DOI: 10.1088/0022-3727/33/4/201. Magnetron sputtering of transparent conductive zinc oxide: relation between the sputtering parameters and the electronic properties

Magnetron sputtering of transparent conductive zinc oxide: relation between the sputtering parameters and the electronic properties

10.1088/0022-3727/33/4/201

Crossref journal-article

IOP Publishing

Journal of Physics D: Applied Physics (266)

Bibliography

Ellmer, K. (2000). Magnetron sputtering of transparent conductive zinc oxide: relation between the sputtering parameters and the electronic properties. Journal of Physics D: Applied Physics, 33(4), R17âR32.

Authors 1

Klaus Ellmer (first)

References 68 Referenced 524

{'key': '1', 'first-page': '51', 'volume': '27', 'author': 'Schiller S', 'year': '1978', 'journal-title': 'Vakuum-Technik', 'ISSN': 'http://id.crossref.org/issn/0042-2266', 'issn-type': 'print'} / Vakuum-Technik by Schiller S (1978)
{'key': '2', 'first-page': '75', 'volume': '27', 'author': 'Schiller S', 'year': '1978', 'journal-title': 'Vakuum-Technik', 'ISSN': 'http://id.crossref.org/issn/0042-2266', 'issn-type': 'print'} / Vakuum-Technik by Schiller S (1978)
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Dates

Type	When
Created	22 years, 11 months ago (Aug. 25, 2002, 5:44 a.m.)
Deposited	5 years, 4 months ago (April 10, 2020, 7:14 p.m.)
Indexed	2 weeks, 3 days ago (Aug. 5, 2025, 9:03 a.m.)
Issued	25 years, 6 months ago (Feb. 8, 2000)
Published	25 years, 6 months ago (Feb. 8, 2000)
Published Online	25 years, 6 months ago (Feb. 8, 2000)
Published Print	25 years, 6 months ago (Feb. 21, 2000)

Funders 0

None

BibTeX

@article{Ellmer_2000, title={Magnetron sputtering of transparent conductive zinc oxide: relation between the sputtering parameters and the electronic properties}, volume={33}, ISSN={1361-6463}, url={http://dx.doi.org/10.1088/0022-3727/33/4/201}, DOI={10.1088/0022-3727/33/4/201}, number={4}, journal={Journal of Physics D: Applied Physics}, publisher={IOP Publishing}, author={Ellmer, Klaus}, year={2000}, month=feb, pages={R17–R32} }

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