DOI: 10.1103/physrev.184.383. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

10.1103/physrev.184.383

Crossref journal-article

American Physical Society (APS)

Physical Review (16)

Bibliography

Sigmund, P. (1969). Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets. Physical Review, 184(2), 383â416.

Authors 1

Peter Sigmund (first)

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Dates

Type	When
Created	23 years ago (July 27, 2002, 12:24 a.m.)
Deposited	1 year, 7 months ago (Jan. 5, 2024, 7:12 a.m.)
Indexed	23 hours, 2 minutes ago (Aug. 22, 2025, 12:45 a.m.)
Issued	56 years ago (Aug. 10, 1969)
Published	56 years ago (Aug. 10, 1969)
Published Online	56 years ago (Aug. 10, 1969)

Funders 0

None

BibTeX

@article{Sigmund_1969, title={Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets}, volume={184}, ISSN={0031-899X}, url={http://dx.doi.org/10.1103/physrev.184.383}, DOI={10.1103/physrev.184.383}, number={2}, journal={Physical Review}, publisher={American Physical Society (APS)}, author={Sigmund, Peter}, year={1969}, month=aug, pages={383–416} }

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  ],
  "subject": [],
  "container-title-short": "Phys. Rev.",
  "published": {
    "date-parts": [
      [
        1969,
        8,
        10
      ]
    ]
  }
}