DOI: 10.1103/physrev.102.1473. Theory of the Sputtering Process

Theory of the Sputtering Process

10.1103/physrev.102.1473

Crossref journal-article

American Physical Society (APS)

Physical Review (16)

Bibliography

Harrison, D. E. (1956). Theory of the Sputtering Process. Physical Review, 102(6), 1473â1480.

Authors 1

Don E. Harrison (first)

References 13 Referenced 45

{'key': 'PhysRev.102.1473Cc1R1', 'first-page': '87', 'volume': '142', 'author': 'W. R. Grove', 'year': '1852', 'journal-title': 'Trans. Roy. Soc. (London)'} / Trans. Roy. Soc. (London) by W. R. Grove (1852)
{'key': 'PhysRev.102.1473Cc2R1', 'volume-title': 'The Electrochemistry of Gases and other Dielectrics', 'author': 'G. Glockler', 'year': '1939'} / The Electrochemistry of Gases and other Dielectrics by G. Glockler (1939)
{'key': 'PhysRev.102.1473Cc3R1', 'volume-title': 'Electronic and Ionic Impact Phenomena', 'author': 'H. Massey', 'year': '1952'} / Electronic and Ionic Impact Phenomena by H. Massey (1952)
10.1103/PhysRev.22.148 / Phys. Rev. by K. Kingdon (1923)
10.1103/PhysRev.65.319 / Phys. Rev. by C. Townes (1934)
10.1103/RevModPhys.19.185 / Revs. Modern Phys. by R. Marshak (1947)
10.1103/PhysRev.69.423 / Phys. Rev. by G. Placzek (1946)
{'key': 'PhysRev.102.1473Cc8R1', 'volume-title': 'The Laplace Transform', 'author': 'D. V. Widder', 'year': '1946'} / The Laplace Transform by D. V. Widder (1946)
{'key': 'PhysRev.102.1473Cc9R1', 'volume-title': 'Laplace Transformation', 'author': 'W. Thomson', 'year': '1950'} / Laplace Transformation by W. Thomson (1950)
10.1103/PhysRev.87.160 / Phys. Rev. by F. Keywell (1952)
10.1103/PhysRev.97.1611 / Phys. Rev. by F. Keywell (1955)
10.1007/BF01337787 / Z. Physik. by H. Fetz (1942)
10.1103/PhysRev.93.633.2 / Phys. Rev. by G. Wehner (1954)

Dates

Type	When
Created	23 years ago (July 26, 2002, 8:48 p.m.)
Deposited	8 years, 2 months ago (June 15, 2017, 1:49 a.m.)
Indexed	1 year, 1 month ago (July 1, 2024, 10:16 p.m.)
Issued	69 years, 2 months ago (June 15, 1956)
Published	69 years, 2 months ago (June 15, 1956)
Published Online	69 years, 2 months ago (June 15, 1956)

