DOI: 10.1103/physreva.63.063407. Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns

Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns

10.1103/physreva.63.063407

Crossref journal-article

American Physical Society (APS)

Physical Review A (16)

Bibliography

Kok, P., Boto, A. N., Abrams, D. S., Williams, C. P., Braunstein, S. L., & Dowling, J. P. (2001). Quantum-interferometric optical lithography:âTowards arbitrary two-dimensional patterns. Physical Review A, 63(6).

Authors 6

Pieter Kok (first)
Agedi N. Boto (additional)
Daniel S. Abrams (additional)
Colin P. Williams (additional)
Samuel L. Braunstein (additional)
Jonathan P. Dowling (additional)

References 11 Referenced 107

10.1016/S0167-9317(98)00032-X / Microelectron. Eng. by S. R. J. Brück (1998)
10.1364/OPN.7.4.000029 / Opt. Photonics News by C. A. Mack (1996)
10.1364/OPN.11.2.000036 / Opt. Photonics News by M. Mansuripur (2000)
10.1117/1.602092 / Opt. Eng. by E. Yablonovich (1999)
10.1103/PhysRevLett.85.2733 / Phys. Rev. Lett. by A. N. Boto (2000)
10.1080/14786447908639684 / Philos. Mag. by Lord Rayleigh (1879)
10.1002/andp.19314010303 / Ann. Phys. (N.Y.) by M. Göppert-Mayer (1931)
10.1103/PhysRevA.41.5088 / Phys. Rev. A by J. Javanainen (1990)
10.1103/PhysRevA.57.3972 / Phys. Rev. A by J. Perina, Jr. (1998)
10.1023/A:1008202821328 / J. Global Optim. by K. Price (1997)
10.1103/PhysRevA.63.033812 / Phys. Rev. A by P. Kok (2001)

Dates

Type	When
Created	23 years ago (July 26, 2002, 7:38 p.m.)
Deposited	7 years, 8 months ago (Dec. 9, 2017, 9:36 p.m.)
Indexed	1 month, 1 week ago (July 11, 2025, 6:35 a.m.)
Issued	24 years, 3 months ago (May 9, 2001)
Published	24 years, 3 months ago (May 9, 2001)
Published Online	24 years, 3 months ago (May 9, 2001)

Funders 0

None

BibTeX

@article{Kok_2001, title={Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns}, volume={63}, ISSN={1094-1622}, url={http://dx.doi.org/10.1103/physreva.63.063407}, DOI={10.1103/physreva.63.063407}, number={6}, journal={Physical Review A}, publisher={American Physical Society (APS)}, author={Kok, Pieter and Boto, Agedi N. and Abrams, Daniel S. and Williams, Colin P. and Braunstein, Samuel L. and Dowling, Jonathan P.}, year={2001}, month=may }

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