DOI: 10.1063/1.99062. Diffusion of reactive ion beam etched polymers

Diffusion of reactive ion beam etched polymers

10.1063/1.99062

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

The diffusion of deuterated polystyrene (d-PS) in a polystyrene matrix was used to probe the damage to the polymer surface caused by reactive ion beam etching (RIBE). Diffusion was seen to be hindered in a d-PS film treated by RIBE, an immobilization apparently due to crosslinking of the surface monolayer of the polymer sample.

Bibliography

Tead, S. F., Vanderlinde, W. E., Ruoff, A. L., & Kramer, E. J. (1988). Diffusion of reactive ion beam etched polymers. Applied Physics Letters, 52(2), 101â102.

Authors 4

Stanley F. Tead (first)
William E. Vanderlinde (additional)
Arthur L. Ruoff (additional)
Edward J. Kramer (additional)

References 19 Referenced 7

{'key': '2024020222001950100_r1'}
10.1116/1.582994 / J. Vac. Sci. Technol. B (1985)
10.1002/pol.1966.110040309 / J. Polym. Sci. B (1966)
10.1002/app.1967.070110809 / J. Appl. Polym. Sci. (1967)
10.1002/pol.1977.170151004 / J. Polym. Sci. Polym. Chem. Ed. (1977)
{'key': '2024020222001950100_r6', 'first-page': '7', 'volume': '15', 'year': '1981', 'journal-title': 'Polymer'} / Polymer (1981)
{'key': '2024020222001950100_r7', 'first-page': '1147', 'volume': '136', 'year': '1986', 'journal-title': 'Thin Solid Films'} / Thin Solid Films (1986)
10.1007/BFb0038532 / Adv. Polym. Sci. (1982)
10.1021/ma00155a018 / Macromolecules (1986)
10.1146/annurev.ms.13.080183.002213 / Annu. Rev. Mater. Sci. (1983)
10.1063/1.95456 / Appl. Phys. Lett. (1984)
10.1063/1.1660019 / J. Appl. Phys. (1971)
10.1103/PhysRev.124.128 / Phys. Rev. (1961)
{'key': '2024020222001950100_r14', 'first-page': '13', 'volume': '245', 'year': '1973', 'journal-title': 'Nature (London)'} / Nature (London) (1973)
10.1016/0014-3057(74)90142-6 / Eur. Polym. J. (1974)
{'key': '2024020222001950100_r16'}
{'key': '2024020222001950100_r17', 'first-page': '661', 'volume': '32', 'year': '1987', 'journal-title': 'Bull. Am. Phys. Soc.'} / Bull. Am. Phys. Soc. (1987)
10.1063/1.328526 / J. Appl. Phys. (1981)
{'key': '2024020222001950100_r19', 'first-page': '204', 'volume': '16', 'year': '1981', 'journal-title': 'J. Mater. Sci.'} / J. Mater. Sci. (1981)

Dates

Type	When
Created	23 years ago (July 26, 2002, 9:03 a.m.)
Deposited	1 year, 6 months ago (Feb. 2, 2024, 5:15 p.m.)
Indexed	1 year, 6 months ago (Feb. 4, 2024, 11:02 a.m.)
Issued	37 years, 7 months ago (Jan. 11, 1988)
Published	37 years, 7 months ago (Jan. 11, 1988)
Published Print	37 years, 7 months ago (Jan. 11, 1988)

