DOI: 10.1109/20.104602. Fabrication and basic characteristics of dry-etched micro inductors

Fabrication and basic characteristics of dry-etched micro inductors

10.1109/20.104602

Crossref journal-article

Institute of Electrical and Electronics Engineers (IEEE)

IEEE Transactions on Magnetics (263)

Bibliography

Yamaguchi, M., Matsumoto, M., Ohzeki, H., & Arai, K. I. (1990). Fabrication and basic characteristics of dry-etched micro inductors. IEEE Transactions on Magnetics, 26(5), 2014â2016.

Authors 4

M. Yamaguchi (first)
M. Matsumoto (additional)
H. Ohzeki (additional)
K.I. Arai (additional)

References 3 Referenced 35

{'key': 'ref3', 'author': 'terman', 'year': '1943', 'journal-title': "Radio Engineers' Handbook"} / Radio Engineers' Handbook by terman (1943)
10.1109/20.42501
10.1109/TMAG.1984.1063271

Dates

Type	When
Created	22 years, 11 months ago (Aug. 24, 2002, 6:26 p.m.)
Deposited	3 years, 8 months ago (Nov. 29, 2021, 3:05 p.m.)
Indexed	1 year ago (Aug. 1, 2024, 9:51 a.m.)
Issued	35 years, 7 months ago (Jan. 1, 1990)
Published	35 years, 7 months ago (Jan. 1, 1990)
Published Print	35 years, 7 months ago (Jan. 1, 1990)

Funders 0

None

BibTeX

@article{Yamaguchi_1990, title={Fabrication and basic characteristics of dry-etched micro inductors}, volume={26}, ISSN={0018-9464}, url={http://dx.doi.org/10.1109/20.104602}, DOI={10.1109/20.104602}, number={5}, journal={IEEE Transactions on Magnetics}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Yamaguchi, M. and Matsumoto, M. and Ohzeki, H. and Arai, K.I.}, year={1990}, pages={2014–2016} }

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