DOI: 10.1109/16.2528. Thermally excited silicon microactuators

Thermally excited silicon microactuators

10.1109/16.2528

Crossref journal-article

Institute of Electrical and Electronics Engineers (IEEE)

IEEE Transactions on Electron Devices (263)

Bibliography

Riethmuller, W., & Benecke, W. (1988). Thermally excited silicon microactuators. IEEE Transactions on Electron Devices, 35(6), 758â763.

Authors 2

W. Riethmuller (first)
W. Benecke (additional)

References 20 Referenced 235

{'key': 'ref10', 'first-page': '857', 'article-title': 'Silicon electrostatic motors', 'author': 'trimmer', 'year': '1987', 'journal-title': 'Proc Int Conf Solid-State Sensors Actuators Transducers 87'} / Proc Int Conf Solid-State Sensors Actuators Transducers 87 / Silicon electrostatic motors by trimmer (1987)
{'key': 'ref11', 'first-page': '93', 'article-title': 'Pressure dependence of resonant diaphragm pressure sensor', 'author': 'smits', 'year': '1985', 'journal-title': 'Int Conf Solid State Sensors Actuators Transducers 85'} / Int Conf Solid State Sensors Actuators Transducers 85 / Pressure dependence of resonant diaphragm pressure sensor by smits (1985)
{'key': 'ref12', 'article-title': 'Thin-membrane lamb-mode acoustic oscillators for chemical detection', 'author': 'zellers', 'year': '1986', 'journal-title': 'IEEE Solid-State Sensors Workshop'} / IEEE Solid-State Sensors Workshop / Thin-membrane lamb-mode acoustic oscillators for chemical detection by zellers (1986)
10.1364/JOSA.11.000233
{'key': 'ref14', 'author': 'timoshenko', 'year': '1947', 'journal-title': 'Strength of materials'} / Strength of materials by timoshenko (1947)
{'key': 'ref15', 'author': 'fampel', 'year': '1981', 'journal-title': 'Engineering Design'} / Engineering Design by fampel (1981)
10.1016/0250-6874(83)85057-4
{'key': 'ref17', 'first-page': '120', 'article-title': 'The mechanism of anisotropic silicon etching and its relevance for micromachining', 'author': 'seidel', 'year': '1987', 'journal-title': 'Proc Int Conf Solid-State Sensors Actuators Transducers 87'} / Proc Int Conf Solid-State Sensors Actuators Transducers 87 / The mechanism of anisotropic silicon etching and its relevance for micromachining by seidel (1987)
{'key': 'ref18', 'first-page': '473', 'article-title': 'Electrochemically controlled thinning of silicon', 'volume': '50', 'author': 'waggener', 'year': '1979', 'journal-title': 'Bell Syst Tech J'} / Bell Syst Tech J / Electrochemically controlled thinning of silicon by waggener (1979)
{'key': 'ref19', 'first-page': '287', 'article-title': 'A silicon diaphragm formation for pressure sensor by anodic oxidation etch-stop', 'author': 'hirata', 'year': '1985', 'journal-title': 'Int Conf Solid State Sensors Actuators Transducers 85'} / Int Conf Solid State Sensors Actuators Transducers 85 / A silicon diaphragm formation for pressure sensor by anodic oxidation etch-stop by hirata (1985)
10.1063/1.89761
10.1109/IEDM.1985.190876 / 1985 International Electron Devices Meeting / silicon sensor technologies by petersen (1985)
{'key': 'ref6', 'first-page': '212', 'article-title': 'Fiberoptic switching and multiplexing with a micromechanical scanning mirror', 'author': 'gustafsson', 'year': '1987', 'journal-title': 'Proc Int Conf Solid-State Sensors Actuators Transducers 87'} / Proc Int Conf Solid-State Sensors Actuators Transducers 87 / Fiberoptic switching and multiplexing with a micromechanical scanning mirror by gustafsson (1987)
10.1147/rd.245.0631
10.1147/rd.234.0376
10.1109/T-ED.1983.21163 / IEEE Transactions on Electron Devices / 128 × 128 deformable mirror device by hornbeck (1983)
{'key': 'ref2', 'first-page': '56', 'article-title': 'Integrating sensors and electronics?New challenges for silicon', 'author': 'muller', 'year': '1985', 'journal-title': '1984 IEEE Electrotechnol Rev'} / 1984 IEEE Electrotechnol Rev / Integrating sensors and electronics?New challenges for silicon by muller (1985)
10.1109/PROC.1982.12331
10.1016/0250-6874(87)80016-1
{'key': 'ref20', 'first-page': '116', 'article-title': 'A novel four elcctrode electrochemical etch-stop method for silicon membrane formation', 'author': 'klocck', 'year': '1987', 'journal-title': 'Proc Int Conf Solid-State Sensors Actuators Transducers 87'} / Proc Int Conf Solid-State Sensors Actuators Transducers 87 / A novel four elcctrode electrochemical etch-stop method for silicon membrane formation by klocck (1987)

Dates

Type	When
Created	22 years, 11 months ago (Aug. 24, 2002, 4:40 p.m.)
Deposited	3 years, 8 months ago (Nov. 29, 2021, 2:09 p.m.)
Indexed	2 months ago (June 19, 2025, 5:03 a.m.)
Issued	37 years, 2 months ago (June 1, 1988)
Published	37 years, 2 months ago (June 1, 1988)
Published Print	37 years, 2 months ago (June 1, 1988)

Funders 0

None

BibTeX

@article{Riethmuller_1988, title={Thermally excited silicon microactuators}, volume={35}, ISSN={1557-9646}, url={http://dx.doi.org/10.1109/16.2528}, DOI={10.1109/16.2528}, number={6}, journal={IEEE Transactions on Electron Devices}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Riethmuller, W. and Benecke, W.}, year={1988}, month=jun, pages={758–763} }

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