Funders 0

None

BibTeX

@article{Tead_1988, title={Diffusion of reactive ion beam etched polymers}, volume={52}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.99062}, DOI={10.1063/1.99062}, number={2}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Tead, Stanley F. and Vanderlinde, William E. and Ruoff, Arthur L. and Kramer, Edward J.}, year={1988}, month=jan, pages={101–102} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        4
      ]
    ],
    "date-time": "2024-02-04T16:02:10Z",
    "timestamp": 1707062530517
  },
  "reference-count": 19,
  "publisher": "AIP Publishing",
  "issue": "2",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1988,
        1,
        11
      ]
    ]
  },
  "abstract": "<jats:p>The diffusion of deuterated polystyrene (d-PS) in a polystyrene matrix was used to probe the damage to the polymer surface caused by reactive ion beam etching (RIBE). Diffusion was seen to be hindered in a d-PS film treated by RIBE, an immobilization apparently due to crosslinking of the surface monolayer of the polymer sample.</jats:p>",
  "DOI": "10.1063/1.99062",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T13:03:23Z",
    "timestamp": 1027688603000
  },
  "page": "101-102",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 7,
  "title": "Diffusion of reactive ion beam etched polymers",
  "prefix": "10.1063",
  "volume": "52",
  "author": [
    {
      "given": "Stanley F.",
      "family": "Tead",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Department of Materials Science and Engineering, and the Materials Science Center, Cornell University, Ithaca, New York 14853"
        }
      ]
    },
    {
      "given": "William E.",
      "family": "Vanderlinde",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Materials Science and Engineering, and the Materials Science Center, Cornell University, Ithaca, New York 14853"
        }
      ]
    },
    {
      "given": "Arthur L.",
      "family": "Ruoff",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Materials Science and Engineering, and the Materials Science Center, Cornell University, Ithaca, New York 14853"
        }
      ]
    },
    {
      "given": "Edward J.",
      "family": "Kramer",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Materials Science and Engineering, and the Materials Science Center, Cornell University, Ithaca, New York 14853"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020222001950100_r1"
    },
    {
      "key": "2024020222001950100_r2",
      "doi-asserted-by": "crossref",
      "first-page": "1362",
      "DOI": "10.1116/1.582994",
      "volume": "3",
      "year": "1985",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2024020222001950100_r3",
      "doi-asserted-by": "crossref",
      "first-page": "203",
      "DOI": "10.1002/pol.1966.110040309",
      "volume": "4",
      "year": "1966",
      "journal-title": "J. Polym. Sci. B"
    },
    {
      "key": "2024020222001950100_r4",
      "doi-asserted-by": "crossref",
      "first-page": "1461",
      "DOI": "10.1002/app.1967.070110809",
      "volume": "11",
      "year": "1967",
      "journal-title": "J. Appl. Polym. Sci."
    },
    {
      "key": "2024020222001950100_r5",
      "doi-asserted-by": "crossref",
      "first-page": "2321",
      "DOI": "10.1002/pol.1977.170151004",
      "volume": "15",
      "year": "1977",
      "journal-title": "J. Polym. Sci. Polym. Chem. Ed."
    },
    {
      "key": "2024020222001950100_r6",
      "first-page": "7",
      "volume": "15",
      "year": "1981",
      "journal-title": "Polymer"
    },
    {
      "key": "2024020222001950100_r7",
      "first-page": "1147",
      "volume": "136",
      "year": "1986",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2024020222001950100_r8",
      "doi-asserted-by": "crossref",
      "first-page": "67",
      "DOI": "10.1007/BFb0038532",
      "volume": "47",
      "year": "1982",
      "journal-title": "Adv. Polym. Sci."
    },
    {
      "key": "2024020222001950100_r9",
      "doi-asserted-by": "crossref",
      "first-page": "105",
      "DOI": "10.1021/ma00155a018",
      "volume": "19",
      "year": "1986",
      "journal-title": "Macromolecules"
    },
    {
      "key": "2024020222001950100_r10",
      "doi-asserted-by": "crossref",
      "first-page": "413",
      "DOI": "10.1146/annurev.ms.13.080183.002213",
      "volume": "13",
      "year": "1983",
      "journal-title": "Annu. Rev. Mater. Sci."
    },
    {
      "key": "2024020222001950100_r11",
      "doi-asserted-by": "crossref",
      "first-page": "957",
      "DOI": "10.1063/1.95456",
      "volume": "45",
      "year": "1984",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020222001950100_r12",
      "doi-asserted-by": "crossref",
      "first-page": "5837",
      "DOI": "10.1063/1.1660019",
      "volume": "42",
      "year": "1971",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020222001950100_r13",
      "doi-asserted-by": "crossref",
      "first-page": "128",
      "DOI": "10.1103/PhysRev.124.128",
      "volume": "124",
      "year": "1961",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "2024020222001950100_r14",
      "first-page": "13",
      "volume": "245",
      "year": "1973",
      "journal-title": "Nature (London)"
    },
    {
      "key": "2024020222001950100_r15",
      "doi-asserted-by": "crossref",
      "first-page": "861",
      "DOI": "10.1016/0014-3057(74)90142-6",
      "volume": "10",
      "year": "1974",
      "journal-title": "Eur. Polym. J."
    },
    {
      "key": "2024020222001950100_r16"
    },
    {
      "key": "2024020222001950100_r17",
      "first-page": "661",
      "volume": "32",
      "year": "1987",
      "journal-title": "Bull. Am. Phys. Soc."
    },
    {
      "key": "2024020222001950100_r18",
      "doi-asserted-by": "crossref",
      "first-page": "5953",
      "DOI": "10.1063/1.328526",
      "volume": "52",
      "year": "1981",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020222001950100_r19",
      "first-page": "204",
      "volume": "16",
      "year": "1981",
      "journal-title": "J. Mater. Sci."
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/52/2/101/18464195/101_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/52/2/101/18464195/101_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        2
      ]
    ],
    "date-time": "2024-02-02T22:15:43Z",
    "timestamp": 1706912143000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/52/2/101/53698/Diffusion-of-reactive-ion-beam-etched-polymers"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1988,
        1,
        11
      ]
    ]
  },
  "references-count": 19,
  "journal-issue": {
    "issue": "2",
    "published-print": {
      "date-parts": [
        [
          1988,
          1,
          11
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.99062",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1988,
        1,
        11
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1988,
        1,
        11
      ]
    ]
  }
}