DOI: 10.1093/jmicro/dfi063. A new evaluation method of electron optical performance of high beam current probe forming systems

A new evaluation method of electron optical performance of high beam current probe forming systems

10.1093/jmicro/dfi063

Crossref journal-article

Oxford University Press (OUP)

Microscopy (286)

Bibliography

Fujita, S., & Shimoyama, H. (2005). A new evaluation method of electron optical performance of high beam current probe forming systems. Microscopy, 54(5), 413â427.

Authors 2

Shin Fujita (first)
Hiroshi Shimoyama (additional)

References 11 Referenced 10

Cosslett V E and Haine M E (1954) The tungsten point cathode as an electron source. In: Proceedings of the International Conference on Electron Microscopy, pp. 639–644 (Royal Microscopical Society, London).
Broers A N (1972) Electron and ion probes. In: Proceedings of the 5th International Conference on Electron and Ion Beam Science and Technology, ed. Bakish R, pp. 3–25 (Electrochemical Society, Pennington, NJ).
Veneklasen L H (1972) Some general considerations concerning the optics of the field emission illumination system. Optik36: 410–433.
Shimoyama H (1985) Electron gun properties. Electron Microsc.19: 151–164 (in Japanese).
Fujita S and Shimoyama H (2005) Theory of cathode trajectory characterization by Canonical Mapping Transformation. J. Electron Microsc.54: 331–343. (10.1093/jmicro/dfi052)
Hawkes P W and Kasper E (1989) Principles of Electron Optics, Vol.2. (Academic Press, London).
Young R D (1959) Theoretical total-energy distribution of field-emitted electrons. Phys. Rev.113: 110–114. (10.1103/PhysRev.113.110)
Barth J E and Kruit P (1996) Addition of different contributions to the charged particle probe size. Optik101: 101–109.
Pease R F W and Nixon W C (1965) High resolution scanning electron microscopy. J. Sci. Intrum., 42: 81–85. (10.1088/0950-7671/42/2/305)
Szilagyi M (1988) Electron and Ion Optics (Plenum Press, NY). (10.1007/978-1-4613-0923-9)
Kruitt P and Jansen G H (1997) Space charge and statistical Coulomb effects. In: Handbook of Charged Particle Optics, ed. Orloff J, pp. 275–318, (CRC Press, NY).

Dates

Type	When
Created	19 years, 10 months ago (Sept. 30, 2005, 8:24 p.m.)
Deposited	7 years, 10 months ago (Oct. 10, 2017, 9:47 p.m.)
Indexed	1 year, 8 months ago (Dec. 8, 2023, 9:08 a.m.)
Issued	19 years, 10 months ago (Sept. 30, 2005)
Published	19 years, 10 months ago (Sept. 30, 2005)
Published Online	19 years, 10 months ago (Sept. 30, 2005)
Published Print	19 years, 10 months ago (Oct. 1, 2005)

Funders 0

None

BibTeX

@article{Fujita_2005, title={A new evaluation method of electron optical performance of high beam current probe forming systems}, volume={54}, ISSN={2050-5698}, url={http://dx.doi.org/10.1093/jmicro/dfi063}, DOI={10.1093/jmicro/dfi063}, number={5}, journal={Microscopy}, publisher={Oxford University Press (OUP)}, author={Fujita, Shin and Shimoyama, Hiroshi}, year={2005}, month=sep, pages={413–427} }

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