DOI: 10.1088/0960-1317/2/3/003. Surface micromachining

10.1088/0960-1317/2/3/003

Crossref journal-article

IOP Publishing

Journal of Micromechanics and Microengineering (266)

Bibliography

Linder, C., Paratte, L., Gretillat, M.-A., Jaecklin, V. P., & Rooij, N. F. de. (1992). Surface micromachining. Journal of Micromechanics and Microengineering, 2(3), 122â132.

Authors 5

C Linder (first)
L Paratte (additional)
M -A Gretillat (additional)
V P Jaecklin (additional)
N F de Rooij (additional)

References 60 Referenced 65

{'key': '1', 'first-page': '86', 'author': 'Seidel H', 'year': '1990'} by Seidel H (1990)
10.1109/16.22472
{'key': '3', 'first-page': '41', 'author': 'Ko W H', 'year': '1985'} by Ko W H (1985)
10.1109/PROC.1982.12331 / Proc. IEEE by Petersen K (1982)
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10.1016/0030-4018(92)90330-T by Kovacs A (1992)
10.1149/1.2119965 / J. Electrochem. Soc. by Howe R T (1983)
{'key': '10', 'first-page': '169', 'author': 'Howe R T', 'year': '1985'} by Howe R T (1985)
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{'key': '12', 'first-page': '223', 'author': 'Guckel H', 'year': '1984'} by Guckel H (1984)
{'key': '13', 'first-page': '277', 'author': 'Guckel H', 'year': '1987'} by Guckel H (1987)
10.1016/0924-4247(91)85021-F
10.1109/16.2522
{'key': '16', 'first-page': '574', 'author': 'Kandler M', 'year': '1990'} by Kandler M (1990)
{'key': '17', 'first-page': '183', 'author': 'Kandler M', 'year': '1992'} by Kandler M (1992)
10.1109/T-ED.1967.15912 / IEEE Trans. Electron Dev. by Nathanson H C (1967)
10.1109/16.59913
{'key': '20', 'first-page': '188', 'author': 'Sugiyama S', 'year': '1991'} by Sugiyama S (1991)
{'key': '21', 'first-page': '408', 'author': 'Scheeper P R', 'year': '1991'} by Scheeper P R (1991)
{'key': '22', 'first-page': '17', 'author': 'Baltes H', 'year': '1991'} by Baltes H (1991)
{'key': '23', 'first-page': '547', 'author': 'Moser D', 'year': '1991'} by Moser D (1991)
{'key': '24', 'first-page': '61', 'volume': '32', 'author': 'Baltes H', 'year': '1991'} by Baltes H (1991)
10.1016/0924-4247(91)87052-5
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10.1088/0960-1317/2/3/022 / J. Micromech. Microeng. by Boltshauser T (1992)
10.1016/0924-4247(90)85066-D
{'key': '29', 'first-page': '524', 'author': 'Linder C', 'year': '1991'} by Linder C (1991)
{'key': '30', 'first-page': '520', 'author': 'Zhang Z L', 'year': '1991'} by Zhang Z L (1991)
{'key': '31', 'first-page': '135', 'author': 'Brennen R A', 'year': '1990'} by Brennen R A (1990)
{'key': '32', 'first-page': '63', 'author': 'Takeshima N', 'year': '1991'} by Takeshima N (1991)
{'key': '33', 'first-page': '53', 'author': 'Tang W C', 'year': '1989'} by Tang W C (1989)
{'key': '34', 'first-page': '48', 'author': 'Kim C J', 'year': '1990'} by Kim C J (1990)
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{'key': '36', 'author': 'Jaecklin V P', 'year': '1992'} by Jaecklin V P (1992)
{'key': '37', 'first-page': '147', 'author': 'Jaecklin V P', 'year': '1992'} by Jaecklin V P (1992)
{'key': '38', 'first-page': '241', 'author': 'Jufer M', 'year': '1979'} by Jufer M (1979)
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{'key': '41', 'first-page': '1', 'author': 'Tai Y-C', 'year': '1989'} by Tai Y-C (1989)
{'key': '42', 'first-page': '877', 'author': 'Tavrow L S', 'year': '1991'} by Tavrow L S (1991)
{'key': '43', 'first-page': '59', 'author': 'Mehregany M', 'year': '1991'} by Mehregany M (1991)
{'key': '44', 'first-page': '886', 'author': 'Paratte L', 'year': '1991'} by Paratte L (1991)
{'key': '45', 'first-page': '886', 'author': 'Paratte L', 'year': '1991'} by Paratte L (1991)
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{'key': '47', 'author': 'Allen H V', 'year': '1987'} by Allen H V (1987)
{'key': '48', 'first-page': '116', 'author': 'Benecke W', 'year': '1989'} by Benecke W (1989)
10.1088/0022-3735/18/2/002 / J. Phys. E: Sci. Instrum. by Langdon R M (1985)
10.1016/0924-4247(90)85064-B
10.1109/T-ED.1986.22519 / IEEE Trans. Electron Dev. by Howe R T (1986)
{'key': '52', 'first-page': '9', 'author': 'Sniegowski J J', 'year': '1990'} by Sniegowski J J (1990)
10.1016/0924-4247(91)87054-7
{'key': '54', 'first-page': '49', 'volume': '79', 'author': 'Obermeier E', 'year': '1982', 'ISSN': 'http://id.crossref.org/issn/0341-0196', 'issn-type': 'print'} by Obermeier E (1982)
{'key': '55', 'first-page': '527', 'author': 'Obermeier E', 'year': '1985'} by Obermeier E (1985)
{'key': '56', 'author': 'Grétillat M-A', 'year': '1991'} by Grétillat M-A (1991)
10.1016/0167-9317(91)90253-A
{'key': '58', 'first-page': '217', 'author': 'Shoji S', 'year': '1988'} by Shoji S (1988)
{'key': '59', 'first-page': '1010', 'author': 'Kung J T', 'year': '1985'} by Kung J T (1985)
10.1088/0960-1317/2/3/026 / J. Micromech. Microeng. by Brugger J (1992)

Dates

Type	When
Created	22 years, 11 months ago (Aug. 25, 2002, 6:37 a.m.)
Deposited	5 years, 4 months ago (April 10, 2020, 10:53 p.m.)
Indexed	4 months ago (April 20, 2025, 12:42 a.m.)
Issued	32 years, 11 months ago (Sept. 1, 1992)
Published	32 years, 11 months ago (Sept. 1, 1992)
Published Online	26 years, 7 months ago (Jan. 1, 1999)
Published Print	32 years, 11 months ago (Sept. 1, 1992)

Funders 0

None

BibTeX

@article{Linder_1992, title={Surface micromachining}, volume={2}, ISSN={1361-6439}, url={http://dx.doi.org/10.1088/0960-1317/2/3/003}, DOI={10.1088/0960-1317/2/3/003}, number={3}, journal={Journal of Micromechanics and Microengineering}, publisher={IOP Publishing}, author={Linder, C and Paratte, L and Gretillat, M -A and Jaecklin, V P and Rooij, N F de}, year={1992}, month=sep, pages={122–132} }

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