Funders 0

None

BibTeX

@article{Harrison_1956, title={Theory of the Sputtering Process}, volume={102}, ISSN={0031-899X}, url={http://dx.doi.org/10.1103/physrev.102.1473}, DOI={10.1103/physrev.102.1473}, number={6}, journal={Physical Review}, publisher={American Physical Society (APS)}, author={Harrison, Don E.}, year={1956}, month=jun, pages={1473–1480} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        7,
        2
      ]
    ],
    "date-time": "2024-07-02T02:16:59Z",
    "timestamp": 1719886619574
  },
  "reference-count": 13,
  "publisher": "American Physical Society (APS)",
  "issue": "6",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1956,
            6,
            15
          ]
        ],
        "date-time": "1956-06-15T00:00:00Z",
        "timestamp": -427507200000
      },
      "content-version": "vor",
      "delay-in-days": 0,
      "URL": "http://link.aps.org/licenses/aps-default-license"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "DOI": "10.1103/physrev.102.1473",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        27
      ]
    ],
    "date-time": "2002-07-27T00:48:10Z",
    "timestamp": 1027730890000
  },
  "page": "1473-1480",
  "source": "Crossref",
  "is-referenced-by-count": 45,
  "title": "Theory of the Sputtering Process",
  "prefix": "10.1103",
  "volume": "102",
  "author": [
    {
      "given": "Don E.",
      "family": "Harrison",
      "sequence": "first",
      "affiliation": []
    }
  ],
  "member": "16",
  "published-online": {
    "date-parts": [
      [
        1956,
        6,
        15
      ]
    ]
  },
  "reference": [
    {
      "key": "PhysRev.102.1473Cc1R1",
      "first-page": "87",
      "volume": "142",
      "author": "W. R. Grove",
      "year": "1852",
      "journal-title": "Trans. Roy. Soc. (London)"
    },
    {
      "key": "PhysRev.102.1473Cc2R1",
      "volume-title": "The Electrochemistry of Gases and other Dielectrics",
      "author": "G. Glockler",
      "year": "1939"
    },
    {
      "key": "PhysRev.102.1473Cc3R1",
      "volume-title": "Electronic and Ionic Impact Phenomena",
      "author": "H. Massey",
      "year": "1952"
    },
    {
      "key": "PhysRev.102.1473Cc4R1",
      "doi-asserted-by": "crossref",
      "first-page": "148",
      "DOI": "10.1103/PhysRev.22.148",
      "volume": "22",
      "author": "K. Kingdon",
      "year": "1923",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "PhysRev.102.1473Cc5R1",
      "doi-asserted-by": "crossref",
      "first-page": "319",
      "DOI": "10.1103/PhysRev.65.319",
      "volume": "65",
      "author": "C. Townes",
      "year": "1934",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "PhysRev.102.1473Cc6R1",
      "doi-asserted-by": "crossref",
      "first-page": "185",
      "DOI": "10.1103/RevModPhys.19.185",
      "volume": "19",
      "author": "R. Marshak",
      "year": "1947",
      "journal-title": "Revs. Modern Phys."
    },
    {
      "key": "PhysRev.102.1473Cc7R1",
      "doi-asserted-by": "crossref",
      "first-page": "423",
      "DOI": "10.1103/PhysRev.69.423",
      "volume": "69",
      "author": "G. Placzek",
      "year": "1946",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "PhysRev.102.1473Cc8R1",
      "volume-title": "The Laplace Transform",
      "author": "D. V. Widder",
      "year": "1946"
    },
    {
      "key": "PhysRev.102.1473Cc9R1",
      "volume-title": "Laplace Transformation",
      "author": "W. Thomson",
      "year": "1950"
    },
    {
      "key": "PhysRev.102.1473Cc10R1",
      "doi-asserted-by": "crossref",
      "first-page": "160",
      "DOI": "10.1103/PhysRev.87.160",
      "volume": "87",
      "author": "F. Keywell",
      "year": "1952",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "PhysRev.102.1473Cc10R2",
      "doi-asserted-by": "crossref",
      "first-page": "1611",
      "DOI": "10.1103/PhysRev.97.1611",
      "volume": "97",
      "author": "F. Keywell",
      "year": "1955",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "PhysRev.102.1473Cc11R1",
      "doi-asserted-by": "crossref",
      "first-page": "590",
      "DOI": "10.1007/BF01337787",
      "volume": "119",
      "author": "H. Fetz",
      "year": "1942",
      "journal-title": "Z. Physik."
    },
    {
      "key": "PhysRev.102.1473Cc12R1",
      "doi-asserted-by": "crossref",
      "first-page": "633",
      "DOI": "10.1103/PhysRev.93.633.2",
      "volume": "93",
      "author": "G. Wehner",
      "year": "1954",
      "journal-title": "Phys. Rev."
    }
  ],
  "container-title": "Physical Review",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "http://link.aps.org/article/10.1103/PhysRev.102.1473",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "http://harvest.aps.org/v2/journals/articles/10.1103/PhysRev.102.1473/fulltext",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2017,
        6,
        15
      ]
    ],
    "date-time": "2017-06-15T05:49:31Z",
    "timestamp": 1497505771000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://link.aps.org/doi/10.1103/PhysRev.102.1473"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1956,
        6,
        15
      ]
    ]
  },
  "references-count": 13,
  "journal-issue": {
    "issue": "6",
    "published-print": {
      "date-parts": [
        [
          1956,
          6
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1103/PhysRev.102.1473",
  "relation": {},
  "ISSN": [
    "0031-899X"
  ],
  "subject": [],
  "container-title-short": "Phys. Rev.",
  "published": {
    "date-parts": [
      [
        1956,
        6,
        15
      ]
    ]
  }
}