DOI: 10.1088/0022-3727/6/7/306. Measurements of the sputter rate of fused silica bombarded by argon ions of energy 12-32 keV

Measurements of the sputter rate of fused silica bombarded by argon ions of energy 12-32 keV

10.1088/0022-3727/6/7/306

Crossref journal-article

IOP Publishing

Journal of Physics D: Applied Physics (266)

Bibliography

Edwin, R. P. (1973). Measurements of the sputter rate of fused silica bombarded by argon ions of energy 12-32 keV. Journal of Physics D: Applied Physics, 6(7), 833â841.

Authors 1

R P Edwin (first)

References 21 Referenced 24

{'key': '1', 'first-page': '1379', 'volume': '26', 'author': 'Akishin A I', 'year': '1963', 'journal-title': 'Bull. Acad. Sci. USSR Phys. Ser.', 'ISSN': 'http://id.crossref.org/issn/0367-6765', 'issn-type': 'print'} / Bull. Acad. Sci. USSR Phys. Ser. by Akishin A I (1963)
10.1016/0029-554X(61)90026-X
10.1007/BF00602654
10.1016/0022-3093(70)90102-X
10.1007/BF00553763 / J. Mater. Sci. by Bayly A R (1972)
{'key': '6', 'author': 'Bayly A R'} by Bayly A R
10.1016/0374-3926(70)90033-5
10.1364/AO.9.000236 / Appl. Opt. by Bennett J M (1970)
{'key': '9', 'first-page': '515', 'volume': '19', 'author': 'Birch K G', 'year': '1972', 'journal-title': 'J. Phys. E: Sci. Instrum.', 'ISSN': 'http://id.crossref.org/issn/0022-3735', 'issn-type': 'print'} / J. Phys. E: Sci. Instrum. by Birch K G (1972)
{'key': '10', 'author': 'Carter G', 'year': '1968'} by Carter G (1968)
{'key': '11', 'first-page': '165', 'volume': '65', 'author': 'Dugdale R A', 'year': '1966', 'journal-title': 'Trans. Br. Ceram. Soc.', 'ISSN': 'http://id.crossref.org/issn/0371-5469', 'issn-type': 'print'} / Trans. Br. Ceram. Soc. by Dugdale R A (1966)
10.1063/1.1722808 / J. Appl. Phys. by Hines R L (1957)
10.1063/1.1714558 / J. Appl. Phys. by Jorgenson G V (1965)
{'key': '14', 'first-page': '929', 'volume': '5', 'author': 'Pleshivtsev N V', 'year': '1964', 'journal-title': 'Instrums Expl. Tech. Pittsburgh'} / Instrums Expl. Tech. Pittsburgh by Pleshivtsev N V (1964)
10.1063/1.1713718 / J. Appl. Phys. by Ramer C E (1964)
10.1364/AO.10.000295 / Appl. Opt. by Schroeder J B (1971)
10.1364/AO.9.000173 / Appl. Opt. by Tarasevich M (1970)
{'key': '18', 'author': 'Thompson M W', 'year': '1968'} by Thompson M W (1968)
10.1016/0374-3926(70)90003-7
{'key': '20', 'author': 'Wilson R G', 'year': '1969'} by Wilson R G (1969)
10.1063/1.1735896 / J. Appl. Phys. by Yonts O C (1960)

Dates

Type	When
Created	23 years ago (July 26, 2002, 5:58 p.m.)
Deposited	5 years, 4 months ago (April 11, 2020, 5:45 a.m.)
Indexed	1 year, 6 months ago (Feb. 4, 2024, 6:18 p.m.)
Issued	52 years, 3 months ago (May 1, 1973)
Published	52 years, 3 months ago (May 1, 1973)
Published Online	23 years, 3 months ago (May 14, 2002)
Published Print	52 years, 3 months ago (May 1, 1973)

Funders 0

None

BibTeX

@article{Edwin_1973, title={Measurements of the sputter rate of fused silica bombarded by argon ions of energy 12-32 keV}, volume={6}, ISSN={0022-3727}, url={http://dx.doi.org/10.1088/0022-3727/6/7/306}, DOI={10.1088/0022-3727/6/7/306}, number={7}, journal={Journal of Physics D: Applied Physics}, publisher={IOP Publishing}, author={Edwin, R P}, year={1973}, month=may, pages={833–841} }

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