DOI: 10.1073/pnas.0602893103. Self-assembled single-crystal silicon circuits on plastic

Self-assembled single-crystal silicon circuits on plastic

10.1073/pnas.0602893103

Crossref journal-article

Proceedings of the National Academy of Sciences

Proceedings of the National Academy of Sciences (341)

Abstract

We demonstrate the use of self-assembly for the integration of freestanding micrometer-scale components, including single-crystal, silicon field-effect transistors (FETs) and diffusion resistors, onto flexible plastic substrates. Preferential self-assembly of multiple microcomponent types onto a common platform is achieved through complementary shape recognition and aided by capillary, fluidic, and gravitational forces. We outline a microfabrication process that yields single-crystal, silicon FETs in a freestanding, powder-like collection for use with self-assembly. Demonstrations of self-assembled FETs on plastic include logic inverters and measured electron mobility of 592 cm 2 /V-s. Finally, we extend the self-assembly process to substrates each containing 10,000 binding sites and realize 97% self-assembly yield within 25 min for 100-μm-sized elements. High-yield self-assembly of micrometer-scale functional devices as outlined here provides a powerful approach for production of macroelectronic systems.

Bibliography

Stauth, S. A., & Parviz, B. A. (2006). Self-assembled single-crystal silicon circuits on plastic. Proceedings of the National Academy of Sciences, 103(38), 13922â13927.

Authors 2

Sean A. Stauth (first)
Babak A. Parviz (additional)

References 30 Referenced 182

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Dates

Type	When
Created	18 years, 11 months ago (Sept. 12, 2006, 10:25 p.m.)
Deposited	3 years, 4 months ago (April 12, 2022, 2:38 p.m.)
Indexed	2 days, 11 hours ago (Aug. 27, 2025, 12:37 p.m.)
Issued	18 years, 11 months ago (Sept. 19, 2006)
Published	18 years, 11 months ago (Sept. 19, 2006)
Published Online	18 years, 11 months ago (Sept. 19, 2006)
Published Print	18 years, 11 months ago (Sept. 19, 2006)

Funders 0

None

BibTeX

@article{Stauth_2006, title={Self-assembled single-crystal silicon circuits on plastic}, volume={103}, ISSN={1091-6490}, url={http://dx.doi.org/10.1073/pnas.0602893103}, DOI={10.1073/pnas.0602893103}, number={38}, journal={Proceedings of the National Academy of Sciences}, publisher={Proceedings of the National Academy of Sciences}, author={Stauth, Sean A. and Parviz, Babak A.}, year={2006}, month=sep, pages={13922–13927} }

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