DOI: 10.1080/10584589508012259. Manufacturing of perovskite thin films using liquid delivery MOCVD

Manufacturing of perovskite thin films using liquid delivery MOCVD

10.1080/10584589508012259

Crossref journal-article

Informa UK Limited

Integrated Ferroelectrics (301)

Bibliography

Van Buskirk, P. C., Roeder, J. F., & Bilodeau, S. (1995). Manufacturing of perovskite thin films using liquid delivery MOCVD. Integrated Ferroelectrics, 10(1â4), 9â22.

Authors 3

P. C. Van Buskirk (first)
J. F. Roeder (additional)
S. Bilodeau (additional)

References 40 Referenced 41

{'key': 'CIT0001', 'volume': '823', 'author': 'Koyama K.', 'year': '1991', 'journal-title': 'Proc. IEDM'} / Proc. IEDM by Koyama K. (1991)
{'key': 'CIT0002', 'volume': '631', 'author': 'Eimori T.', 'year': '1993', 'journal-title': 'Proc. IEDM'} / Proc. IEDM by Eimori T. (1993)
10.1143/JJAP.32.4069
10.1143/JJAP.33.5135 / Jpn. J. Appl. Phys. by Shimizu M. (1994)
10.1063/1.107940 / Appl. Phys. Lett. by Zhang J. (1992)
{'key': 'CIT0007', 'first-page': 'C2', 'volume': '1', 'author': 'Fitzer E.', 'year': '1991', 'journal-title': 'J. Physique II'} / J. Physique II by Fitzer E. (1991)
10.1143/JJAP.31.2995 / Jpn. J. Appl. Phys. by Yamazaki H. (1992)
{'key': 'CIT0009', 'series-title': 'MRS Symp. Proc. No. 361', 'volume-title': 'Ferroelectric Thin films IV', 'author': 'Yabuta H.', 'year': '1995'} / Ferroelectric Thin films IV / MRS Symp. Proc. No. 361 by Yabuta H. (1995)
10.1143/JJAP.33.5129
10.1080/10584589508220241 / Integrated Ferroelectrics by Kirlin P. (1995)
{'key': 'CIT0012', 'volume-title': 'Proceedings of the 7th Int. Symp. on Integ. of Ferroelectrics', 'author': 'Schumacher M.', 'year': '1995'} / Proceedings of the 7th Int. Symp. on Integ. of Ferroelectrics by Schumacher M. (1995)
Van Buskirk , P. C. Gardiner , R. A. and Kirlin , P. S. 1991. Evolution of Thin-Film and Surface Microstructure, MRS Symp. Proc. No. 202 235–240.
10.1063/1.347362
Wills , L. A. Wessels , B. W. Schultz , D. L. and Marks , T. J. 1991. Ferroelectric Thin Films II, MRS Symp. Proc. No. 243 217–222.
Van Buskirk , P. C. Gardiner , R. Kirlin , P. S. and Krupanidhi , S. B. 1992. Proceedings, 8thInt. Symp. Applications of Ferroelectrics. August 31-Sept.21992. pp.340–343. Greenville, SC
Advanced Technology Materials LDS-300B
{'key': 'CIT0018', 'volume-title': 'Proceedings of the 5th Int. Symp. on Integ. of Ferroelectrics', 'author': 'Shimizu M.', 'year': '1993'} / Proceedings of the 5th Int. Symp. on Integ. of Ferroelectrics by Shimizu M. (1993)
{'key': 'CIT0019', 'volume-title': 'IEEE Spectrum', 'author': 'Bondurant D.', 'year': '1989'} / IEEE Spectrum by Bondurant D. (1989)
Cataldo , A. January 30 1995. Electronic News January 30, 64
{'key': 'CIT0021', 'volume-title': 'For ferroelectric memories, these will likely include uniformity of crystallographic texture'} / For ferroelectric memories, these will likely include uniformity of crystallographic texture
{'key': 'CIT0022', 'volume-title': 'Proceedings of the MRS', 'author': 'Ananuma K.', 'year': '1994'} / Proceedings of the MRS by Ananuma K. (1994)
The most common destructive techniques involve dissolution of the film followed by combustion or introduction into a plasma. Optical or mass spectrometry can then assess the ratio of the major (and sometimes impurity) constituents. Precision of these techniques depends on the volume of film available and is typically on the order of several%
