DOI: 10.1088/0031-8949/12/6/008. Optical Constants of Epitaxial Silicon in the Region 1

Optical Constants of Epitaxial Silicon in the Region 1–3.3 eV

10.1088/0031-8949/12/6/008

Crossref journal-article

IOP Publishing

Physica Scripta (266)

Abstract

The optical constants of epitaxial silicon have been obtained in the region 1–3.3 eV (to 3.1 eV forn) by means of optical transmission and photoconductivity measurements. The silicon layers are 0.1–3 μm thick and therefore give interference spectra in both measuring modes. The values ofnobtained here fit well with those obtained from reflectance and ellipsometric measurements on bulk silicon. The absorption coefficient α is calculated from the quotientITu/IT1, whereITu(1)is the upper (lower) envelope of the transmitted intensity interference curve. The values obtained here are greater by a factor of 2 than those of Dash & Newman (1955). Literature values obtained from ellipsometric measurements at λ = 5 461 Å show a substantial spread with the values of Dash & Newman as a lower limit.

Bibliography

Rolf HulthÃ©n. (1975). Optical Constants of Epitaxial Silicon in the Region 1â3.3 eV. Physica Scripta, 12(6), 342â344.

Authors 1

Rolf Hulthén (first)

References 17 Referenced 77

{'journal-title': 'INSELEK Technical Bulletins E-1 to E-4', 'key': 'crKey-10.1088/0031-8949/12/6/008-BIB1'} / INSELEK Technical Bulletins E-1 to E-4
{'year': '1967', 'key': 'crKey-10.1088/0031-8949/12/6/008-BIB2', 'first-page': '102'} (1967)
{'year': '1964', 'key': 'crKey-10.1088/0031-8949/12/6/008-BIB3'} (1964)
10.1088/0022-3727/5/1/425 / J. Phys. D: Appl. Phys. (1972)
10.1103/PhysRev.99.1151 / Phys. Rev. (1955)
10.1016/0022-3697(64)90031-9 / J. Phys. Chem. Solids (1964)
{'year': '1973', 'key': 'crKey-10.1088/0031-8949/12/6/008-BIB7'} (1973)
10.1364/JOSA.47.000244 / J. Opt. Soc. Am. (1957)
{'key': 'crKey-10.1088/0031-8949/12/6/008-BIB9', 'first-page': '169', 'volume': '24', 'year': '1943', 'journal-title': 'Z. Tech. Phys.'} / Z. Tech. Phys. (1943)
10.1103/PhysRev.120.37 / Phys. Rev. (1960)
10.1364/JOSA.62.000596 / J. Opt. Soc. Am. (1972)
10.1016/0039-6028(72)90226-9 / Surface Sci. (1972)
10.1103/PhysRevLett.28.237 / Phys. Rev. Lett. (1972)
10.1364/JOSA.48.000072 / J. Opt. Soc. Am. (1958)
{'key': 'crKey-10.1088/0031-8949/12/6/008-BIB15'}
10.1364/JOSA.58.001356 / J. Opt. Soc. Am. (1968)
10.1016/0039-6028(69)90010-7 / Surface Sci. (1969)

Dates

Type	When
Created	18 years, 7 months ago (Jan. 22, 2007, 11:18 p.m.)
Deposited	1 year, 6 months ago (Feb. 10, 2024, 5:49 a.m.)
Indexed	6 months, 2 weeks ago (Feb. 21, 2025, 6:36 a.m.)
Issued	49 years, 9 months ago (Dec. 1, 1975)
Published	49 years, 9 months ago (Dec. 1, 1975)
Published Print	49 years, 9 months ago (Dec. 1, 1975)

