramik', 'volume': '1', 'author': 'wechsung', 'year': '1993', 'journal-title': 'Sensor Rep'} / Sensor Rep / Mikrostrukturprodukte aus Metallen, Kunststoffen und Keramik by wechsung (1993)

Dates

Type	When
Created	22 years, 11 months ago (Aug. 24, 2002, 1:57 p.m.)
Deposited	3 years, 8 months ago (Nov. 29, 2021, 3:07 p.m.)
Indexed	1 month, 3 weeks ago (June 24, 2025, 6:48 a.m.)
Issued	30 years, 7 months ago (Jan. 1, 1995)
Published	30 years, 7 months ago (Jan. 1, 1995)
Published Print	30 years, 7 months ago (Jan. 1, 1995)

Funders 0

None

BibTeX

@article{Bacher_1995, title={The LIGA technique and its potential for microsystems-a survey}, volume={42}, ISSN={0278-0046}, url={http://dx.doi.org/10.1109/41.464604}, DOI={10.1109/41.464604}, number={5}, journal={IEEE Transactions on Industrial Electronics}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Bacher, W. and Menz, W. and Mohr, J.}, year={1995}, pages={431–441} }

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