Secondary ion mass spectrometry (SIMS) and electron spectroscopies such as Auger electron spectroscopy (AES) and x-ray photoelectron spectroscopy (XPS) are sometimes used for composition measurement. Nonuniform sputter yields, and escape depths dependence on the matrix result in relatively poor precision
This effect is sometimes attributed to low dielectric layers at the electrode interface, although absence of frequency dependence in the measured values (unpublished data) points to other, unidentified mechanisms
Capacitance measurements were made using a Keithley C-V instrument, with a Pt bottom electrode that covers the entire substrate and a Pt top electrode with an area of 3.14 × 10−4cm2. Leakage current was measured on capacitors with the same area, using a Keithley 619 electrometer
10.1080/10584589408017028 / Integrated Ferroelectrics by Fazan P. C.
{'key': 'CIT0027a', 'volume-title': 'Proc. 5th Int. Symp. On Integr. Ferroelectrics', 'year': '1993'} / Proc. 5th Int. Symp. On Integr. Ferroelectrics (1993)
Private communication with Rainer Waser
{'key': 'CIT0029', 'volume-title': 'Proc. IEDM', 'author': 'Tarui Y.', 'year': '1994'} / Proc. IEDM by Tarui Y. (1994)
10.1143/JJAP.29.718
{'key': 'CIT0031', 'volume-title': 'Proc. 5th Int. Symp. On Integr. Ferroelectrics', 'author': 'Shimizu M.', 'year': '1993'} / Proc. 5th Int. Symp. On Integr. Ferroelectrics by Shimizu M. (1993)
{'key': 'CIT0032', 'first-page': '223', 'volume': '310', 'author': 'de Keijser M.', 'year': '1993', 'journal-title': 'Ferroelectric Thin Films III, Proc. of the MRS'} / Ferroelectric Thin Films III, Proc. of the MRS by de Keijser M. (1993)
{'issue': '1', 'key': 'CIT0033', 'first-page': '141', 'volume': '6', 'author': 'Van Buskirk P. C.', 'journal-title': 'Integrated Ferroelectrics'} / Integrated Ferroelectrics by Van Buskirk P. C.
{'key': 'CIT0033a', 'volume-title': 'Proc. 6th Int. Symp. On Integr. Ferroelectrics', 'year': '1994'} / Proc. 6th Int. Symp. On Integr. Ferroelectrics (1994)
{'key': 'CIT0034', 'volume-title': 'Proceedings of the 9th Int. Symp. on Appl. of Ferroelectrics', 'author': 'Roeder J. F.', 'year': '1994'} / Proceedings of the 9th Int. Symp. on Appl. of Ferroelectrics by Roeder J. F. (1994)
10.1080/00150198908015737
10.1016/S0020-1693(00)83384-8 / Inorg. Chim. Acta by Papiernik R. (1989)
10.1021/ic00348a012
{'key': 'CIT0038', 'volume': '282', 'author': 'Bradley D. C.', 'year': '1969', 'journal-title': 'J. Chem. Soc. (A)'} / J. Chem. Soc. (A) by Bradley D. C. (1969)
{'key': 'CIT0039', 'series-title': 'Mater. Res. Soc. Symp. Proc. 202', 'volume-title': 'Evolution of Thin-film and Surface Microstructure', 'author': 'Van Buskirk P. C.', 'year': '1991'} / Evolution of Thin-film and Surface Microstructure / Mater. Res. Soc. Symp. Proc. 202 by Van Buskirk P. C. (1991)

Dates

Type	When
Created	18 years, 2 months ago (June 25, 2007, 7:45 p.m.)
Deposited	7 years, 10 months ago (Oct. 31, 2017, 7:49 a.m.)
Indexed	3 months, 1 week ago (May 27, 2025, 11:01 a.m.)
Issued	29 years, 11 months ago (Oct. 1, 1995)
Published	29 years, 11 months ago (Oct. 1, 1995)
Published Online	19 years ago (Aug. 19, 2006)
Published Print	29 years, 11 months ago (Oct. 1, 1995)

Funders 0

None

BibTeX

@article{Van_Buskirk_1995, title={Manufacturing of perovskite thin films using liquid delivery MOCVD}, volume={10}, ISSN={1607-8489}, url={http://dx.doi.org/10.1080/10584589508012259}, DOI={10.1080/10584589508012259}, number={1–4}, journal={Integrated Ferroelectrics}, publisher={Informa UK Limited}, author={Van Buskirk, P. C. and Roeder, J. F. and Bilodeau, S.}, year={1995}, month=oct, pages={9–22} }

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