DOI: 10.1088/0963-0252/2/1/007. Frequency effects in processing plasmas of the VHF band

Frequency effects in processing plasmas of the VHF band

10.1088/0963-0252/2/1/007

Crossref journal-article

IOP Publishing

Plasma Sources Science and Technology (266)

Bibliography

Oda, S. (1993). Frequency effects in processing plasmas of the VHF band. Plasma Sources Science and Technology, 2(1), 26â29.

Authors 1

S Oda (first)

References 16 Referenced 42

10.1049/el:19870160 / Electron. Lett. by Curtins H (1987)
10.1557/PROC-118-117 / Mater. Res. Soc. Symp. Proc. by Oda S (1988)
10.1557/PROC-149-447 / Mater. Res. Soc. Symp. Proc. by Chatham H (1989)
10.1116/1.572805
10.1143/JJAP.28.L1860 / Japan. J. Appl. Phys. by Oda S (1989)
10.1088/0022-3727/16/12/024 / J. Phys. D: Appl. Phys. by Ferreira C M (1983)
{'key': '7', 'first-page': '437', 'author': 'Ernie D W', 'year': '1991'} by Ernie D W (1991)
10.1063/1.106112
10.1088/0963-0252/2/1/010 / Plasma Sources Sci. Technol. by Kitamura T (1993)
10.1143/JJAP.29.1889 / Japan. J. Appl. Phys. by Oda S (1990)
10.1143/JJAP.27.1560 / Japan. J. Appl. Phys. by Kondo K (1988)
{'key': '12', 'first-page': '147', 'author': 'Yasukawa M', 'year': '1992'} by Yasukawa M (1992)
{'key': '13', 'author': 'Howling A A', 'journal-title': 'J. Vac. Sci. Technol.'} / J. Vac. Sci. Technol. by Howling A A
{'key': '14', 'first-page': '189', 'author': 'Oda S', 'year': '1991'} by Oda S (1991)
10.1016/S0022-3093(05)80211-X / J. Non-Cryst. Solids by Oda S (1991)
10.1116/1.578205

Dates

Type	When
Created	23 years ago (Aug. 25, 2002, 6:37 a.m.)
Deposited	5 years, 4 months ago (April 10, 2020, 7:23 p.m.)
Indexed	1 year, 6 months ago (Feb. 7, 2024, 7:43 p.m.)
Issued	32 years, 7 months ago (Feb. 1, 1993)
Published	32 years, 7 months ago (Feb. 1, 1993)
Published Online	26 years, 8 months ago (Jan. 1, 1999)
Published Print	32 years, 7 months ago (Feb. 1, 1993)

Funders 0

None

BibTeX

@article{Oda_1993, title={Frequency effects in processing plasmas of the VHF band}, volume={2}, ISSN={1361-6595}, url={http://dx.doi.org/10.1088/0963-0252/2/1/007}, DOI={10.1088/0963-0252/2/1/007}, number={1}, journal={Plasma Sources Science and Technology}, publisher={IOP Publishing}, author={Oda, S}, year={1993}, month=feb, pages={26–29} }

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