DOI: 10.1088/0268-1242/24/10/105018. Recovery of microstructure and surface topography of grinding-damaged silicon wafers by nanosecond-pulsed laser irradiation

Recovery of microstructure and surface topography of grinding-damaged silicon wafers by nanosecond-pulsed laser irradiation

10.1088/0268-1242/24/10/105018

Crossref journal-article

IOP Publishing

Semiconductor Science and Technology (266)

Bibliography

Yan, J., Sakai, S., Isogai, H., & Izunome, K. (2009). Recovery of microstructure and surface topography of grinding-damaged silicon wafers by nanosecond-pulsed laser irradiation. Semiconductor Science and Technology, 24(10), 105018.

Authors 4

Jiwang Yan (first)
Shin Sakai (additional)
Hiromichi Isogai (additional)
Koji Izunome (additional)

References 16 Referenced 18

10.1063/1.112633
10.1080/01418619408242212
10.1088/0268-1242/14/10/310 / Semicond. Sci. Technol. by Gogotsi Y (1999)
10.1063/1.1639953
10.1016/j.precisioneng.2007.08.006
{'key': '6', 'first-page': '426', 'volume': '44', 'author': 'Noboru M', 'year': '2000', 'journal-title': 'J. Japan. Soc. Abrasive Technol.'} / J. Japan. Soc. Abrasive Technol. by Noboru M (2000)
{'key': '7', 'first-page': '411', 'author': 'Klocke F', 'year': '2001', 'journal-title': 'Initiatives of Precision Engineering at the Beginning of a Millennium Proc. of the 10th International Conf. on Precision Engineering (ICPE) (Yokohama, Japan, 18-20 July 2001)'} / Initiatives of Precision Engineering at the Beginning of a Millennium Proc. of the 10th International Conf. on Precision Engineering (ICPE) (Yokohama, Japan, 18-20 July 2001) by Klocke F (2001)
10.1088/0268-1242/22/4/016 / Semicond. Sci. Technol. by Yan J (2007)
{'key': '9', 'first-page': '219', 'author': 'Pei Z J', 'year': '2007', 'journal-title': 'Semiconductor Machining at the Micro-Nano Scale'} / Semiconductor Machining at the Micro-Nano Scale by Pei Z J (2007)
10.1063/1.90324
10.1063/1.90411
10.1063/1.91231
10.1063/1.90989
10.1063/1.94038
{'key': '15', 'first-page': '110', 'author': 'Neuberger M Wells S J', 'year': '1969'} by Neuberger M Wells S J (1969)
10.1016/0038-1101(81)90217-3

Dates

Type	When
Created	15 years, 11 months ago (Sept. 18, 2009, 11:13 p.m.)
Deposited	5 years, 4 months ago (April 10, 2020, 6:12 p.m.)
Indexed	1 month, 1 week ago (July 28, 2025, 5:23 p.m.)
Issued	15 years, 11 months ago (Sept. 18, 2009)
Published	15 years, 11 months ago (Sept. 18, 2009)
Published Online	15 years, 11 months ago (Sept. 18, 2009)
Published Print	15 years, 11 months ago (Oct. 1, 2009)

Funders 0

None

BibTeX

@article{Yan_2009, title={Recovery of microstructure and surface topography of grinding-damaged silicon wafers by nanosecond-pulsed laser irradiation}, volume={24}, ISSN={1361-6641}, url={http://dx.doi.org/10.1088/0268-1242/24/10/105018}, DOI={10.1088/0268-1242/24/10/105018}, number={10}, journal={Semiconductor Science and Technology}, publisher={IOP Publishing}, author={Yan, Jiwang and Sakai, Shin and Isogai, Hiromichi and Izunome, Koji}, year={2009}, month=sep, pages={105018} }

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