Funders 0

None

BibTeX

@article{Rolf_Hulth_n_1975, title={Optical Constants of Epitaxial Silicon in the Region 1–3.3 eV}, volume={12}, ISSN={1402-4896}, url={http://dx.doi.org/10.1088/0031-8949/12/6/008}, DOI={10.1088/0031-8949/12/6/008}, number={6}, journal={Physica Scripta}, publisher={IOP Publishing}, author={Rolf Hulthén}, year={1975}, month=dec, pages={342–344} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        2,
        21
      ]
    ],
    "date-time": "2025-02-21T11:36:20Z",
    "timestamp": 1740137780764,
    "version": "3.37.3"
  },
  "reference-count": 17,
  "publisher": "IOP Publishing",
  "issue": "6",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1975,
            12,
            1
          ]
        ],
        "date-time": "1975-12-01T00:00:00Z",
        "timestamp": 186624000000
      },
      "content-version": "vor",
      "delay-in-days": 0,
      "URL": "https://iopscience.iop.org/page/copyright"
    },
    {
      "start": {
        "date-parts": [
          [
            1975,
            12,
            1
          ]
        ],
        "date-time": "1975-12-01T00:00:00Z",
        "timestamp": 186624000000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://iopscience.iop.org/info/page/text-and-data-mining"
    }
  ],
  "content-domain": {
    "domain": [
      "iopscience.iop.org"
    ],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1975,
        12,
        1
      ]
    ]
  },
  "abstract": "<jats:p>The optical constants of epitaxial silicon have been obtained in the region 1\u20133.3 eV (to 3.1 eV for<jats:italic>n</jats:italic>) by means of optical transmission and photoconductivity measurements. The silicon layers are 0.1\u20133 \u03bcm thick and therefore give interference spectra in both measuring modes. The values of<jats:italic>n</jats:italic>obtained here fit well with those obtained from reflectance and ellipsometric measurements on bulk silicon. The absorption coefficient \u03b1 is calculated from the quotient<jats:italic>I</jats:italic><jats:sub>Tu</jats:sub>/<jats:italic>I</jats:italic><jats:sub>T1</jats:sub>, where<jats:italic>I</jats:italic><jats:sub>Tu(1)</jats:sub>is the upper (lower) envelope of the transmitted intensity interference curve. The values obtained here are greater by a factor of 2 than those of Dash &amp; Newman (1955). Literature values obtained from ellipsometric measurements at \u03bb = 5 461 \u00c5 show a substantial spread with the values of Dash &amp; Newman as a lower limit.</jats:p>",
  "DOI": "10.1088/0031-8949/12/6/008",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2007,
        1,
        23
      ]
    ],
    "date-time": "2007-01-23T04:18:24Z",
    "timestamp": 1169525904000
  },
  "page": "342-344",
  "update-policy": "https://doi.org/10.1088/crossmark-policy",
  "source": "Crossref",
  "is-referenced-by-count": 77,
  "title": "Optical Constants of Epitaxial Silicon in the Region 1\u20133.3 eV",
  "prefix": "10.1088",
  "volume": "12",
  "author": [
    {
      "family": "Rolf Hulth\u00e9n",
      "sequence": "first",
      "affiliation": []
    }
  ],
  "member": "266",
  "reference": [
    {
      "journal-title": "INSELEK Technical Bulletins E-1 to E-4",
      "key": "crKey-10.1088/0031-8949/12/6/008-BIB1"
    },
    {
      "year": "1967",
      "key": "crKey-10.1088/0031-8949/12/6/008-BIB2",
      "first-page": "102"
    },
    {
      "year": "1964",
      "key": "crKey-10.1088/0031-8949/12/6/008-BIB3"
    },
    {
      "key": "crKey-10.1088/0031-8949/12/6/008-BIB4",
      "doi-asserted-by": "crossref",
      "first-page": "185",
      "DOI": "10.1088/0022-3727/5/1/425",
      "volume": "5",
      "year": "1972",
      "journal-title": "J. Phys. D: Appl. Phys.",
      "ISSN": "https://id.crossref.org/issn/0022-3727",
      "issn-type": "print"
    },
    {
      "key": "crKey-10.1088/0031-8949/12/6/008-BIB5",
      "doi-asserted-by": "publisher",
      "first-page": "1151",
      "DOI": "10.1103/PhysRev.99.1151",
      "volume": "99",
      "year": "1955",
      "journal-title": "Phys. Rev.",
      "ISSN": "https://id.crossref.org/issn/0031-899X",
      "issn-type": "print"
    },
    {
      "key": "crKey-10.1088/0031-8949/12/6/008-BIB6",
      "doi-asserted-by": "publisher",
      "first-page": "941",
      "DOI": "10.1016/0022-3697(64)90031-9",
      "volume": "25",
      "year": "1964",
      "journal-title": "J. Phys. Chem. Solids",
      "ISSN": "https://id.crossref.org/issn/0022-3697",
      "issn-type": "print"
    },
    {
      "year": "1973",
      "key": "crKey-10.1088/0031-8949/12/6/008-BIB7"
    },
    {
      "key": "crKey-10.1088/0031-8949/12/6/008-BIB8",
      "doi-asserted-by": "publisher",
      "first-page": "244",
      "DOI": "10.1364/JOSA.47.000244",
      "volume": "47",
      "year": "1957",
      "journal-title": "J. Opt. Soc. Am.",
