DOI: 10.1088/0268-1242/10/3/004. Activation energy in the early stage of electromigration in Al-1% Si/TiN/Ti bamboo lines

Activation energy in the early stage of electromigration in Al-1% Si/TiN/Ti bamboo lines

10.1088/0268-1242/10/3/004

Crossref journal-article

IOP Publishing

Semiconductor Science and Technology (266)

Bibliography

Munari, I. D., Scorzoni, A., Tamarri, F., & Fantini, F. (1995). Activation energy in the early stage of electromigration in Al-1% Si/TiN/Ti bamboo lines. Semiconductor Science and Technology, 10(3), 255â259.

Authors 4

I De Munari (first)
A Scorzoni (additional)
F Tamarri (additional)
F Fantini (additional)

References 21 Referenced 111

10.1016/0920-2307(91)90005-8 / Mater. Sci. Rep. by Scorzoni A (1991)
{'key': '2', 'first-page': '221', 'author': 'Tezaki A', 'year': '1990'} by Tezaki A (1990)
10.1063/1.349852
10.1007/BF02647548 / Metall. Trans. by Nix W D (1992)
10.1557/PROC-309-101 / Mater. Res. Soc. Symp. Proc. by Kirchheim R (1993)
10.1063/1.351653
{'key': '7', 'first-page': '135', 'author': 'Niehof J', 'year': '1993'} by Niehof J (1993)
10.1557/PROC-309-301 / Mater. Res. Soc. Symp. Proc. by Möckl U E (1993)
10.1063/1.354305
10.1109/16.75155
10.1557/PROC-337-515 / Mater. Res. Soc. Symp. Proc. by Scorzoni A (1994)
10.1063/1.105289
10.1063/1.354073
{'key': '14', 'author': 'De Munari I', 'year': '1995', 'journal-title': 'IEEE Trans. Electron Devices', 'ISSN': 'http://id.crossref.org/issn/0018-9383', 'issn-type': 'print'} / IEEE Trans. Electron Devices by De Munari I (1995)
10.1063/1.356291
10.1063/1.345611
10.1016/0026-2714(90)90017-H / Microelectron. Reliab. by Scorzoni A (1990)
10.1063/1.107936
10.1063/1.347457
10.1016/0040-6090(86)90005-2
10.1002/qre.4680070413 / Quality Reliab. Eng. Int. by Caprile C (1991)

Dates

Type	When
Created	23 years ago (Aug. 25, 2002, 6:02 a.m.)
Deposited	5 years, 4 months ago (April 11, 2020, 10:59 a.m.)
Indexed	1 year, 5 months ago (March 15, 2024, 3:13 p.m.)
Issued	30 years, 5 months ago (March 1, 1995)
Published	30 years, 5 months ago (March 1, 1995)
Published Online	26 years, 7 months ago (Jan. 1, 1999)
Published Print	30 years, 5 months ago (March 1, 1995)

Funders 0

None

BibTeX

@article{Munari_1995, title={Activation energy in the early stage of electromigration in Al-1% Si/TiN/Ti bamboo lines}, volume={10}, ISSN={1361-6641}, url={http://dx.doi.org/10.1088/0268-1242/10/3/004}, DOI={10.1088/0268-1242/10/3/004}, number={3}, journal={Semiconductor Science and Technology}, publisher={IOP Publishing}, author={Munari, I De and Scorzoni, A and Tamarri, F and Fantini, F}, year={1995}, month=mar, pages={255–259} }

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