DOI: 10.1088/0960-1317/15/10/006. A novel low-temperature method to fabricate MEMS resonators using PMGI as a sacrificial layer

A novel low-temperature method to fabricate MEMS resonators using PMGI as a sacrificial layer

10.1088/0960-1317/15/10/006

Crossref journal-article

IOP Publishing

Journal of Micromechanics and Microengineering (266)

Bibliography

Young, S., Weston, D., Dauksher, B., Mancini, D., Pacheco, S., Zurcher, P., & Miller, M. (2005). A novel low-temperature method to fabricate MEMS resonators using PMGI as a sacrificial layer. Journal of Micromechanics and Microengineering, 15(10), 1824â1830.

Authors 7

Steven Young (first)
Don Weston (additional)
Bill Dauksher (additional)
David Mancini (additional)
Sergio Pacheco (additional)
Peter Zurcher (additional)
Mel Miller (additional)

References 6 Referenced 18

10.1117/12.354265
{'key': '2', 'first-page': '38', 'author': 'Lund J L Jahnes C V Deligianni H Buchwalter L P Cotte J M Andricacos P Seeger D E Magerlein J H', 'year': '2002', 'journal-title': 'Solid-State Sensor Actuator and Microsystems Workshop'} / Solid-State Sensor Actuator and Microsystems Workshop by Lund J L Jahnes C V Deligianni H Buchwalter L P Cotte J M Andricacos P Seeger D E Magerlein J H (2002)
{'key': '3', 'first-page': '453', 'author': 'Wang K Yu Y Wong A-C Nguyen C T-C', 'year': '1999', 'journal-title': 'Technical Digest 12th Int. IEEE Micro Electro Mechanical Systems Conf.'} / Technical Digest 12th Int. IEEE Micro Electro Mechanical Systems Conf. by Wang K Yu Y Wong A-C Nguyen C T-C (1999)
{'key': '4', 'author': 'MicroChem'} by MicroChem
{'key': '5', 'author': 'Barker N S', 'year': '1999'} by Barker N S (1999)
10.1088/0960-1317/10/3/321 / J. Micromech. Microeng. by Ono T (2000)

Dates

Type	When
Created	20 years ago (Aug. 9, 2005, 11:13 p.m.)
Deposited	5 years, 4 months ago (April 11, 2020, 4:38 a.m.)
Indexed	3 months ago (June 2, 2025, 1:06 p.m.)
Issued	20 years ago (Aug. 9, 2005)
Published	20 years ago (Aug. 9, 2005)
Published Online	20 years ago (Aug. 9, 2005)
Published Print	19 years, 11 months ago (Oct. 1, 2005)

Funders 0

None

BibTeX

@article{Young_2005, title={A novel low-temperature method to fabricate MEMS resonators using PMGI as a sacrificial layer}, volume={15}, ISSN={1361-6439}, url={http://dx.doi.org/10.1088/0960-1317/15/10/006}, DOI={10.1088/0960-1317/15/10/006}, number={10}, journal={Journal of Micromechanics and Microengineering}, publisher={IOP Publishing}, author={Young, Steven and Weston, Don and Dauksher, Bill and Mancini, David and Pacheco, Sergio and Zurcher, Peter and Miller, Mel}, year={2005}, month=aug, pages={1824–1830} }

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