      "ISSN": "https://id.crossref.org/issn/0030-3941",
      "issn-type": "print"
    },
    {
      "key": "crKey-10.1088/0031-8949/12/6/008-BIB9",
      "first-page": "169",
      "volume": "24",
      "year": "1943",
      "journal-title": "Z. Tech. Phys."
    },
    {
      "key": "crKey-10.1088/0031-8949/12/6/008-BIB10",
      "doi-asserted-by": "publisher",
      "first-page": "37",
      "DOI": "10.1103/PhysRev.120.37",
      "volume": "120",
      "year": "1960",
      "journal-title": "Phys. Rev.",
      "ISSN": "https://id.crossref.org/issn/0031-899X",
      "issn-type": "print"
    },
    {
      "key": "crKey-10.1088/0031-8949/12/6/008-BIB11",
      "doi-asserted-by": "publisher",
      "first-page": "596",
      "DOI": "10.1364/JOSA.62.000596",
      "volume": "62",
      "year": "1972",
      "journal-title": "J. Opt. Soc. Am.",
      "ISSN": "https://id.crossref.org/issn/0030-3941",
      "issn-type": "print"
    },
    {
      "key": "crKey-10.1088/0031-8949/12/6/008-BIB12",
      "doi-asserted-by": "publisher",
      "first-page": "379",
      "DOI": "10.1016/0039-6028(72)90226-9",
      "volume": "29",
      "year": "1972",
      "journal-title": "Surface Sci.",
      "ISSN": "https://id.crossref.org/issn/0039-6028",
      "issn-type": "print"
    },
    {
      "key": "crKey-10.1088/0031-8949/12/6/008-BIB13",
      "doi-asserted-by": "publisher",
      "first-page": "237",
      "DOI": "10.1103/PhysRevLett.28.237",
      "volume": "28",
      "year": "1972",
      "journal-title": "Phys. Rev. Lett.",
      "ISSN": "https://id.crossref.org/issn/0031-9007",
      "issn-type": "print"
    },
    {
      "key": "crKey-10.1088/0031-8949/12/6/008-BIB14",
      "doi-asserted-by": "publisher",
      "first-page": "72",
      "DOI": "10.1364/JOSA.48.000072",
      "volume": "48",
      "year": "1958",
      "journal-title": "J. Opt. Soc. Am.",
      "ISSN": "https://id.crossref.org/issn/0030-3941",
      "issn-type": "print"
    },
    {
      "key": "crKey-10.1088/0031-8949/12/6/008-BIB15"
    },
    {
      "key": "crKey-10.1088/0031-8949/12/6/008-BIB16",
      "doi-asserted-by": "publisher",
      "first-page": "1356",
      "DOI": "10.1364/JOSA.58.001356",
      "volume": "58",
      "year": "1968",
      "journal-title": "J. Opt. Soc. Am.",
      "ISSN": "https://id.crossref.org/issn/0030-3941",
      "issn-type": "print"
    },
    {
      "key": "crKey-10.1088/0031-8949/12/6/008-BIB17",
      "doi-asserted-by": "publisher",
      "first-page": "112",
      "DOI": "10.1016/0039-6028(69)90010-7",
      "volume": "16",
      "year": "1969",
      "journal-title": "Surface Sci.",
      "ISSN": "https://id.crossref.org/issn/0039-6028",
      "issn-type": "print"
    }
  ],
  "container-title": "Physica Scripta",
  "original-title": [],
  "link": [
    {
      "URL": "https://iopscience.iop.org/article/10.1088/0031-8949/12/6/008",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1088/0031-8949/12/6/008/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1088/0031-8949/12/6/008/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1088/0031-8949/12/6/008/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        10
      ]
    ],
    "date-time": "2024-02-10T10:49:55Z",
    "timestamp": 1707562195000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://iopscience.iop.org/article/10.1088/0031-8949/12/6/008"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1975,
        12,
        1
      ]
    ]
  },
  "references-count": 17,
  "journal-issue": {
    "issue": "6",
    "published-print": {
      "date-parts": [
        [
          1975,
          12,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1088/0031-8949/12/6/008",
  "relation": {},
  "ISSN": [
    "0031-8949",
    "1402-4896"
  ],
  "subject": [],
  "container-title-short": "Phys. Scr.",
  "published": {
    "date-parts": [
      [
        1975,
        12,
        1
      ]
    ]
  },
  "assertion": [
    {
      "value": "Optical Constants of Epitaxial Silicon in the Region 1\u20133.3 eV",
      "name": "article_title",
      "label": "Article Title"
    },
    {
      "value": "Physica Scripta",
      "name": "journal_title",
      "label": "Journal Title"
    },
    {
      "value": "paper",
      "name": "article_type",
      "label": "Article Type"
    },
    {
      "value": "Published under licence by IOP Publishing Ltd",
      "name": "copyright_information",
      "label": "Copyright Information"
    },
    {
      "value": "1975-01-15",
      "name": "date_received",
      "label": "Date Received",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    },
    {
      "name": "date_accepted",
      "label": "Date Accepted",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    },
    {
      "name": "date_epub",
      "label": "Online publication date",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    }
  ]
}