DOI: 10.1088/0268-1242/14/10/310. Raman microspectroscopy study of processing-induced phase transformations and residual stress in silicon

Raman microspectroscopy study of processing-induced phase transformations and residual stress in silicon

10.1088/0268-1242/14/10/310

Crossref journal-article

IOP Publishing

Semiconductor Science and Technology (266)

Bibliography

Gogotsi, Y., Baek, C., & Kirscht, F. (1999). Raman microspectroscopy study of processing-induced phase transformations and residual stress in silicon. Semiconductor Science and Technology, 14(10), 936â944.

Authors 3

Y Gogotsi (first)
C Baek (additional)
F Kirscht (additional)

References 42 Referenced 217

{'key': '1', 'author': 'Thompson D C', 'year': '1998'} by Thompson D C (1998)
{'key': '2', 'author': 'Blake P N', 'year': '1989'} by Blake P N (1989)
10.1115/1.2899676 / J. Eng. Industry by Biffano T G (1991)
10.1115/1.2901940 / J. Eng. Industry by Blackley W S (1994)
10.1088/0268-1242/7/2/013 / Semicond. Sci. Technol. by Puttick K E (1992)
{'key': '6', 'author': 'Jahanmir S', 'year': '1993'} by Jahanmir S (1993)
10.1111/j.1151-2916.1990.tb06730.x / J. Am. Ceram. Soc. by Blackley W S (1990)
10.1016/0141-6359(91)90500-I / Precis. Eng. by Blackley W S (1991)
10.1557/JMR.1996.0157 / J. Mater. Res. by Kunz R R (1996)
10.1111/j.1151-2916.1990.tb05142.x / J. Am. Ceram. Soc. by Blake P N (1990)
10.1557/JMR.1997.0010 / J. Mater. Res. by Bhushan B (1997)
10.1111/j.1151-2916.1995.tb08612.x / J. Am. Ceram. Soc. by Morris J C (1995)
10.1007/BF00353197 / J. Mater. Sci. by Kim D E (1993)
{'key': '14', 'author': 'Shaw M C', 'year': '1991'} by Shaw M C (1991)
{'key': '15', 'first-page': '82', 'author': 'Puttick K E', 'year': '1996'} by Puttick K E (1996)
{'key': '16', 'first-page': '431', 'author': 'Gogotsi Y', 'year': '1998'} by Gogotsi Y (1998)
10.1088/0268-1242/9/4/012 / Semicond. Sci. Technol. by Verhey J (1994)
10.1366/0003702971942123 / Appl. Spectrosc. by Bowden M (1997)
10.1063/1.366072
{'key': '20', 'first-page': '303', 'author': 'Sparks R G', 'year': '1993'} by Sparks R G (1993)
10.1016/0141-6359(88)90053-0 / Precis. Eng. by Sparks R G (1988)
10.1063/1.341542
10.1126/science.139.3552.338-a / Science by Wentorf R H (1963)
10.1103/PhysRevLett.60.2156
10.1557/JMR.1992.0961 / J. Mater. Res. by Pharr G M (1992)
10.1103/PhysRevB.51.9652
10.1116/1.588475
10.1103/PhysRevB.52.4072
10.1103/PhysRevB.50.13043
10.1063/1.364340
10.1063/1.117346
10.1080/08957959608240458 / High Pressure Res. by Blank V D (1996)
10.1063/1.112999
10.1063/1.115594
10.1557/JMR.1997.0302 / J. Mater. Res. by Lucazeau G (1997)
{'key': '36', 'author': 'Kailer A', 'year': '1999'} by Kailer A (1999)
{'key': '37', 'first-page': '45', 'author': 'Boercker D B', 'year': '1993'} by Boercker D B (1993)
{'key': '38', 'first-page': '21', 'author': 'Patten J A', 'year': '1993'} by Patten J A (1993)
10.1080/08957959608240457 / High Pressure Res. by Brazhkin V V (1996)
10.1016/0022-3697(62)90085-9
10.1126/science.139.3556.762 / Science by Jamieson J C (1963)
10.1103/PhysRevLett.29.725

Dates

Type	When
Created	23 years ago (Aug. 25, 2002, 6:02 a.m.)
Deposited	5 years, 4 months ago (April 10, 2020, 5:45 p.m.)
Indexed	1 week, 3 days ago (Aug. 19, 2025, 7:11 a.m.)
Issued	25 years, 11 months ago (Sept. 14, 1999)
Published	25 years, 11 months ago (Sept. 14, 1999)
Published Online	25 years, 11 months ago (Sept. 14, 1999)
Published Print	25 years, 10 months ago (Oct. 1, 1999)

Funders 0

None

BibTeX

@article{Gogotsi_1999, title={Raman microspectroscopy study of processing-induced phase transformations and residual stress in silicon}, volume={14}, ISSN={1361-6641}, url={http://dx.doi.org/10.1088/0268-1242/14/10/310}, DOI={10.1088/0268-1242/14/10/310}, number={10}, journal={Semiconductor Science and Technology}, publisher={IOP Publishing}, author={Gogotsi, Y and Baek, C and Kirscht, F}, year={1999}, month=sep, pages={936–944} }

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