DOI: 10.1063/1.97247. Electron spin resonance study of hydrogenation effects in polycrystalline silicon

Electron spin resonance study of hydrogenation effects in polycrystalline silicon

10.1063/1.97247

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Electron spin resonance spectra obtained on polycrystalline silicon produced by annealing of chemical vapor deposition silicon are investigated before and after plasma hydrogenation of the material. Before hydrogenation, two paramagnetic defects are observed, one of them remaining unidentified (g=2.0084). Hydrogenation decreases the total spin density, but the two defects are affected differently; the defect with g=2.0084 is more efficiently passivated. The results are discussed in terms of the inter- and intragranular nature of the paramagnetic defects and of hydrogen diffusivity in the polycrystal.

Bibliography

Ballutaud, D., Aucouturier, M., & Babonneau, F. (1986). Electron spin resonance study of hydrogenation effects in polycrystalline silicon. Applied Physics Letters, 49(23), 1620â1622.

Authors 3

Dominique Ballutaud (first)
Marc Aucouturier (additional)
Florence Babonneau (additional)

References 22 Referenced 28

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{'key': '2024020220572189100_r3', 'first-page': '703', 'volume': '77&78', 'year': '1985', 'journal-title': 'J. Non-Cryst. Solids'} / J. Non-Cryst. Solids (1985)
{'key': '2024020220572189100_r4', 'first-page': '914', 'volume': '117&118', 'year': '1983', 'journal-title': 'Physica B'} / Physica B (1983)
10.1063/1.95045 / Appl. Phys. Lett. (1984)
{'key': '2024020220572189100_r6', 'first-page': 'C4', 'volume': '44', 'year': '1983', 'journal-title': 'J. Phys. (Paris)'} / J. Phys. (Paris) (1983)
{'key': '2024020220572189100_r7'}
{'key': '2024020220572189100_r8', 'first-page': 'C5', 'volume': '44', 'year': '1983', 'journal-title': 'J. Phys. (Paris)'} / J. Phys. (Paris) (1983)
{'key': '2024020220572189100_r9', 'first-page': 'C1', 'volume': '43', 'year': '1982', 'journal-title': 'J. Phys. (Paris)'} / J. Phys. (Paris) (1982)
{'key': '2024020220572189100_r10'}
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{'key': '2024020220572189100_r13'}
{'key': '2024020220572189100_r14'}
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10.1080/01418638108225806 / Philos. Mag. B (1981)
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Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 8:46 a.m.)
Deposited	1 year, 7 months ago (Feb. 2, 2024, 4:26 p.m.)
Indexed	3 months ago (May 27, 2025, 10:58 a.m.)
Issued	38 years, 8 months ago (Dec. 8, 1986)
Published	38 years, 8 months ago (Dec. 8, 1986)
Published Print	38 years, 8 months ago (Dec. 8, 1986)

Funders 0

None

BibTeX

@article{Ballutaud_1986, title={Electron spin resonance study of hydrogenation effects in polycrystalline silicon}, volume={49}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.97247}, DOI={10.1063/1.97247}, number={23}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Ballutaud, Dominique and Aucouturier, Marc and Babonneau, Florence}, year={1986}, month=dec, pages={1620–1622} }

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