DOI: 10.1109/4.104194. Microfabricated thermal absolute-pressure sensor with on-chip digital front-end processor

Microfabricated thermal absolute-pressure sensor with on-chip digital front-end processor

10.1109/4.104194

Crossref journal-article

Institute of Electrical and Electronics Engineers (IEEE)

IEEE Journal of Solid-State Circuits (263)

Bibliography

Mastrangelo, C. H., & Muller, R. S. (1991). Microfabricated thermal absolute-pressure sensor with on-chip digital front-end processor. IEEE Journal of Solid-State Circuits, 26(12), 1998â2007.

Authors 2

C.H. Mastrangelo (first)
R.S. Muller (additional)

References 32 Referenced 102

10.1023/A:1004767910762
{'key': 'ref31', 'author': 'wolf', 'year': '1990', 'journal-title': 'Silicon Processing for the VLSI Era Vol 2 Process Integration'} / Silicon Processing for the VLSI Era Vol 2 Process Integration by wolf (1990)
10.1016/0250-6874(89)87112-4
10.1149/1.2119965
{'key': 'ref11', 'author': 'mastrangelo', 'year': '1991', 'journal-title': 'Thermal applications of microbridges'} / Thermal applications of microbridges by mastrangelo (1991)
10.1109/ISSCC.1991.689121
{'key': 'ref13', 'author': "o'hanlon", 'year': '1980', 'journal-title': "A User's Guide to Vacuum Technology"} / A User's Guide to Vacuum Technology by o'hanlon (1980)
{'key': 'ref14', 'author': 'leek', 'year': '1964', 'journal-title': 'Pressure Measurement in Vacuum Systems'} / Pressure Measurement in Vacuum Systems by leek (1964)
{'key': 'ref15', 'first-page': '364', 'article-title': 'On the conduction of heat in rarefied gases and its manometric application', 'volume': 'a2', 'author': 'ubisch', 'year': '1948', 'journal-title': 'Appl Sci Res'} / Appl Sci Res / On the conduction of heat in rarefied gases and its manometric application by ubisch (1948)
10.1098/rspa.1934.0018
{'key': 'ref17', 'author': 'bird', 'year': '1976', 'journal-title': 'Molecular Gas Dynamics'} / Molecular Gas Dynamics by bird (1976)
{'key': 'ref18', 'author': 'touloukian', 'year': '1981', 'journal-title': 'Thermal Accommodation and Adsorption Coefficients of Gases'} / Thermal Accommodation and Adsorption Coefficients of Gases by touloukian (1981)
10.1109/SOLSEN.1988.26449
10.1109/SENSOR.1991.148848 / Proc Transducers '91 / Fabrication and performance of a fully integrated ?-pirani pressure gauge with digital readout by mastrangelo (1991)
10.1016/0250-6874(85)80023-8
10.1109/JSSC.1980.1051498
10.1109/T-ED.1979.19789 / IEEE Transactions on Electron Devices / sensor development in the microcomputer age by wolber (1979)
10.1109/SOLSEN.1988.26437
10.1016/0924-4247(90)87046-L
10.1109/JSSC.1986.1052646
10.1007/978-1-4613-2263-4_4
10.1088/0022-3735/20/9/003
10.1116/1.584158
10.1088/0022-3735/18/9/005
10.1109/PROC.1982.12331
10.1116/1.571854
10.1109/JSSC.1979.1051140
10.1109/JSSC.1978.1052051
10.1109/TIM.1973.4314139
10.1109/JSSC.1983.1051899
10.1109/SENSOR.1991.148914
10.1063/1.1720798

Dates

Type	When
Created	22 years, 11 months ago (Aug. 24, 2002, 4:26 p.m.)
Deposited	3 years, 8 months ago (Nov. 29, 2021, 3:06 p.m.)
Indexed	2 weeks, 4 days ago (Aug. 3, 2025, 6:50 p.m.)
Issued	34 years, 7 months ago (Jan. 1, 1991)
Published	34 years, 7 months ago (Jan. 1, 1991)
Published Print	34 years, 7 months ago (Jan. 1, 1991)

Funders 0

None

BibTeX

@article{Mastrangelo_1991, title={Microfabricated thermal absolute-pressure sensor with on-chip digital front-end processor}, volume={26}, ISSN={0018-9200}, url={http://dx.doi.org/10.1109/4.104194}, DOI={10.1109/4.104194}, number={12}, journal={IEEE Journal of Solid-State Circuits}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Mastrangelo, C.H. and Muller, R.S.}, year={1991}, pages={1998–2007} }

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