DOI: 10.1088/0268-1242/7/1a/025. Recognition of D defects in silicon single crystals by preferential etching and effect on gate oxide integrity

Recognition of D defects in silicon single crystals by preferential etching and effect on gate oxide integrity

10.1088/0268-1242/7/1a/025

Crossref journal-article

IOP Publishing

Semiconductor Science and Technology (266)

Bibliography

Yamagishi, H., Fusegawa, I., Fujimaki, N., & Katayama, M. (1992). Recognition of D defects in silicon single crystals by preferential etching and effect on gate oxide integrity. Semiconductor Science and Technology, 7(1A), A135âA140.

Authors 4

H Yamagishi (first)
I Fusegawa (additional)
N Fujimaki (additional)
M Katayama (additional)

References 7 Referenced 150

{'key': '1', 'first-page': '565', 'author': 'Foll H', 'year': '1977'} by Foll H (1977)
{'key': '2', 'first-page': '272', 'volume': '59', 'author': 'Abe T', 'year': '1990', 'journal-title': 'Ohyo Butsuri'} / Ohyo Butsuri by Abe T (1990)
{'key': '3', 'first-page': '139', 'volume': '116', 'author': 'Abe T', 'year': '1983', 'journal-title': 'Physica', 'ISSN': 'http://id.crossref.org/issn/0921-4526', 'issn-type': 'print'} / Physica by Abe T (1983)
{'key': '4', 'first-page': '76', 'author': 'Harada A', 'year': '1986'} by Harada A (1986)
10.1149/1.2404374 / J. Electrochem. Soc. by Secco D'Aragona F (1972)
{'key': '6', 'first-page': '543', 'author': 'Abe T', 'year': '1985'} by Abe T (1985)
10.1016/0022-0248(81)90140-8

Dates

Type	When
Created	23 years ago (Aug. 25, 2002, 6:02 a.m.)
Deposited	5 years, 4 months ago (April 11, 2020, 11:45 a.m.)
Indexed	2 months, 1 week ago (June 25, 2025, 7:05 p.m.)
Issued	33 years, 8 months ago (Jan. 1, 1992)
Published	33 years, 8 months ago (Jan. 1, 1992)
Published Online	26 years, 8 months ago (Jan. 1, 1999)
Published Print	33 years, 8 months ago (Jan. 1, 1992)

Funders 0

None

BibTeX

@article{Yamagishi_1992, title={Recognition of D defects in silicon single crystals by preferential etching and effect on gate oxide integrity}, volume={7}, ISSN={1361-6641}, url={http://dx.doi.org/10.1088/0268-1242/7/1a/025}, DOI={10.1088/0268-1242/7/1a/025}, number={1A}, journal={Semiconductor Science and Technology}, publisher={IOP Publishing}, author={Yamagishi, H and Fusegawa, I and Fujimaki, N and Katayama, M}, year={1992}, month=jan, pages={A135–A140} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        6,
        25
      ]
    ],
    "date-time": "2025-06-25T23:05:03Z",
    "timestamp": 1750892703572
  },
  "reference-count": 7,
  "publisher": "IOP Publishing",
  "issue": "1A",
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1992,
        1,
        1
      ]
    ]
  },
  "DOI": "10.1088/0268-1242/7/1a/025",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        8,
        25
      ]
    ],
    "date-time": "2002-08-25T10:02:21Z",
    "timestamp": 1030269741000
  },
  "page": "A135-A140",
  "source": "Crossref",
  "is-referenced-by-count": 150,
  "title": "Recognition of D defects in silicon single crystals by preferential etching and effect on gate oxide integrity",
  "prefix": "10.1088",
  "volume": "7",
  "author": [
    {
      "given": "H",
      "family": "Yamagishi",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "I",
      "family": "Fusegawa",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "N",
      "family": "Fujimaki",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "M",
      "family": "Katayama",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "266",
  "published-online": {
    "date-parts": [
      [
        1999,
        1,
        1
      ]
    ]
  },
  "reference": [
    {
      "key": "1",
      "first-page": "565",
      "author": "Foll H",
      "year": "1977"
    },
    {
      "key": "2",
      "first-page": "272",
      "volume": "59",
      "author": "Abe T",
      "year": "1990",
      "journal-title": "Ohyo Butsuri"
    },
    {
      "key": "3",
      "first-page": "139",
      "volume": "116",
      "author": "Abe T",
      "year": "1983",
      "journal-title": "Physica",
      "ISSN": "http://id.crossref.org/issn/0921-4526",
      "issn-type": "print"
    },
    {
      "key": "4",
      "first-page": "76",
      "author": "Harada A",
      "year": "1986"
    },
    {
      "key": "5",
      "doi-asserted-by": "crossref",
      "first-page": "948",
      "DOI": "10.1149/1.2404374",
      "volume": "119",
      "author": "Secco D'Aragona F",
      "year": "1972",
      "journal-title": "J. Electrochem. Soc.",
      "ISSN": "http://id.crossref.org/issn/0013-4651",
      "issn-type": "print"
    },
    {
      "key": "6",
      "first-page": "543",
      "author": "Abe T",
      "year": "1985"
    },
    {
      "key": "7",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0022-0248(81)90140-8"
    }
  ],
  "container-title": "Semiconductor Science and Technology",
  "original-title": [],
  "link": [
    {
      "URL": "http://stacks.iop.org/0268-1242/7/i=1A/a=025/pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2020,
        4,
        11
      ]
    ],
    "date-time": "2020-04-11T15:45:21Z",
    "timestamp": 1586619921000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://iopscience.iop.org/article/10.1088/0268-1242/7/1A/025"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1992,
        1,
        1
      ]
    ]
  },
  "references-count": 7,
  "journal-issue": {
    "issue": "1A",
    "published-print": {
      "date-parts": [
        [
          1992,
          1,
          2
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1088/0268-1242/7/1A/025",
  "relation": {},
  "ISSN": [
    "0268-1242",
    "1361-6641"
  ],
  "subject": [],
  "container-title-short": "Semicond. Sci. Technol.",
  "published": {
    "date-parts": [
      [
        1992,
        1,
        1
      ]
    ]
  }
}